Papers from the First International Workshop on Plasma-Based Ion Implantation: 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | Undetermined |
| Published: |
New York
American Institute of Physics
1994
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| Series: | Journal of vacuum science and technology / B
12,2 |
| Subjects: | |
| Item Description: | Stücktitelaufnahme zu e. Zeitschriftenh. |
| Physical Description: | S. 807 - 998 S. graph. Darst. |
Staff View
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| 245 | 1 | 0 | |a Papers from the First International Workshop on Plasma-Based Ion Implantation |b 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |c eds. for the workshop: John R. Conrad ... |
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| indexdate | 2024-07-09T17:39:50Z |
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| physical | S. 807 - 998 S. graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
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| publisher | American Institute of Physics |
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| series2 | Journal of vacuum science and technology / B |
| spelling | International Workshop on Plasma Based Ion Implantation 1 1993 Madison, Wis. Verfasser (DE-588)5108568-9 aut Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin eds. for the workshop: John R. Conrad ... New York American Institute of Physics 1994 S. 807 - 998 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 12,2 Stücktitelaufnahme zu e. Zeitschriftenh. Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Madison Wis. gnd-content Ionenimplantation (DE-588)4027606-5 s Plasmatechnik (DE-588)4140353-8 s DE-604 Conrad, John R. Sonstige oth |
| spellingShingle | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin Plasmatechnik (DE-588)4140353-8 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4027606-5 (DE-588)1071861417 |
| title | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |
| title_auth | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |
| title_exact_search | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |
| title_full | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin eds. for the workshop: John R. Conrad ... |
| title_fullStr | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin eds. for the workshop: John R. Conrad ... |
| title_full_unstemmed | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin eds. for the workshop: John R. Conrad ... |
| title_short | Papers from the First International Workshop on Plasma-Based Ion Implantation |
| title_sort | papers from the first international workshop on plasma based ion implantation 4 6 august 1993 university of wisconsin madison madison wisconsin |
| title_sub | 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |
| topic | Plasmatechnik (DE-588)4140353-8 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Plasmatechnik Ionenimplantation Konferenzschrift 1993 Madison Wis. |
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