Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Helsinki
Suomalainen Tiedeakatemia
1994
|
| Schriftenreihe: | Suomalainen Tiedeakatemia <Helsinki>: [Annales Academiae Scientiarum Fennicae / A / 2]
257 |
| Schlagworte: | |
| Beschreibung: | Zugl.: Helsinki, Univ., Diss., 1994 |
| Beschreibung: | 48 S. graph. Darst. |
| ISBN: | 9514107551 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV009999037 | ||
| 003 | DE-604 | ||
| 005 | 19950130 | ||
| 007 | t | ||
| 008 | 950120s1994 d||| m||| 00||| engod | ||
| 020 | |a 9514107551 |9 951-41-0755-1 | ||
| 035 | |a (OCoLC)31365829 | ||
| 035 | |a (DE-599)BVBBV009999037 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-355 |a DE-12 |a DE-29T |a DE-11 | ||
| 084 | |a UP 7500 |0 (DE-625)146433: |2 rvk | ||
| 100 | 1 | |a Ritala, Mikko |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films |c Mikko Ritala |
| 264 | 1 | |a Helsinki |b Suomalainen Tiedeakatemia |c 1994 | |
| 300 | |a 48 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Suomalainen Tiedeakatemia <Helsinki>: [Annales Academiae Scientiarum Fennicae / A / 2] |v 257 | |
| 500 | |a Zugl.: Helsinki, Univ., Diss., 1994 | ||
| 650 | 4 | |a Epitaxy | |
| 650 | 4 | |a Hafnium | |
| 650 | 4 | |a Thin films, Multilayered | |
| 650 | 4 | |a Titanium | |
| 650 | 4 | |a Titanium group | |
| 650 | 4 | |a Zirconium | |
| 650 | 0 | 7 | |a Zirkoniumdioxid |0 (DE-588)4190948-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Hafniumdioxid |0 (DE-588)4321052-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Titandioxid |0 (DE-588)4185549-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Atomschichtepitaxie |0 (DE-588)4259556-3 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Hafniumdioxid |0 (DE-588)4321052-1 |D s |
| 689 | 0 | 1 | |a Atomschichtepitaxie |0 (DE-588)4259556-3 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Titandioxid |0 (DE-588)4185549-8 |D s |
| 689 | 1 | 1 | |a Atomschichtepitaxie |0 (DE-588)4259556-3 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Zirkoniumdioxid |0 (DE-588)4190948-3 |D s |
| 689 | 2 | 1 | |a Atomschichtepitaxie |0 (DE-588)4259556-3 |D s |
| 689 | 2 | |5 DE-604 | |
| 810 | 2 | |a A / 2] |t Suomalainen Tiedeakatemia <Helsinki>: [Annales Academiae Scientiarum Fennicae |v 257 |w (DE-604)BV008001155 |9 257 | |
| 940 | 1 | |n oe | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006628514 | ||
| 942 | 1 | 1 | |e 22/bsb |g 4897 |
Datensatz im Suchindex
| _version_ | 1804124375820009472 |
|---|---|
| any_adam_object | |
| author | Ritala, Mikko |
| author_facet | Ritala, Mikko |
| author_role | aut |
| author_sort | Ritala, Mikko |
| author_variant | m r mr |
| building | Verbundindex |
| bvnumber | BV009999037 |
| classification_rvk | UP 7500 |
| ctrlnum | (OCoLC)31365829 (DE-599)BVBBV009999037 |
| discipline | Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02060nam a2200565 cb4500</leader><controlfield tag="001">BV009999037</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19950130 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">950120s1994 d||| m||| 00||| engod</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9514107551</subfield><subfield code="9">951-41-0755-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)31365829</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV009999037</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-355</subfield><subfield code="a">DE-12</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7500</subfield><subfield code="0">(DE-625)146433:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ritala, Mikko</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films</subfield><subfield code="c">Mikko Ritala</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Helsinki</subfield><subfield code="b">Suomalainen Tiedeakatemia</subfield><subfield code="c">1994</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">48 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Suomalainen Tiedeakatemia <Helsinki>: [Annales Academiae Scientiarum Fennicae / A / 2]</subfield><subfield code="v">257</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Zugl.: Helsinki, Univ., Diss., 1994</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Epitaxy</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Hafnium</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin films, Multilayered</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Titanium</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Titanium group</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Zirconium</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Zirkoniumdioxid</subfield><subfield code="0">(DE-588)4190948-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Hafniumdioxid</subfield><subfield code="0">(DE-588)4321052-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Titandioxid</subfield><subfield code="0">(DE-588)4185549-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Atomschichtepitaxie</subfield><subfield code="0">(DE-588)4259556-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Hafniumdioxid</subfield><subfield code="0">(DE-588)4321052-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Atomschichtepitaxie</subfield><subfield code="0">(DE-588)4259556-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Titandioxid</subfield><subfield code="0">(DE-588)4185549-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Atomschichtepitaxie</subfield><subfield code="0">(DE-588)4259556-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Zirkoniumdioxid</subfield><subfield code="0">(DE-588)4190948-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Atomschichtepitaxie</subfield><subfield code="0">(DE-588)4259556-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">A / 2]</subfield><subfield code="t">Suomalainen Tiedeakatemia <Helsinki>: [Annales Academiae Scientiarum Fennicae</subfield><subfield code="v">257</subfield><subfield code="w">(DE-604)BV008001155</subfield><subfield code="9">257</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="n">oe</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-006628514</subfield></datafield><datafield tag="942" ind1="1" ind2="1"><subfield code="e">22/bsb</subfield><subfield code="g">4897</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV009999037 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:44:40Z |
| institution | BVB |
| isbn | 9514107551 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006628514 |
| oclc_num | 31365829 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR DE-12 DE-29T DE-11 |
| owner_facet | DE-355 DE-BY-UBR DE-12 DE-29T DE-11 |
| physical | 48 S. graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Suomalainen Tiedeakatemia |
| record_format | marc |
| series2 | Suomalainen Tiedeakatemia <Helsinki>: [Annales Academiae Scientiarum Fennicae / A / 2] |
| spelling | Ritala, Mikko Verfasser aut Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films Mikko Ritala Helsinki Suomalainen Tiedeakatemia 1994 48 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Suomalainen Tiedeakatemia <Helsinki>: [Annales Academiae Scientiarum Fennicae / A / 2] 257 Zugl.: Helsinki, Univ., Diss., 1994 Epitaxy Hafnium Thin films, Multilayered Titanium Titanium group Zirconium Zirkoniumdioxid (DE-588)4190948-3 gnd rswk-swf Hafniumdioxid (DE-588)4321052-1 gnd rswk-swf Titandioxid (DE-588)4185549-8 gnd rswk-swf Atomschichtepitaxie (DE-588)4259556-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Hafniumdioxid (DE-588)4321052-1 s Atomschichtepitaxie (DE-588)4259556-3 s DE-604 Titandioxid (DE-588)4185549-8 s Zirkoniumdioxid (DE-588)4190948-3 s A / 2] Suomalainen Tiedeakatemia <Helsinki>: [Annales Academiae Scientiarum Fennicae 257 (DE-604)BV008001155 257 |
| spellingShingle | Ritala, Mikko Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films Epitaxy Hafnium Thin films, Multilayered Titanium Titanium group Zirconium Zirkoniumdioxid (DE-588)4190948-3 gnd Hafniumdioxid (DE-588)4321052-1 gnd Titandioxid (DE-588)4185549-8 gnd Atomschichtepitaxie (DE-588)4259556-3 gnd |
| subject_GND | (DE-588)4190948-3 (DE-588)4321052-1 (DE-588)4185549-8 (DE-588)4259556-3 (DE-588)4113937-9 |
| title | Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films |
| title_auth | Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films |
| title_exact_search | Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films |
| title_full | Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films Mikko Ritala |
| title_fullStr | Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films Mikko Ritala |
| title_full_unstemmed | Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films Mikko Ritala |
| title_short | Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films |
| title_sort | atomic layer epitaxy growth of titanium zirconium and hafnium dioxide thin films |
| topic | Epitaxy Hafnium Thin films, Multilayered Titanium Titanium group Zirconium Zirkoniumdioxid (DE-588)4190948-3 gnd Hafniumdioxid (DE-588)4321052-1 gnd Titandioxid (DE-588)4185549-8 gnd Atomschichtepitaxie (DE-588)4259556-3 gnd |
| topic_facet | Epitaxy Hafnium Thin films, Multilayered Titanium Titanium group Zirconium Zirkoniumdioxid Hafniumdioxid Titandioxid Atomschichtepitaxie Hochschulschrift |
| volume_link | (DE-604)BV008001155 |
| work_keys_str_mv | AT ritalamikko atomiclayerepitaxygrowthoftitaniumzirconiumandhafniumdioxidethinfilms |