Computational modeling in semiconductor processing:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Boston [u.a.]
Artech House
1995
|
| Series: | Artech House materials science library
|
| Subjects: | |
| Physical Description: | X, 363 S. graph. Darst. |
| ISBN: | 0890067074 |
Staff View
MARC
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| 245 | 1 | 0 | |a Computational modeling in semiconductor processing |c M. Meyyappan, ed. |
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| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV010169271 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:47:41Z |
| institution | BVB |
| isbn | 0890067074 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006754015 |
| oclc_num | 30518321 |
| open_access_boolean | |
| owner | DE-29T DE-91 DE-BY-TUM |
| owner_facet | DE-29T DE-91 DE-BY-TUM |
| physical | X, 363 S. graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Artech House |
| record_format | marc |
| series2 | Artech House materials science library |
| spelling | Computational modeling in semiconductor processing M. Meyyappan, ed. Boston [u.a.] Artech House 1995 X, 363 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Artech House materials science library Datenverarbeitung Mathematisches Modell Process control Mathematical models Semiconductor industry Semiconductors Design and construction Data processing Computersimulation (DE-588)4148259-1 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Computersimulation (DE-588)4148259-1 s DE-604 Meyyappan, M. Sonstige oth |
| spellingShingle | Computational modeling in semiconductor processing Datenverarbeitung Mathematisches Modell Process control Mathematical models Semiconductor industry Semiconductors Design and construction Data processing Computersimulation (DE-588)4148259-1 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4148259-1 (DE-588)4158814-9 |
| title | Computational modeling in semiconductor processing |
| title_auth | Computational modeling in semiconductor processing |
| title_exact_search | Computational modeling in semiconductor processing |
| title_full | Computational modeling in semiconductor processing M. Meyyappan, ed. |
| title_fullStr | Computational modeling in semiconductor processing M. Meyyappan, ed. |
| title_full_unstemmed | Computational modeling in semiconductor processing M. Meyyappan, ed. |
| title_short | Computational modeling in semiconductor processing |
| title_sort | computational modeling in semiconductor processing |
| topic | Datenverarbeitung Mathematisches Modell Process control Mathematical models Semiconductor industry Semiconductors Design and construction Data processing Computersimulation (DE-588)4148259-1 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Datenverarbeitung Mathematisches Modell Process control Mathematical models Semiconductor industry Semiconductors Design and construction Data processing Computersimulation Halbleitertechnologie |
| work_keys_str_mv | AT meyyappanm computationalmodelinginsemiconductorprocessing |