Chemical vapor deposition: thermal and plasma deposition of electronic materials
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York [u.a.]
Van Nostrand Reinhold
1995
|
| Schlagworte: | |
| Beschreibung: | XII, 292 S. Ill., graph. Darst. |
| ISBN: | 0442010796 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV010344273 | ||
| 003 | DE-604 | ||
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| 007 | t | ||
| 008 | 950817s1995 ad|| |||| 00||| eng d | ||
| 020 | |a 0442010796 |9 0-442-01079-6 | ||
| 035 | |a (OCoLC)31330483 | ||
| 035 | |a (DE-599)BVBBV010344273 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T |a DE-703 |a DE-91 |a DE-M347 |a DE-83 | ||
| 050 | 0 | |a TK7836 | |
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| 084 | |a UP 7550 |0 (DE-625)146434: |2 rvk | ||
| 084 | |a ELT 279f |2 stub | ||
| 100 | 1 | |a Sivaram, Srinvasam |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Chemical vapor deposition |b thermal and plasma deposition of electronic materials |c S. Sivaram |
| 264 | 1 | |a New York [u.a.] |b Van Nostrand Reinhold |c 1995 | |
| 300 | |a XII, 292 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 7 | |a Dépôt chimique en phase vapeur |2 ram | |
| 650 | 7 | |a Microélectronique - Appareils et matériel |2 ram | |
| 650 | 7 | |a Microélectronique - Industrie et commerce |2 ram | |
| 650 | 4 | |a Chemical vapor deposition | |
| 650 | 4 | |a Microelectronics industry | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 0 | 7 | |a CVD-Verfahren |0 (DE-588)4009846-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a CVD-Verfahren |0 (DE-588)4009846-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a CVD-Verfahren |0 (DE-588)4009846-1 |D s |
| 689 | 1 | 1 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 1 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006885327 | ||
Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Sivaram, Srinvasam |
| author_facet | Sivaram, Srinvasam |
| author_role | aut |
| author_sort | Sivaram, Srinvasam |
| author_variant | s s ss |
| building | Verbundindex |
| bvnumber | BV010344273 |
| callnumber-first | T - Technology |
| callnumber-label | TK7836 |
| callnumber-raw | TK7836 |
| callnumber-search | TK7836 |
| callnumber-sort | TK 47836 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 7550 |
| classification_tum | ELT 279f |
| ctrlnum | (OCoLC)31330483 (DE-599)BVBBV010344273 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV010344273 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:50:53Z |
| institution | BVB |
| isbn | 0442010796 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006885327 |
| oclc_num | 31330483 |
| open_access_boolean | |
| owner | DE-29T DE-703 DE-91 DE-BY-TUM DE-M347 DE-83 |
| owner_facet | DE-29T DE-703 DE-91 DE-BY-TUM DE-M347 DE-83 |
| physical | XII, 292 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Van Nostrand Reinhold |
| record_format | marc |
| spelling | Sivaram, Srinvasam Verfasser aut Chemical vapor deposition thermal and plasma deposition of electronic materials S. Sivaram New York [u.a.] Van Nostrand Reinhold 1995 XII, 292 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Dépôt chimique en phase vapeur ram Microélectronique - Appareils et matériel ram Microélectronique - Industrie et commerce ram Chemical vapor deposition Microelectronics industry Microelectronics Materials CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 s DE-604 Mikroelektronik (DE-588)4039207-7 s |
| spellingShingle | Sivaram, Srinvasam Chemical vapor deposition thermal and plasma deposition of electronic materials Dépôt chimique en phase vapeur ram Microélectronique - Appareils et matériel ram Microélectronique - Industrie et commerce ram Chemical vapor deposition Microelectronics industry Microelectronics Materials CVD-Verfahren (DE-588)4009846-1 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4009846-1 (DE-588)4039207-7 |
| title | Chemical vapor deposition thermal and plasma deposition of electronic materials |
| title_auth | Chemical vapor deposition thermal and plasma deposition of electronic materials |
| title_exact_search | Chemical vapor deposition thermal and plasma deposition of electronic materials |
| title_full | Chemical vapor deposition thermal and plasma deposition of electronic materials S. Sivaram |
| title_fullStr | Chemical vapor deposition thermal and plasma deposition of electronic materials S. Sivaram |
| title_full_unstemmed | Chemical vapor deposition thermal and plasma deposition of electronic materials S. Sivaram |
| title_short | Chemical vapor deposition |
| title_sort | chemical vapor deposition thermal and plasma deposition of electronic materials |
| title_sub | thermal and plasma deposition of electronic materials |
| topic | Dépôt chimique en phase vapeur ram Microélectronique - Appareils et matériel ram Microélectronique - Industrie et commerce ram Chemical vapor deposition Microelectronics industry Microelectronics Materials CVD-Verfahren (DE-588)4009846-1 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Dépôt chimique en phase vapeur Microélectronique - Appareils et matériel Microélectronique - Industrie et commerce Chemical vapor deposition Microelectronics industry Microelectronics Materials CVD-Verfahren Mikroelektronik |
| work_keys_str_mv | AT sivaramsrinvasam chemicalvapordepositionthermalandplasmadepositionofelectronicmaterials |