Holdings: The materials science of microelectronics

The materials science of microelectronics:

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Bibliographic Details
Main Author:	Bachmann, Klaus J. (Author)
Format:	Book
Language:	English
Published:	New York, NY [u.a.] VCH 1995
Subjects:	Materiaalkunde Micro-elektronica Materials > Electric properties Microelectronics > Materials Semiconductors Mikroelektronik Werkstoff
Online Access:	Inhaltsverzeichnis
Physical Description:	VIII, 541 S. zahlr. Ill. und graph. Darst.
ISBN:	0895732807

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MARC


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Record in the Search Index

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adam_text	IMAGE 1 CONTENTS INTRODUCTION THE ELECTRONIC STRUCTURE OF ATOMS AND MOLECULES 17 2.1 EARLY CONCEPTS OF ATOMIC STRUCTURE AND BONDING 17 2.2 ELEMENTS OF QUANTUM MECHANICS 21 2.3 ATOMIC WAVE FUNCTIONS AND ENERGY EIGENVALUES 27 2.4 MOLECULAR WAVE FUNCTIONS AND ENERGY EIGENVALUES 32 2.5 MOLECULAR SYMMETRY 47 THE ELECTRONIC STRUCTURE OF CRYSTALLINE SOLIDS 69 3.1 THE STRUCTURE AND SYMMETRY OF CRYSTALS 69 3.2 ENERGY BANDS 90 3.3 DEFECTS IN CRYSTALLINE SOLIDS 109 3.4 CRYSTAL SURFACES 126 SEMICONDUCTOR DEVICES AND CIRCUITS 149 4.1 P-N JUNCTIONS 149 4.2 BIPOLAR TRANSISTORS 162 4.3 MIS CAPACITORS AND FIELD-EFFECT TRANSISTORS 167 4.4 A CMOS PROCESSING SEQUENCE 177 4.5 MICROWAVE DEVICES 180 4.6 CONFINED HETEROSTRUCTURES 185 IMAGE 2 5. CRYSTAL GROWTH 201 5.1 MATERIALS PURIFICATION AND SYNTHESIS 201 5.2 EQUILIBRIUM CONDITIONS AND KINETIC LIMITATIONS OF GROWTH 227 5.3 THE FABRICATION OF SUBSTRATE CRYSTALS 243 6. EPITAXY AND DIELECTRIC DEPOSITION 285 6.1 CHEMICAL VAPOR DEPOSITION AT ATMOSPHERIC PRESSURE 285 6.2 LOW-PRESSURE AND PLASMA-ENHANCED VAPOR DEPOSITION 304 6.3 ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION 316 6.4 MOLECULAR BEAM EPITAXY AND CHEMICAL BEAM EPITAXY 331 7. PATTERN DEFINITION AND ETCHING 351 7.1 PHOTOLITHOGRAPHIC PATTERN DEFINITION 351 7.2 ULTRAHIGH-RESOLUTION PATTERNING 358 7.3 WET ETCHING 371 7.4 DRY ETCHING 384 8. OXIDATION, DOPING, AND METALLIZATION 405 8.1 THERMAL OXIDATION AND DIELECTRIC ISOLATION OF SILICON 405 8.2 DOPING BY ION IMPLANTATION AND DIFFUSION 427 8.3 NATIVE OXIDES ON III-V SURFACES 454 8.4 SCHOTTKY BARRIERS 470 8.5 OHMIC CONTACTS AND INTERCONNECTS 483 9. OPTICAL ELECTRONICS 503 APPENDIX A: LIST OF ABBREVIATIONS 517 APPENDIX B: SELECTED TABLES 521 SUBJECT INDEX 527
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author	Bachmann, Klaus J.
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dewey-tens	620 - Engineering and allied operations
discipline	Chemie / Pharmazie Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik
format	Book
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indexdate	2024-07-09T17:46:39Z
institution	BVB
isbn	0895732807
language	English
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spelling	Bachmann, Klaus J. Verfasser aut The materials science of microelectronics Klaus J. Bachmann New York, NY [u.a.] VCH 1995 VIII, 541 S. zahlr. Ill. und graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materiaalkunde gtt Micro-elektronica gtt Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Werkstoff (DE-588)4065579-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 s Werkstoff (DE-588)4065579-9 s DE-604 OEBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006711566&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Bachmann, Klaus J. The materials science of microelectronics Materiaalkunde gtt Micro-elektronica gtt Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik (DE-588)4039207-7 gnd Werkstoff (DE-588)4065579-9 gnd
subject_GND	(DE-588)4039207-7 (DE-588)4065579-9
title	The materials science of microelectronics
title_auth	The materials science of microelectronics
title_exact_search	The materials science of microelectronics
title_full	The materials science of microelectronics Klaus J. Bachmann
title_fullStr	The materials science of microelectronics Klaus J. Bachmann
title_full_unstemmed	The materials science of microelectronics Klaus J. Bachmann
title_short	The materials science of microelectronics
title_sort	the materials science of microelectronics
topic	Materiaalkunde gtt Micro-elektronica gtt Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik (DE-588)4039207-7 gnd Werkstoff (DE-588)4065579-9 gnd
topic_facet	Materiaalkunde Micro-elektronica Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik Werkstoff
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006711566&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
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