Optical characterization of semiconductors: infrared, Raman, and photoluminescence spectroscopy

Today's complex and varied semiconductor microstructures are difficult to characterize for devices, or to provide feedback to materials makers for better materials. Optical methods are one of the best means of characterization; they require no contacts and do not damage samples, they measure a...

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Bibliographic Details
Main Author: Perkowitz, Sidney (Author)
Format: Book
Language:English
Published: London u.a. Acad. Press 1993
Series:Techniques of physics 14
Subjects:
Summary:Today's complex and varied semiconductor microstructures are difficult to characterize for devices, or to provide feedback to materials makers for better materials. Optical methods are one of the best means of characterization; they require no contacts and do not damage samples, they measure a variety of properties, and they work for bulk or layered structures made of elemental, binary, or ternary semiconductors
There are several useful optical approaches which operate at different wavelengths. In the past this meant it was difficult to find the best method for a given characterization need. Now, it is possible to learn techniques and select approaches from Optical Characterization of Semiconductors, the first book to explain, illustrate, and compare the most widely used methods: photoluminescence, infrared spectroscopy, and Raman scattering
Written with non-experts in mind, the book assumes no special knowledge of semiconductors or optics, but develops the background needed to understand the why and how of each technique
Physical Description:X, 220 S. graph. Darst.
ISBN:0125507704

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