This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93): Yokohama, Japan, June 7 - 10, 1993
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Lausanne, Switzerland
Elsevier
1994
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| Schriftenreihe: | Sensors and actuators : A
43 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Einzelaufnahme eines Zs.-Bandes |
| Beschreibung: | X, 384 S. Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
| _version_ | 1804124509669687296 |
|---|---|
| adam_text | SENSORS
AND ACTUATORS A
VOLUME
43,
NUMBERS
1-3,
MAY
1994
Contents
Preface
.......................................................................... 1
A. Sasaki (Kyoto, Japan)
General
Design optimisation of integrated microhotplates
.............................................. 3
N.R. Swart and A. Nathan (Waterloo,
Ont.,
Canada)
Physical Sensors
Fabrication of a magnetic transducer composed of a high-density array of microelectromagnets with on-chip
electronics
....................................................................... 11
F. Cardot, J. Gobet, M. Bogdanski and F. Rudolf
(Neuchâtel,
Switzerland)
Surface micromachined tuneable interferometer array
........................................... 17
K. Aratani (Tokyo, Japan), P.J. French, P.M.
Sarro
(Delft, Netherlands), D. Poenar (Tokyo, Japan),
R.F. Wolffenbuttel and S. Middelhoek (Delft, Netherlands)
Liquid and gas micro-calorimeters for (bio)chemical measurements
.................................. 24
A.W. van
Herwaarden,
P.M.
Sarro
(Delft, Netherlands), J.W. Gardner (Coventry, UK) and P. Bataillard (Basle,
Switzerland)
A CMOS-compatible monolithic conductivity sensor with integrated electrodes
.......................... 31
N.
Kördas,
Y.
Manoli,
W. Mokwa
and
M. Rospert
(Duisburg,
Germany)
A Love wave sensor for (bio)chemical sensing in liquids
......................................... 38
G.
Kovács,
MJ.
Vellekoop, R.
Haueis,
G.W.
Lubking and A. Venema (Delft, Netherlands)
Control of the dynamic range and sensitivity of a surface plasmon resonance based fiber optic sensor
.......... 44
R.C. Jorgenson and
S.S.
Yee (Seattle,
WA, USA)
An optical sensor for the non-invasive measurement of the blood oxygen saturation of an artificial heart according to
the variation of hematocrit
............................................................ 49
K. Kwon and S. Park (Taegu, South Korea)
A system for passive implantable pressure sensors
............................................. 55
L.
Rosengren,
P.
Rangsten,
Y.
Bäcklund, B. Hök, B. Svedbergh and G. Selen (Uppsala,
Sweden)
High temperature pressure sensor using double SOI structures with two A12O3 films
...................... 59
Y.-T. Lee,
H. Seo, M. Ishida, S.
Kawahito and T. Nakamura (Toyohashi, Japan)
Micromachined gyroscopes
............................................................. 65
J.
Söderkvist (Täby,
Sweden)
A study of silicon angular rate sensors using anisotropic etching technology
............................ 72
K. Maenaka (Hyogo, Japan) and T. Shiozawa (Nagano, Japan)
Light-to-light transducer with detection of brightness difference
.................................... 78
S. Noda, K. Shibata and A. Sasaki (Kyoto, Japan)
Optical system for pressure and temperature sensing
........................................... 85
K.
Seibert,
D.
Lărgeau,
В.
Bonvalot (Montrouge, France), D.T. Angelidis
and P. Parsons (Farnborough, UK)
Fabrication and packaging of a resonant infrared sensor integrated in silicon
........................... 92
C. Cabuz (Bucharest, Romania), S. Shoji, K. Fukatsu (Sendai, Japan), E. Cabuz (Bucharest, Romania), K.
Minami
and M. Esashi (Sendai, Japan)
Application of electrostatic feedback to critical damping of an integrated silicon
capacitive accelerometer
........ 100
R.P. van
Kampen,
MJ.
Vellekoop,
P.M.
Sarro
and R.F. Wolffenbuttel (Delft, Netherlands)
A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers
............... 107
H.K.
Rockstad,
T.W.
Kenny, J.K. Reynolds, W.J. Kaiser (Pasadena, CA, USA) and T.B.
Gabrielson
(Warminster,
PA, USA)
Vlil
Fabrication
and characterization of a twin-mass accelerometer
..................................... 115
С
Burrer, J.
Esteve,
J.A. Plaza, M.
Bao
(Bellaterra, Barcelona, Spain), O. Ruiz and J. Samitier (Barcelona,
Spain)
A novel degree of freedom separation technique in a multi-axis accelerometer
.......................... 120
K. Yamada and T. Kuriyama (Kanagawa, Japan)
A fluxgate magnetic sensor with micro-solenoids and electroplated permalloy cores
....................... 128
S. Kawahito, Y. Sasaki, H. Sato, T. Nakamura and Y. Tadokoro (Toyohashi, Japan)
High sensitivity Hall sensors with low thermal drift using AlGaAsAnGaAs/GaAs heterostructures
............. 135
V. Mosser (Montrouge, France),
S. Contreras (Montpellier,
France),
S.
Aboulhouda (Montrouge, France),
Ph.
Lorenzini, F.
Kobbi, J.L. Robert
(Montpellier,
France) and K. Zekentes (Heraklion, Crete, Greece)
Detection of actomyosin depolymerization by piezoelectric quartz crystal: possibility for development of a meat-freshness
sensor
.......................................................................... 141
S. Kurosawa (Sapporo, Japan), E.
Němoto
(Katsuta,
Japan),
M. Muratsugu, H. Ikeda
(Asahikawa, Japan),
M. Yoshimoto, Y.
Mori,
H. Kitajima and
N.
Kamo
(Sapporo, Japan)
On a
sensor to detect the point just before the dozing off state is reached
............................ 145
M. Fujikake
Fuñada
(Tochigi, Japan), Y. Yazu, H.
Ide
(Tokyo, Japan), K. Idogawa
(Chiba,
Japan), F. Yano
(Tokyo, Japan),
N.
Daimon (Kanagawa, Japan) and S.P. Ninomija (Tokyo, Japan)
Light-emitting diodes in porous silicon
..................................................... 153
F. Kozlowski, P.
Steiner,
W.
Lang and
H.
Sandmaier (Munich, Germany)
Surface micromachined pressure sensors with integrated CMOS read-out electronics
...................... 157
H. Dudaicevs, M.
Kandier,
Y.
Manoli,
W.
Mokwa and
E.
Spiegel
(Duisburg,
Germany)
Spectral response of
a photodiode
using
ЗС
-SiC
single crystalline film
................................ 164
Y. Hirabayashi, S. Karasawa, K. Kobayashi (Yokohama, Japan), S.
Misawa
and S. Yoshida (Ibaraki, Japan)
Mechanical light modulator fabricated on a silicon chip using
SIMOX
technology
........................ 170
W.R. Wiszniewski (Homebush, NSW, Australia), R.E. Collins and B.A. Pailthorpe (Sydney, NSW, Australia)
Evaluation of liquid properties using a silicon Lamb wave sensor
................................... 175
M.J. Vellekoop, G.W. Lubking, P.M.
Sarro
and
A. Venerna
(Delft, Netherlands)
A piezoresistive humidity sensor
......................................................... 181
G. Gerlach and K. Sager (Dresden, Germany)
A thin film bolometer using porous silicon technology
........................................... 185
W. Lang, P.
Steiner,
U.
Schaber
and
Α.
Richter
(Munich, Germany)
A silicon VLSI optical sensor for pattern recognition
........................................... 188
W.O.
Camp
(Owego,
NY, USA) and J. Van
der
Spiegel (Philadelphia, PA, USA)
A micromachined pressure sensor with fiber-optic
interferometrie
readout
............................. 196
M.A. Chan,
S.D.
Collins and R.L. Smith (Davis, CA, USA)
Microfabricated
surface plasmon sensing system
............................................... 202
R. Garabedian,
С
Gonzalez, J. Richards, A. Knoesen, R. Spencer,
S.D.
Collins and R.L. Smith (Davis, CA,
USA)
AT-cut quartz resonators for determination of viscoelastic and dielectric properties of water/glycerol
........... 208
H.-T. Sun, L.-Y. Zhang, X. Yao (Xi an, China) and W. Wlodarski (Melbourne, Vic, Australia)
A technique for measuring strain in layered structure media
...................................... 213
K.
Toda
(Yokosuka, Japan), G. Sugizaki, T. Takenaka and K.
Sakata
(Chiba,
Japan)
Enhanced mode detection for microwaves using a high-impedance YBCO-BiO composite superconductor
........ 217
K.
Niki,
M. Kamino, K. Shimaoka, Y. Yoshisato, T.
Ikemachi and S.
Nakano
(Osaka, Japan)
Materials and Technology
Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature
....................... 223
R.F. Wolffenbuttel (Delft, Netherlands) and K.D. Wise (Ann Arbor, MI, USA)
Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion
mechanisms
....................................................................... 230
R. Legtenberg,
H.A.C.
Tilmans, J. Elders and M. Elwenspoek
(Enschede,
Netherlands)
їх
Application
of porous silicon as a sacrificial layer
.............................................. 239
W. Lang, P.
Steiner,
Α.
Richter,
К.
Marusczyk (Munich, Germany),
G. Weímann
(Garching/Munich, Germany)
and H. Sandmaier (Munich, Germany)
Vacuum packaging for
microsensors
by glass—silicon anodic bonding
................................. 243
H. Henmi, S. Shoji, Y. Shoji, K. Yoshimi and M. Esashi (Sendai, Japan)
Buried piezoresistive sensors by means of MeV ion implantation
................................... 249
T. Nishimoto, S. Shoji and M. Esashi (Sendai, Japan)
Study on fine patterning processes with a thick resist
........................................... 254
K. Suzuki (Ibaraki, Japan)
SiC for sensors and high-temperature electronics
............................................. 259
G.
Müller,
G. Krötz
(Munich, Germany) and E.
Niemann
(Frankfurt, Germany)
Mechanical and optical properties of surface micromachined
torsionai
mirrors in silicon, polysilicon and aluminum
269
V.P. Jaecklin, C.
Linder,
J.
Brugger,
N.F.
de
Rooij, J.-M. Moret and R. Vuilleumier
(Neuchâtel,
Switzerland)
Interface Electronics and Sensor Systems
Developments in integrated smart sensors
................................................... 276
J.H. Huijsing, F.R. Riedijk and G. van
der
Horn (Delft, Netherlands)
Fabrication of CMOS
1С
for telemetering biological signals from multiple subjects
....................... 289
J. Park, S. Choi (Kyungsan City, South Korea), H.
Seo
and T. Nakamura (Toyohashi, Japan)
A monolithic sensor array of individually addressable microelectrodes
................................ 296
R. Kakerow, Y. Manoli, W. Mokwa, M. Rospert
(Duisburg,
Germany), H. Meyer, H. Drewer, J.
Krause
and
K.
Cammann (Münster,
Germany)
Micromechanics
Piezoelectric force sensor for scanning force microscopy
......................................... 305
T. Itoh and T.
Suga
(Tokyo, Japan)
Continuous ink-jet print head utilizing silicon micromachined nozzles
................................ 311
L. Smith,
A. Söderbärg
(Uppsala, Sweden) and U.
Björkengren (Lund,
Sweden)
Accurate microscopic method to investigate the aging of micromachined silicon actuators
................... 317
R.A.
Buser
(Zurich, Switzerland) and A.
Dommann (Buchs,
Switzerland)
Characterization of an inchworm prototype motor
............................................. 322
M. Bexell, A.-L. Tiensuu,
J.-Å.
Schweitz, J.
Söderkvist
and S. Johansson (Uppsala, Sweden)
Bistable fluidic elements in
LIGA
technique for flow control in fluidic microactuators
..................... 330
J.
Vollmer,
H.
Hein,
W. Menz and F.
Walter (Karlsruhe, Germany)
Integrated flow-regulated silicon
micropump................................................. 335
V. Gass, B.H. van
der Schoot,
S.
Jeanneret and
N.F.
de
Rooij
(Neuchâtel,
Switzerland)
Microlever
with combined integrated sensor/actuator functions for scanning force microscopy
................ 339
J. Brugger,
N.
Blanc, Ph.
Renaud
and N.F.
de
Rooij
(Neuchâtel,
Switzerland)
Design and fabrication of an overhanging jry-microactuator with integrated tip for scanning surface profiling
...... 346
P.-F. Indermuehle,
С
Linder,
J. Brugger, V.P. Jaecklin and N.F.
de
Rooij
(Neuchâtel,
Switzerland)
Integrated shielding lines on multilayer polysilicon resonators
...................................... 351
M.-A.
Grétillat,
С.
Linder
and N.F.
de
Rooij
(Neuchâtel,
Switzerland)
Development of piezoelectric micromovement actuator fabrication using a thick-film double-paste printing method
357
H. Moilanen, J. Lappalainen and S.
Leppävuori (Oulu,
Finland)
Microrobot
actuated by a vibration energy field
............................................... 366
T. Yasuda, I. Shimoyama and H. Miura (Tokyo, Japan)
Electrodeposited electrostatic rigid-rotor wobble motors on silicon
................................... 371
L.
Paratìe
and N.F.
de
Rooij
(Neuchâtel,
Switzerland)
Ч7Я
Conference Calendar
................................................................
Author Index of Volume
43............................................................
380
............................................................
381
Subject Index of Volume
43
The publisher encourages the submission of articles in electronic form thus saving time and avoiding rekeying errors.
A leaflet describing our requirements is available from the publisher upon request.
|
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| author_sort | International Conference on Solid State Sensors and Actuators Yokohama |
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| bvnumber | BV010117027 |
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| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1993 Yokohama gnd-content |
| genre_facet | Konferenzschrift 1993 Yokohama |
| id | DE-604.BV010117027 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:46:48Z |
| institution | BVB |
| institution_GND | (DE-588)5111529-3 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006717646 |
| oclc_num | 312124995 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | X, 384 S. Ill., graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Elsevier |
| record_format | marc |
| series2 | Sensors and actuators : A |
| spelling | International Conference on Solid State Sensors and Actuators 7 1993 Yokohama Verfasser (DE-588)5111529-3 aut This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93) Yokohama, Japan, June 7 - 10, 1993 Papers presented at the 7th International Conference on Solid-State Sensors and Actuators Lausanne, Switzerland Elsevier 1994 X, 384 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Sensors and actuators : A 43 Einzelaufnahme eines Zs.-Bandes Stellglied (DE-588)4183090-8 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Messgrößenumformer (DE-588)4169513-6 gnd rswk-swf Stelleinrichtung (DE-588)4265932-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Yokohama gnd-content Sensor (DE-588)4038824-4 s DE-604 Stelleinrichtung (DE-588)4265932-2 s Stellglied (DE-588)4183090-8 s 1\p DE-604 Messgrößenumformer (DE-588)4169513-6 s 2\p DE-604 Integrierte Schaltung (DE-588)4027242-4 s 3\p DE-604 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006717646&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93) Yokohama, Japan, June 7 - 10, 1993 Stellglied (DE-588)4183090-8 gnd Sensor (DE-588)4038824-4 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Messgrößenumformer (DE-588)4169513-6 gnd Stelleinrichtung (DE-588)4265932-2 gnd |
| subject_GND | (DE-588)4183090-8 (DE-588)4038824-4 (DE-588)4027242-4 (DE-588)4169513-6 (DE-588)4265932-2 (DE-588)1071861417 |
| title | This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93) Yokohama, Japan, June 7 - 10, 1993 |
| title_alt | Papers presented at the 7th International Conference on Solid-State Sensors and Actuators |
| title_auth | This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93) Yokohama, Japan, June 7 - 10, 1993 |
| title_exact_search | This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93) Yokohama, Japan, June 7 - 10, 1993 |
| title_full | This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93) Yokohama, Japan, June 7 - 10, 1993 |
| title_fullStr | This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93) Yokohama, Japan, June 7 - 10, 1993 |
| title_full_unstemmed | This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93) Yokohama, Japan, June 7 - 10, 1993 |
| title_short | This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93) |
| title_sort | this volume contains papers presented at the 7th international conference on solid state sensors and actuators transducers 93 yokohama japan june 7 10 1993 |
| title_sub | Yokohama, Japan, June 7 - 10, 1993 |
| topic | Stellglied (DE-588)4183090-8 gnd Sensor (DE-588)4038824-4 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Messgrößenumformer (DE-588)4169513-6 gnd Stelleinrichtung (DE-588)4265932-2 gnd |
| topic_facet | Stellglied Sensor Integrierte Schaltung Messgrößenumformer Stelleinrichtung Konferenzschrift 1993 Yokohama |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006717646&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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