Plasma sources for thin film deposition and etching:
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
San Diego
Academic Press
[1994]
|
| Schriftenreihe: | Physics of thin films
Volume 18 |
| Schlagworte: | |
| Beschreibung: | XII, 328 Seiten Illustrationen, Diagramme |
| ISBN: | 0125330189 |
Internformat
MARC
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| 245 | 1 | 0 | |a Plasma sources for thin film deposition and etching |c edited by Maurice H. Francombe, John L. Vossen |
| 264 | 1 | |a San Diego |b Academic Press |c [1994] | |
| 264 | 4 | |c © 1994 | |
| 300 | |a XII, 328 Seiten |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Physics of thin films |v Volume 18 | |
| 650 | 7 | |a Couches minces |2 ram | |
| 650 | 7 | |a Projection au plasma |2 ram | |
| 650 | 7 | |a Technique des plasmas |2 ram | |
| 650 | 4 | |a Thin films | |
| 650 | 0 | 7 | |a Plasmaanlage |0 (DE-588)4139324-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Herstellung |0 (DE-588)4159653-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
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| 700 | 1 | |a Francombe, Maurice H. |4 edt | |
| 700 | 1 | |a Vossen, John L. |4 edt | |
| 830 | 0 | |a Physics of thin films |v Volume 18 |w (DE-604)BV002571943 |9 18 | |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author2 | Francombe, Maurice H. Vossen, John L. |
| author2_role | edt edt |
| author2_variant | m h f mh mhf j l v jl jlv |
| author_facet | Francombe, Maurice H. Vossen, John L. |
| building | Verbundindex |
| bvnumber | BV010294508 |
| callnumber-first | Q - Science |
| callnumber-label | QC1 |
| callnumber-raw | QC1 |
| callnumber-search | QC1 |
| callnumber-sort | QC 11 |
| callnumber-subject | QC - Physics |
| classification_rvk | UP 1100 UP 7550 |
| ctrlnum | (OCoLC)636733211 (DE-599)BVBBV010294508 |
| dewey-full | 530.82 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.82 |
| dewey-search | 530.82 |
| dewey-sort | 3530.82 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| format | Book |
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| id | DE-604.BV010294508 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:50:00Z |
| institution | BVB |
| isbn | 0125330189 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006848685 |
| oclc_num | 636733211 |
| open_access_boolean | |
| owner | DE-83 DE-11 |
| owner_facet | DE-83 DE-11 |
| physical | XII, 328 Seiten Illustrationen, Diagramme |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Academic Press |
| record_format | marc |
| series | Physics of thin films |
| series2 | Physics of thin films |
| spelling | Plasma sources for thin film deposition and etching edited by Maurice H. Francombe, John L. Vossen San Diego Academic Press [1994] © 1994 XII, 328 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Physics of thin films Volume 18 Couches minces ram Projection au plasma ram Technique des plasmas ram Thin films Plasmaanlage (DE-588)4139324-7 gnd rswk-swf Herstellung (DE-588)4159653-5 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s Herstellung (DE-588)4159653-5 s Plasmaanlage (DE-588)4139324-7 s DE-604 Ätzen (DE-588)4000648-7 s Francombe, Maurice H. edt Vossen, John L. edt Physics of thin films Volume 18 (DE-604)BV002571943 18 |
| spellingShingle | Plasma sources for thin film deposition and etching Physics of thin films Couches minces ram Projection au plasma ram Technique des plasmas ram Thin films Plasmaanlage (DE-588)4139324-7 gnd Herstellung (DE-588)4159653-5 gnd Ätzen (DE-588)4000648-7 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4139324-7 (DE-588)4159653-5 (DE-588)4000648-7 (DE-588)4136925-7 |
| title | Plasma sources for thin film deposition and etching |
| title_auth | Plasma sources for thin film deposition and etching |
| title_exact_search | Plasma sources for thin film deposition and etching |
| title_full | Plasma sources for thin film deposition and etching edited by Maurice H. Francombe, John L. Vossen |
| title_fullStr | Plasma sources for thin film deposition and etching edited by Maurice H. Francombe, John L. Vossen |
| title_full_unstemmed | Plasma sources for thin film deposition and etching edited by Maurice H. Francombe, John L. Vossen |
| title_short | Plasma sources for thin film deposition and etching |
| title_sort | plasma sources for thin film deposition and etching |
| topic | Couches minces ram Projection au plasma ram Technique des plasmas ram Thin films Plasmaanlage (DE-588)4139324-7 gnd Herstellung (DE-588)4159653-5 gnd Ätzen (DE-588)4000648-7 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Couches minces Projection au plasma Technique des plasmas Thin films Plasmaanlage Herstellung Ätzen Dünne Schicht |
| volume_link | (DE-604)BV002571943 |
| work_keys_str_mv | AT francombemauriceh plasmasourcesforthinfilmdepositionandetching AT vossenjohnl plasmasourcesforthinfilmdepositionandetching |