Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York
American Institute of Physics
1994
|
| Series: | Journal of vacuum science and technology / B
12,1 |
| Subjects: | |
| Item Description: | Stücktitelaufnahme zu e. Zeitschriftenh. |
| Physical Description: | S. 163 - 404 graph. Darst. |
Staff View
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| 111 | 2 | |a International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors |n 2 |d 1993 |c Research Triangle Park, NC |j Verfasser |0 (DE-588)5104378-6 |4 aut | |
| 245 | 1 | 0 | |a Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |b 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |c proceedings ed. Ravi Subrahmanyan |
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| indexdate | 2024-07-09T17:39:50Z |
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| language | English |
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| physical | S. 163 - 404 graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | American Institute of Physics |
| record_format | marc |
| series2 | Journal of vacuum science and technology / B |
| spelling | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors 2 1993 Research Triangle Park, NC Verfasser (DE-588)5104378-6 aut Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina proceedings ed. Ravi Subrahmanyan New York American Institute of Physics 1994 S. 163 - 404 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 12,1 Stücktitelaufnahme zu e. Zeitschriftenh. Halbleiter (DE-588)4022993-2 gnd rswk-swf Dotierung (DE-588)4130672-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Research Triangle Park NC gnd-content Halbleiter (DE-588)4022993-2 s Dotierung (DE-588)4130672-7 s DE-604 Subrahmanyan, Ravi Sonstige oth |
| spellingShingle | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4130672-7 (DE-588)1071861417 |
| title | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |
| title_auth | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |
| title_exact_search | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |
| title_full | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina proceedings ed. Ravi Subrahmanyan |
| title_fullStr | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina proceedings ed. Ravi Subrahmanyan |
| title_full_unstemmed | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina proceedings ed. Ravi Subrahmanyan |
| title_short | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |
| title_sort | papers from the second international workshop on the measurement and characterization of ultra shallow doping profiles in semiconductors 23 25 march 1993 mcnc center for microelectronics research triangle park north carolina |
| title_sub | 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |
| topic | Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| topic_facet | Halbleiter Dotierung Konferenzschrift 1993 Research Triangle Park NC |
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