Machlin, E. S. (1995). Materials science in microelectronics: The relationships between thin film processing and structure (1. print.). Giro Press.
Chicago-Zitierstil (17. Ausg.)Machlin, Eugene S. Materials Science in Microelectronics: The Relationships Between Thin Film Processing and Structure. 1. print. Croton-on-Hudson, NY: Giro Press, 1995.
MLA-Zitierstil (9. Ausg.)Machlin, Eugene S. Materials Science in Microelectronics: The Relationships Between Thin Film Processing and Structure. 1. print. Giro Press, 1995.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.