Computational modeling in semiconductor processing:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Boston [u.a.]
Artech House
1995
|
| Schriftenreihe: | Artech House materials science library
|
| Schlagworte: | |
| Beschreibung: | X, 363 S. graph. Darst. |
| ISBN: | 0890067074 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV010169271 | ||
| 003 | DE-604 | ||
| 005 | 20030820 | ||
| 007 | t | ||
| 008 | 950505s1995 d||| |||| 00||| eng d | ||
| 020 | |a 0890067074 |9 0-89006-707-4 | ||
| 035 | |a (OCoLC)30518321 | ||
| 035 | |a (DE-599)BVBBV010169271 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T |a DE-91 | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2/0113 |2 20 | |
| 084 | |a ZN 4810 |0 (DE-625)157409: |2 rvk | ||
| 084 | |a ELT 303f |2 stub | ||
| 245 | 1 | 0 | |a Computational modeling in semiconductor processing |c M. Meyyappan, ed. |
| 264 | 1 | |a Boston [u.a.] |b Artech House |c 1995 | |
| 300 | |a X, 363 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Artech House materials science library | |
| 650 | 4 | |a Datenverarbeitung | |
| 650 | 4 | |a Mathematisches Modell | |
| 650 | 4 | |a Process control |x Mathematical models | |
| 650 | 4 | |a Semiconductor industry | |
| 650 | 4 | |a Semiconductors |x Design and construction |x Data processing | |
| 650 | 0 | 7 | |a Computersimulation |0 (DE-588)4148259-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | 1 | |a Computersimulation |0 (DE-588)4148259-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Meyyappan, M. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006754015 | ||
Datensatz im Suchindex
| _version_ | 1804124565622751232 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV010169271 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4810 |
| classification_tum | ELT 303f |
| ctrlnum | (OCoLC)30518321 (DE-599)BVBBV010169271 |
| dewey-full | 621.3815/2/0113 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2/0113 |
| dewey-search | 621.3815/2/0113 |
| dewey-sort | 3621.3815 12 3113 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01441nam a2200433 c 4500</leader><controlfield tag="001">BV010169271</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20030820 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">950505s1995 d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0890067074</subfield><subfield code="9">0-89006-707-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)30518321</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV010169271</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-91</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2/0113</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4810</subfield><subfield code="0">(DE-625)157409:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 303f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Computational modeling in semiconductor processing</subfield><subfield code="c">M. Meyyappan, ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boston [u.a.]</subfield><subfield code="b">Artech House</subfield><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 363 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Artech House materials science library</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Datenverarbeitung</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Mathematisches Modell</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Process control</subfield><subfield code="x">Mathematical models</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor industry</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield><subfield code="x">Data processing</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Computersimulation</subfield><subfield code="0">(DE-588)4148259-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Computersimulation</subfield><subfield code="0">(DE-588)4148259-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Meyyappan, M.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-006754015</subfield></datafield></record></collection> |
| id | DE-604.BV010169271 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:47:41Z |
| institution | BVB |
| isbn | 0890067074 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006754015 |
| oclc_num | 30518321 |
| open_access_boolean | |
| owner | DE-29T DE-91 DE-BY-TUM |
| owner_facet | DE-29T DE-91 DE-BY-TUM |
| physical | X, 363 S. graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Artech House |
| record_format | marc |
| series2 | Artech House materials science library |
| spelling | Computational modeling in semiconductor processing M. Meyyappan, ed. Boston [u.a.] Artech House 1995 X, 363 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Artech House materials science library Datenverarbeitung Mathematisches Modell Process control Mathematical models Semiconductor industry Semiconductors Design and construction Data processing Computersimulation (DE-588)4148259-1 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Computersimulation (DE-588)4148259-1 s DE-604 Meyyappan, M. Sonstige oth |
| spellingShingle | Computational modeling in semiconductor processing Datenverarbeitung Mathematisches Modell Process control Mathematical models Semiconductor industry Semiconductors Design and construction Data processing Computersimulation (DE-588)4148259-1 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4148259-1 (DE-588)4158814-9 |
| title | Computational modeling in semiconductor processing |
| title_auth | Computational modeling in semiconductor processing |
| title_exact_search | Computational modeling in semiconductor processing |
| title_full | Computational modeling in semiconductor processing M. Meyyappan, ed. |
| title_fullStr | Computational modeling in semiconductor processing M. Meyyappan, ed. |
| title_full_unstemmed | Computational modeling in semiconductor processing M. Meyyappan, ed. |
| title_short | Computational modeling in semiconductor processing |
| title_sort | computational modeling in semiconductor processing |
| topic | Datenverarbeitung Mathematisches Modell Process control Mathematical models Semiconductor industry Semiconductors Design and construction Data processing Computersimulation (DE-588)4148259-1 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Datenverarbeitung Mathematisches Modell Process control Mathematical models Semiconductor industry Semiconductors Design and construction Data processing Computersimulation Halbleitertechnologie |
| work_keys_str_mv | AT meyyappanm computationalmodelinginsemiconductorprocessing |