Introduction to microlithography:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Washington, DC
American Chemical Society
1994
|
| Ausgabe: | 2. ed. |
| Schriftenreihe: | ACS professional reference book
|
| Schlagworte: | |
| Beschreibung: | XIV, 527 S. graph. Darst. |
| ISBN: | 0841228485 |
Internformat
MARC
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| 250 | |a 2. ed. | ||
| 264 | 1 | |a Washington, DC |b American Chemical Society |c 1994 | |
| 300 | |a XIV, 527 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 0 | |a ACS professional reference book | |
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| 650 | 4 | |a Microlithography |v Congresses | |
| 650 | 4 | |a Photoresists |v Congresses | |
| 650 | 4 | |a Plasma etching |v Congresses | |
| 650 | 4 | |a Semiconductors |x Etching |v Congresses | |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
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| 700 | 1 | |a Thompson, Larry F. |e Sonstige |4 oth | |
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Datensatz im Suchindex
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|---|---|
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| edition | 2. ed. |
| format | Book |
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| genre_facet | Konferenzschrift |
| id | DE-604.BV009799172 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:41:03Z |
| institution | BVB |
| isbn | 0841228485 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006483421 |
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| physical | XIV, 527 S. graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | American Chemical Society |
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| series2 | ACS professional reference book |
| spelling | Introduction to microlithography ed. by Larry F. Thompson ... 2. ed. Washington, DC American Chemical Society 1994 XIV, 527 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier ACS professional reference book Materiais e dispositivos semicondutores larpcal Microlithography Congresses Photoresists Congresses Plasma etching Congresses Semiconductors Etching Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Thompson, Larry F. Sonstige oth |
| spellingShingle | Introduction to microlithography Materiais e dispositivos semicondutores larpcal Microlithography Congresses Photoresists Congresses Plasma etching Congresses Semiconductors Etching Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4174516-4 (DE-588)1071861417 |
| title | Introduction to microlithography |
| title_auth | Introduction to microlithography |
| title_exact_search | Introduction to microlithography |
| title_full | Introduction to microlithography ed. by Larry F. Thompson ... |
| title_fullStr | Introduction to microlithography ed. by Larry F. Thompson ... |
| title_full_unstemmed | Introduction to microlithography ed. by Larry F. Thompson ... |
| title_short | Introduction to microlithography |
| title_sort | introduction to microlithography |
| topic | Materiais e dispositivos semicondutores larpcal Microlithography Congresses Photoresists Congresses Plasma etching Congresses Semiconductors Etching Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Materiais e dispositivos semicondutores Microlithography Congresses Photoresists Congresses Plasma etching Congresses Semiconductors Etching Congresses Fotolithografie Halbleitertechnologie Konferenzschrift |
| work_keys_str_mv | AT thompsonlarryf introductiontomicrolithography |