Papers from the First International Workshop on Plasma-Based Ion Implantation: 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York
American Institute of Physics
1994
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| Schriftenreihe: | Journal of vacuum science and technology / B
12,2 |
| Schlagworte: | |
| Beschreibung: | Stücktitelaufnahme zu e. Zeitschriftenh. |
| Beschreibung: | S. 807 - 998 S. graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV009724448 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 940722s1994 d||| |||| 10||| und d | ||
| 035 | |a (OCoLC)632722628 | ||
| 035 | |a (DE-599)BVBBV009724448 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-29T |a DE-384 | ||
| 111 | 2 | |a International Workshop on Plasma Based Ion Implantation |n 1 |d 1993 |c Madison, Wis. |j Verfasser |0 (DE-588)5108568-9 |4 aut | |
| 245 | 1 | 0 | |a Papers from the First International Workshop on Plasma-Based Ion Implantation |b 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |c eds. for the workshop: John R. Conrad ... |
| 264 | 1 | |a New York |b American Institute of Physics |c 1994 | |
| 300 | |a S. 807 - 998 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science and technology / B |v 12,2 | |
| 500 | |a Stücktitelaufnahme zu e. Zeitschriftenh. | ||
| 650 | 0 | 7 | |a Plasmatechnik |0 (DE-588)4140353-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1993 |z Madison Wis. |2 gnd-content | |
| 689 | 0 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 0 | 1 | |a Plasmatechnik |0 (DE-588)4140353-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Conrad, John R. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006431914 | ||
Datensatz im Suchindex
| _version_ | 1804124071756038144 |
|---|---|
| any_adam_object | |
| author_corporate | International Workshop on Plasma Based Ion Implantation Madison, Wis |
| author_corporate_role | aut |
| author_facet | International Workshop on Plasma Based Ion Implantation Madison, Wis |
| author_sort | International Workshop on Plasma Based Ion Implantation Madison, Wis |
| building | Verbundindex |
| bvnumber | BV009724448 |
| ctrlnum | (OCoLC)632722628 (DE-599)BVBBV009724448 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01437nam a2200349 cb4500</leader><controlfield tag="001">BV009724448</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">940722s1994 d||| |||| 10||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)632722628</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV009724448</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-384</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Workshop on Plasma Based Ion Implantation</subfield><subfield code="n">1</subfield><subfield code="d">1993</subfield><subfield code="c">Madison, Wis.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5108568-9</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the First International Workshop on Plasma-Based Ion Implantation</subfield><subfield code="b">4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin</subfield><subfield code="c">eds. for the workshop: John R. Conrad ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Institute of Physics</subfield><subfield code="c">1994</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 807 - 998 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science and technology / B</subfield><subfield code="v">12,2</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Stücktitelaufnahme zu e. Zeitschriftenh.</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1993</subfield><subfield code="z">Madison Wis.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Conrad, John R.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-006431914</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1993 Madison Wis. gnd-content |
| genre_facet | Konferenzschrift 1993 Madison Wis. |
| id | DE-604.BV009724448 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:39:50Z |
| institution | BVB |
| institution_GND | (DE-588)5108568-9 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006431914 |
| oclc_num | 632722628 |
| open_access_boolean | |
| owner | DE-29T DE-384 |
| owner_facet | DE-29T DE-384 |
| physical | S. 807 - 998 S. graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | American Institute of Physics |
| record_format | marc |
| series2 | Journal of vacuum science and technology / B |
| spelling | International Workshop on Plasma Based Ion Implantation 1 1993 Madison, Wis. Verfasser (DE-588)5108568-9 aut Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin eds. for the workshop: John R. Conrad ... New York American Institute of Physics 1994 S. 807 - 998 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 12,2 Stücktitelaufnahme zu e. Zeitschriftenh. Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Madison Wis. gnd-content Ionenimplantation (DE-588)4027606-5 s Plasmatechnik (DE-588)4140353-8 s DE-604 Conrad, John R. Sonstige oth |
| spellingShingle | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin Plasmatechnik (DE-588)4140353-8 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4027606-5 (DE-588)1071861417 |
| title | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |
| title_auth | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |
| title_exact_search | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |
| title_full | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin eds. for the workshop: John R. Conrad ... |
| title_fullStr | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin eds. for the workshop: John R. Conrad ... |
| title_full_unstemmed | Papers from the First International Workshop on Plasma-Based Ion Implantation 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin eds. for the workshop: John R. Conrad ... |
| title_short | Papers from the First International Workshop on Plasma-Based Ion Implantation |
| title_sort | papers from the first international workshop on plasma based ion implantation 4 6 august 1993 university of wisconsin madison madison wisconsin |
| title_sub | 4 - 6 August 1993 University of Wisconsin-Madison, Madison, Wisconsin |
| topic | Plasmatechnik (DE-588)4140353-8 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Plasmatechnik Ionenimplantation Konferenzschrift 1993 Madison Wis. |
| work_keys_str_mv | AT internationalworkshoponplasmabasedionimplantationmadisonwis papersfromthefirstinternationalworkshoponplasmabasedionimplantation46august1993universityofwisconsinmadisonmadisonwisconsin AT conradjohnr papersfromthefirstinternationalworkshoponplasmabasedionimplantation46august1993universityofwisconsinmadisonmadisonwisconsin |