Ion implantation: Basics to device fabrication:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boston u.a.
Kluwer Acad. Publ.
1995
|
| Schriftenreihe: | Electronic materials: Science and technology
|
| Schlagworte: | |
| Beschreibung: | XII, 393 S. Ill., graph. Darst. |
| ISBN: | 0792395204 |
Internformat
MARC
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| 035 | |a (DE-599)BVBBV010206512 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 |a DE-703 | ||
| 050 | 0 | |a QC702.7.I55 | |
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| 245 | 1 | 0 | |a Ion implantation: Basics to device fabrication |c by Emanuele Rimini |
| 264 | 1 | |a Boston u.a. |b Kluwer Acad. Publ. |c 1995 | |
| 300 | |a XII, 393 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Electronic materials: Science and technology | |
| 650 | 4 | |a Ion implantation | |
| 650 | 4 | |a Semiconductor doping | |
| 650 | 4 | |a Semiconductors |x Design and construction | |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006781681 | ||
Datensatz im Suchindex
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|---|---|
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| author | Rimini, Emanuele |
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| bvnumber | BV010206512 |
| callnumber-first | Q - Science |
| callnumber-label | QC702 |
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| callnumber-search | QC702.7.I55 |
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| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV010206512 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:48:25Z |
| institution | BVB |
| isbn | 0792395204 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006781681 |
| oclc_num | 31171598 |
| open_access_boolean | |
| owner | DE-384 DE-703 |
| owner_facet | DE-384 DE-703 |
| physical | XII, 393 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Kluwer Acad. Publ. |
| record_format | marc |
| series2 | Electronic materials: Science and technology |
| spelling | Rimini, Emanuele Verfasser aut Ion implantation: Basics to device fabrication by Emanuele Rimini Boston u.a. Kluwer Acad. Publ. 1995 XII, 393 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electronic materials: Science and technology Ion implantation Semiconductor doping Semiconductors Design and construction Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 s DE-604 |
| spellingShingle | Rimini, Emanuele Ion implantation: Basics to device fabrication Ion implantation Semiconductor doping Semiconductors Design and construction Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 |
| title | Ion implantation: Basics to device fabrication |
| title_auth | Ion implantation: Basics to device fabrication |
| title_exact_search | Ion implantation: Basics to device fabrication |
| title_full | Ion implantation: Basics to device fabrication by Emanuele Rimini |
| title_fullStr | Ion implantation: Basics to device fabrication by Emanuele Rimini |
| title_full_unstemmed | Ion implantation: Basics to device fabrication by Emanuele Rimini |
| title_short | Ion implantation: Basics to device fabrication |
| title_sort | ion implantation basics to device fabrication |
| topic | Ion implantation Semiconductor doping Semiconductors Design and construction Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ion implantation Semiconductor doping Semiconductors Design and construction Ionenimplantation |
| work_keys_str_mv | AT riminiemanuele ionimplantationbasicstodevicefabrication |