Verfügbarkeit: Photon-assisted processing of surfaces and thin films

Photon-assisted processing of surfaces and thin films: proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994

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Bibliographische Detailangaben
Format:	Tagungsbericht Buch
Sprache:	English
Veröffentlicht:	Amsterdam u.a. Elsevier 1995
Schriftenreihe:	Applied surface science 86
Schlagworte:	Lasers > Industrial applications > Congresses Photon beams > Industrial applications > Congresses Plasma etching > Congresses Plasma-enhanced chemical vapor deposition > Congresses Surfaces (Technology) > Congresses Photon Oberflächenbehandlung Photonenstrahlung Photonenstrahl Oberflächenphysik Dünne Schicht Dünnschichttechnik Konferenzschrift > 1994 > Straßburg
Beschreibung:	Stücktitelaufn. zu e. Zeitschriftenh.
Beschreibung:	XVI, 632 S. Ill., graph. Darst.

Internformat

MARC


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physical	XVI, 632 S. Ill., graph. Darst.
publishDate	1995
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series2	Applied surface science
spelling	Photon-assisted processing of surfaces and thin films proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994 ed. by J. Dieleman ... Amsterdam u.a. Elsevier 1995 XVI, 632 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Applied surface science 86 Stücktitelaufn. zu e. Zeitschriftenh. Lasers Industrial applications Congresses Photon beams Industrial applications Congresses Plasma etching Congresses Plasma-enhanced chemical vapor deposition Congresses Surfaces (Technology) Congresses Photon (DE-588)4045922-6 gnd rswk-swf Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf Photonenstrahlung (DE-588)4126328-5 gnd rswk-swf Photonenstrahl (DE-588)4418284-3 gnd rswk-swf Oberflächenphysik (DE-588)4134881-3 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1994 Straßburg gnd-content Photonenstrahlung (DE-588)4126328-5 s Oberflächenbehandlung (DE-588)4042908-8 s DE-604 Dünne Schicht (DE-588)4136925-7 s Dünnschichttechnik (DE-588)4136339-5 s Photonenstrahl (DE-588)4418284-3 s 1\p DE-604 Oberflächenphysik (DE-588)4134881-3 s 2\p DE-604 Photon (DE-588)4045922-6 s 3\p DE-604 Dieleman, Jan Sonstige oth Symposium on Photon Assisted Processing of Surfaces and Thin Films 1994 Straßburg Sonstige (DE-588)3025221-0 oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Photon-assisted processing of surfaces and thin films proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994 Lasers Industrial applications Congresses Photon beams Industrial applications Congresses Plasma etching Congresses Plasma-enhanced chemical vapor deposition Congresses Surfaces (Technology) Congresses Photon (DE-588)4045922-6 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd Photonenstrahlung (DE-588)4126328-5 gnd Photonenstrahl (DE-588)4418284-3 gnd Oberflächenphysik (DE-588)4134881-3 gnd Dünne Schicht (DE-588)4136925-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd
subject_GND	(DE-588)4045922-6 (DE-588)4042908-8 (DE-588)4126328-5 (DE-588)4418284-3 (DE-588)4134881-3 (DE-588)4136925-7 (DE-588)4136339-5 (DE-588)1071861417
title	Photon-assisted processing of surfaces and thin films proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994
title_auth	Photon-assisted processing of surfaces and thin films proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994
title_exact_search	Photon-assisted processing of surfaces and thin films proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994
title_full	Photon-assisted processing of surfaces and thin films proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994 ed. by J. Dieleman ...
title_fullStr	Photon-assisted processing of surfaces and thin films proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994 ed. by J. Dieleman ...
title_full_unstemmed	Photon-assisted processing of surfaces and thin films proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994 ed. by J. Dieleman ...
title_short	Photon-assisted processing of surfaces and thin films
title_sort	photon assisted processing of surfaces and thin films proceedings of symposium b on photon assisted processing of surfaces and thin films of the 1994 e mrs spring conference strasbourg france may 24 27 1994
title_sub	proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS spring conference ; Strasbourg, France, May 24 - 27, 1994
topic	Lasers Industrial applications Congresses Photon beams Industrial applications Congresses Plasma etching Congresses Plasma-enhanced chemical vapor deposition Congresses Surfaces (Technology) Congresses Photon (DE-588)4045922-6 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd Photonenstrahlung (DE-588)4126328-5 gnd Photonenstrahl (DE-588)4418284-3 gnd Oberflächenphysik (DE-588)4134881-3 gnd Dünne Schicht (DE-588)4136925-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd
topic_facet	Lasers Industrial applications Congresses Photon beams Industrial applications Congresses Plasma etching Congresses Plasma-enhanced chemical vapor deposition Congresses Surfaces (Technology) Congresses Photon Oberflächenbehandlung Photonenstrahlung Photonenstrahl Oberflächenphysik Dünne Schicht Dünnschichttechnik Konferenzschrift 1994 Straßburg
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