Ion implantation: Basics to device fabrication:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boston u.a.
Kluwer Acad. Publ.
1995
|
| Series: | Electronic materials: Science and technology
|
| Subjects: | |
| Physical Description: | XII, 393 S. Ill., graph. Darst. |
| ISBN: | 0792395204 |
Staff View
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Record in the Search Index
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV010206512 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:48:25Z |
| institution | BVB |
| isbn | 0792395204 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006781681 |
| oclc_num | 31171598 |
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| owner_facet | DE-384 DE-703 |
| physical | XII, 393 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Kluwer Acad. Publ. |
| record_format | marc |
| series2 | Electronic materials: Science and technology |
| spelling | Rimini, Emanuele Verfasser aut Ion implantation: Basics to device fabrication by Emanuele Rimini Boston u.a. Kluwer Acad. Publ. 1995 XII, 393 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electronic materials: Science and technology Ion implantation Semiconductor doping Semiconductors Design and construction Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 s DE-604 |
| spellingShingle | Rimini, Emanuele Ion implantation: Basics to device fabrication Ion implantation Semiconductor doping Semiconductors Design and construction Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 |
| title | Ion implantation: Basics to device fabrication |
| title_auth | Ion implantation: Basics to device fabrication |
| title_exact_search | Ion implantation: Basics to device fabrication |
| title_full | Ion implantation: Basics to device fabrication by Emanuele Rimini |
| title_fullStr | Ion implantation: Basics to device fabrication by Emanuele Rimini |
| title_full_unstemmed | Ion implantation: Basics to device fabrication by Emanuele Rimini |
| title_short | Ion implantation: Basics to device fabrication |
| title_sort | ion implantation basics to device fabrication |
| topic | Ion implantation Semiconductor doping Semiconductors Design and construction Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ion implantation Semiconductor doping Semiconductors Design and construction Ionenimplantation |
| work_keys_str_mv | AT riminiemanuele ionimplantationbasicstodevicefabrication |