The materials science of microelectronics:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY [u.a.]
VCH
1995
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VIII, 541 S. zahlr. Ill. und graph. Darst. |
| ISBN: | 0895732807 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV010108366 | ||
| 003 | DE-604 | ||
| 005 | 20121213 | ||
| 007 | t | ||
| 008 | 950313s1995 gw ad|| |||| 00||| eng d | ||
| 016 | 7 | |a 943615861 |2 DE-101 | |
| 020 | |a 0895732807 |9 0-89573-280-7 | ||
| 035 | |a (OCoLC)27934649 | ||
| 035 | |a (DE-599)BVBBV010108366 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-703 |a DE-355 |a DE-29T |a DE-91G |a DE-92 |a DE-384 |a DE-Aug4 |a DE-19 |a DE-634 |a DE-522 |a DE-83 |a DE-11 |a DE-188 | ||
| 050 | 0 | |a TK7874 | |
| 082 | 0 | |a 621.381 |2 20 | |
| 084 | |a UP 3100 |0 (DE-625)146372: |2 rvk | ||
| 084 | |a UQ 8000 |0 (DE-625)146584: |2 rvk | ||
| 084 | |a UX 2350 |0 (DE-625)146952: |2 rvk | ||
| 084 | |a VE 9670 |0 (DE-625)147161:253 |2 rvk | ||
| 084 | |a ZN 3460 |0 (DE-625)157317: |2 rvk | ||
| 084 | |a ELT 060f |2 stub | ||
| 084 | |a ELT 340f |2 stub | ||
| 100 | 1 | |a Bachmann, Klaus J. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a The materials science of microelectronics |c Klaus J. Bachmann |
| 264 | 1 | |a New York, NY [u.a.] |b VCH |c 1995 | |
| 300 | |a VIII, 541 S. |b zahlr. Ill. und graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 7 | |a Materiaalkunde |2 gtt | |
| 650 | 7 | |a Micro-elektronica |2 gtt | |
| 650 | 4 | |a Materials |x Electric properties | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Semiconductors | |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Werkstoff |0 (DE-588)4065579-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | 1 | |a Werkstoff |0 (DE-588)4065579-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | 2 | |m OEBV Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006711566&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006711566 | ||
Datensatz im Suchindex
| _version_ | 1804124500193705984 |
|---|---|
| adam_text | IMAGE 1
CONTENTS
INTRODUCTION THE ELECTRONIC STRUCTURE OF ATOMS AND MOLECULES 17
2.1 EARLY CONCEPTS OF ATOMIC STRUCTURE AND BONDING 17
2.2 ELEMENTS OF QUANTUM MECHANICS 21
2.3 ATOMIC WAVE FUNCTIONS AND ENERGY EIGENVALUES 27
2.4 MOLECULAR WAVE FUNCTIONS AND ENERGY EIGENVALUES 32
2.5 MOLECULAR SYMMETRY 47
THE ELECTRONIC STRUCTURE OF CRYSTALLINE SOLIDS 69
3.1 THE STRUCTURE AND SYMMETRY OF CRYSTALS 69
3.2 ENERGY BANDS 90
3.3 DEFECTS IN CRYSTALLINE SOLIDS 109
3.4 CRYSTAL SURFACES 126
SEMICONDUCTOR DEVICES AND CIRCUITS 149
4.1 P-N JUNCTIONS 149
4.2 BIPOLAR TRANSISTORS 162
4.3 MIS CAPACITORS AND FIELD-EFFECT TRANSISTORS 167
4.4 A CMOS PROCESSING SEQUENCE 177
4.5 MICROWAVE DEVICES 180
4.6 CONFINED HETEROSTRUCTURES 185
IMAGE 2
5. CRYSTAL GROWTH
201
5.1 MATERIALS PURIFICATION AND SYNTHESIS 201
5.2 EQUILIBRIUM CONDITIONS AND KINETIC LIMITATIONS OF GROWTH 227 5.3 THE
FABRICATION OF SUBSTRATE CRYSTALS 243
6. EPITAXY AND DIELECTRIC DEPOSITION 285
6.1 CHEMICAL VAPOR DEPOSITION AT ATMOSPHERIC PRESSURE 285
6.2 LOW-PRESSURE AND PLASMA-ENHANCED VAPOR DEPOSITION 304
6.3 ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION 316
6.4 MOLECULAR BEAM EPITAXY AND CHEMICAL BEAM EPITAXY 331
7. PATTERN DEFINITION AND ETCHING 351
7.1 PHOTOLITHOGRAPHIC PATTERN DEFINITION 351
7.2 ULTRAHIGH-RESOLUTION PATTERNING 358
7.3 WET ETCHING 371
7.4 DRY ETCHING 384
8. OXIDATION, DOPING, AND METALLIZATION 405
8.1 THERMAL OXIDATION AND DIELECTRIC ISOLATION OF SILICON 405
8.2 DOPING BY ION IMPLANTATION AND DIFFUSION 427
8.3 NATIVE OXIDES ON III-V SURFACES 454
8.4 SCHOTTKY BARRIERS 470
8.5 OHMIC CONTACTS AND INTERCONNECTS 483
9. OPTICAL ELECTRONICS 503
APPENDIX A: LIST OF ABBREVIATIONS 517
APPENDIX B: SELECTED TABLES 521
SUBJECT INDEX 527
|
| any_adam_object | 1 |
| author | Bachmann, Klaus J. |
| author_facet | Bachmann, Klaus J. |
| author_role | aut |
| author_sort | Bachmann, Klaus J. |
| author_variant | k j b kj kjb |
| building | Verbundindex |
| bvnumber | BV010108366 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 3100 UQ 8000 UX 2350 VE 9670 ZN 3460 |
| classification_tum | ELT 060f ELT 340f |
| ctrlnum | (OCoLC)27934649 (DE-599)BVBBV010108366 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Chemie / Pharmazie Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01930nam a2200517 c 4500</leader><controlfield tag="001">BV010108366</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20121213 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">950313s1995 gw ad|| |||| 00||| eng d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">943615861</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0895732807</subfield><subfield code="9">0-89573-280-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)27934649</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV010108366</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-Aug4</subfield><subfield code="a">DE-19</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-522</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-188</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7874</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3100</subfield><subfield code="0">(DE-625)146372:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UQ 8000</subfield><subfield code="0">(DE-625)146584:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UX 2350</subfield><subfield code="0">(DE-625)146952:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">VE 9670</subfield><subfield code="0">(DE-625)147161:253</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3460</subfield><subfield code="0">(DE-625)157317:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 060f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 340f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Bachmann, Klaus J.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">The materials science of microelectronics</subfield><subfield code="c">Klaus J. Bachmann</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York, NY [u.a.]</subfield><subfield code="b">VCH</subfield><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VIII, 541 S.</subfield><subfield code="b">zahlr. Ill. und graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Materiaalkunde</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Micro-elektronica</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Materials</subfield><subfield code="x">Electric properties</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Werkstoff</subfield><subfield code="0">(DE-588)4065579-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Werkstoff</subfield><subfield code="0">(DE-588)4065579-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">OEBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006711566&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-006711566</subfield></datafield></record></collection> |
| id | DE-604.BV010108366 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:46:39Z |
| institution | BVB |
| isbn | 0895732807 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006711566 |
| oclc_num | 27934649 |
| open_access_boolean | |
| owner | DE-703 DE-355 DE-BY-UBR DE-29T DE-91G DE-BY-TUM DE-92 DE-384 DE-Aug4 DE-19 DE-BY-UBM DE-634 DE-522 DE-83 DE-11 DE-188 |
| owner_facet | DE-703 DE-355 DE-BY-UBR DE-29T DE-91G DE-BY-TUM DE-92 DE-384 DE-Aug4 DE-19 DE-BY-UBM DE-634 DE-522 DE-83 DE-11 DE-188 |
| physical | VIII, 541 S. zahlr. Ill. und graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | VCH |
| record_format | marc |
| spelling | Bachmann, Klaus J. Verfasser aut The materials science of microelectronics Klaus J. Bachmann New York, NY [u.a.] VCH 1995 VIII, 541 S. zahlr. Ill. und graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materiaalkunde gtt Micro-elektronica gtt Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Werkstoff (DE-588)4065579-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 s Werkstoff (DE-588)4065579-9 s DE-604 OEBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006711566&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Bachmann, Klaus J. The materials science of microelectronics Materiaalkunde gtt Micro-elektronica gtt Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik (DE-588)4039207-7 gnd Werkstoff (DE-588)4065579-9 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4065579-9 |
| title | The materials science of microelectronics |
| title_auth | The materials science of microelectronics |
| title_exact_search | The materials science of microelectronics |
| title_full | The materials science of microelectronics Klaus J. Bachmann |
| title_fullStr | The materials science of microelectronics Klaus J. Bachmann |
| title_full_unstemmed | The materials science of microelectronics Klaus J. Bachmann |
| title_short | The materials science of microelectronics |
| title_sort | the materials science of microelectronics |
| topic | Materiaalkunde gtt Micro-elektronica gtt Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik (DE-588)4039207-7 gnd Werkstoff (DE-588)4065579-9 gnd |
| topic_facet | Materiaalkunde Micro-elektronica Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik Werkstoff |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006711566&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT bachmannklausj thematerialsscienceofmicroelectronics |