Plasma properties, deposition and etching:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Aedermannsdorf, Switzerland u.a.
Trans Tech Publ.
1993
|
| Schriftenreihe: | Materials science forum
140/142 |
| Schlagworte: | |
| Beschreibung: | X, 742 S. Ill., graph. Darst. |
| ISBN: | 087849670X |
Internformat
MARC
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Datensatz im Suchindex
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| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV009861048 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:42:09Z |
| institution | BVB |
| isbn | 087849670X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006528924 |
| oclc_num | 29916185 |
| open_access_boolean | |
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| physical | X, 742 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Trans Tech Publ. |
| record_format | marc |
| series | Materials science forum |
| series2 | Materials science forum |
| spelling | Plasma properties, deposition and etching eds. J. J. Pouch ... Aedermannsdorf, Switzerland u.a. Trans Tech Publ. 1993 X, 742 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science forum 140/142 Plasma diagnostics Plasma dynamics Plasma etching Plasmatechnik (DE-588)4140353-8 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Plasmatechnik (DE-588)4140353-8 s DE-604 Pouch, John J. Sonstige oth Materials science forum 140/142 (DE-604)BV001902147 140/142 |
| spellingShingle | Plasma properties, deposition and etching Materials science forum Plasma diagnostics Plasma dynamics Plasma etching Plasmatechnik (DE-588)4140353-8 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4143413-4 |
| title | Plasma properties, deposition and etching |
| title_auth | Plasma properties, deposition and etching |
| title_exact_search | Plasma properties, deposition and etching |
| title_full | Plasma properties, deposition and etching eds. J. J. Pouch ... |
| title_fullStr | Plasma properties, deposition and etching eds. J. J. Pouch ... |
| title_full_unstemmed | Plasma properties, deposition and etching eds. J. J. Pouch ... |
| title_short | Plasma properties, deposition and etching |
| title_sort | plasma properties deposition and etching |
| topic | Plasma diagnostics Plasma dynamics Plasma etching Plasmatechnik (DE-588)4140353-8 gnd |
| topic_facet | Plasma diagnostics Plasma dynamics Plasma etching Plasmatechnik Aufsatzsammlung |
| volume_link | (DE-604)BV001902147 |
| work_keys_str_mv | AT pouchjohnj plasmapropertiesdepositionandetching |