TiN-Beschichtungen mittels Plasma-CVD:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | German |
| Veröffentlicht: |
Aachen
Shaker
1995
|
| Ausgabe: | Als Ms. gedr. |
| Schriftenreihe: | Berichte aus der Werkstofftechnik
|
| Schlagworte: | |
| Beschreibung: | Zugl.: Bremen, Univ., Diss., 1994 |
| Beschreibung: | III, 150 S. Ill., graph. Darst. |
| ISBN: | 3826507320 |
Internformat
MARC
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|---|---|---|---|
| 001 | BV010229553 | ||
| 003 | DE-604 | ||
| 005 | 19950906 | ||
| 007 | t | ||
| 008 | 950612s1995 gw ad|| m||| 00||| ger d | ||
| 016 | 7 | |a 944560491 |2 DE-101 | |
| 020 | |a 3826507320 |c kart. : DM 89.00, sfr 89.00, S 619.00 |9 3-8265-0732-0 | ||
| 035 | |a (OCoLC)75582301 | ||
| 035 | |a (DE-599)BVBBV010229553 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a ger | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-92 |a DE-83 | ||
| 084 | |a ZM 7680 |0 (DE-625)160562: |2 rvk | ||
| 100 | 1 | |a Crummenauer, Jürgen |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a TiN-Beschichtungen mittels Plasma-CVD |c Jürgen Crummenauer |
| 250 | |a Als Ms. gedr. | ||
| 264 | 1 | |a Aachen |b Shaker |c 1995 | |
| 300 | |a III, 150 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Berichte aus der Werkstofftechnik | |
| 500 | |a Zugl.: Bremen, Univ., Diss., 1994 | ||
| 650 | 0 | 7 | |a Titannitrid |0 (DE-588)4185564-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a PECVD-Verfahren |0 (DE-588)4267316-1 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Titannitrid |0 (DE-588)4185564-4 |D s |
| 689 | 0 | 1 | |a PECVD-Verfahren |0 (DE-588)4267316-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006799924 | ||
Datensatz im Suchindex
| _version_ | 1804124641058357248 |
|---|---|
| any_adam_object | |
| author | Crummenauer, Jürgen |
| author_facet | Crummenauer, Jürgen |
| author_role | aut |
| author_sort | Crummenauer, Jürgen |
| author_variant | j c jc |
| building | Verbundindex |
| bvnumber | BV010229553 |
| classification_rvk | ZM 7680 |
| ctrlnum | (OCoLC)75582301 (DE-599)BVBBV010229553 |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| edition | Als Ms. gedr. |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV010229553 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:48:53Z |
| institution | BVB |
| isbn | 3826507320 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006799924 |
| oclc_num | 75582301 |
| open_access_boolean | |
| owner | DE-92 DE-83 |
| owner_facet | DE-92 DE-83 |
| physical | III, 150 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Shaker |
| record_format | marc |
| series2 | Berichte aus der Werkstofftechnik |
| spelling | Crummenauer, Jürgen Verfasser aut TiN-Beschichtungen mittels Plasma-CVD Jürgen Crummenauer Als Ms. gedr. Aachen Shaker 1995 III, 150 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Berichte aus der Werkstofftechnik Zugl.: Bremen, Univ., Diss., 1994 Titannitrid (DE-588)4185564-4 gnd rswk-swf PECVD-Verfahren (DE-588)4267316-1 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Titannitrid (DE-588)4185564-4 s PECVD-Verfahren (DE-588)4267316-1 s DE-604 |
| spellingShingle | Crummenauer, Jürgen TiN-Beschichtungen mittels Plasma-CVD Titannitrid (DE-588)4185564-4 gnd PECVD-Verfahren (DE-588)4267316-1 gnd |
| subject_GND | (DE-588)4185564-4 (DE-588)4267316-1 (DE-588)4113937-9 |
| title | TiN-Beschichtungen mittels Plasma-CVD |
| title_auth | TiN-Beschichtungen mittels Plasma-CVD |
| title_exact_search | TiN-Beschichtungen mittels Plasma-CVD |
| title_full | TiN-Beschichtungen mittels Plasma-CVD Jürgen Crummenauer |
| title_fullStr | TiN-Beschichtungen mittels Plasma-CVD Jürgen Crummenauer |
| title_full_unstemmed | TiN-Beschichtungen mittels Plasma-CVD Jürgen Crummenauer |
| title_short | TiN-Beschichtungen mittels Plasma-CVD |
| title_sort | tin beschichtungen mittels plasma cvd |
| topic | Titannitrid (DE-588)4185564-4 gnd PECVD-Verfahren (DE-588)4267316-1 gnd |
| topic_facet | Titannitrid PECVD-Verfahren Hochschulschrift |
| work_keys_str_mv | AT crummenauerjurgen tinbeschichtungenmittelsplasmacvd |