Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Institute of Physics
1994
|
| Schriftenreihe: | Journal of vacuum science and technology / B
12,1 |
| Schlagworte: | |
| Beschreibung: | Stücktitelaufnahme zu e. Zeitschriftenh. |
| Beschreibung: | S. 163 - 404 graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV009724373 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 940722s1994 d||| |||| 10||| eng d | ||
| 035 | |a (OCoLC)311750143 | ||
| 035 | |a (DE-599)BVBBV009724373 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T |a DE-91G | ||
| 111 | 2 | |a International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors |n 2 |d 1993 |c Research Triangle Park, NC |j Verfasser |0 (DE-588)5104378-6 |4 aut | |
| 245 | 1 | 0 | |a Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |b 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |c proceedings ed. Ravi Subrahmanyan |
| 264 | 1 | |a New York |b American Institute of Physics |c 1994 | |
| 300 | |a S. 163 - 404 |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science and technology / B |v 12,1 | |
| 500 | |a Stücktitelaufnahme zu e. Zeitschriftenh. | ||
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dotierung |0 (DE-588)4130672-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1993 |z Research Triangle Park NC |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Dotierung |0 (DE-588)4130672-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Subrahmanyan, Ravi |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006431854 | ||
Datensatz im Suchindex
| _version_ | 1804124071655374848 |
|---|---|
| any_adam_object | |
| author_corporate | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
| author_corporate_role | aut |
| author_facet | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
| author_sort | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
| building | Verbundindex |
| bvnumber | BV009724373 |
| ctrlnum | (OCoLC)311750143 (DE-599)BVBBV009724373 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01573nam a2200349 cb4500</leader><controlfield tag="001">BV009724373</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">940722s1994 d||| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)311750143</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV009724373</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-91G</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors</subfield><subfield code="n">2</subfield><subfield code="d">1993</subfield><subfield code="c">Research Triangle Park, NC</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5104378-6</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors</subfield><subfield code="b">23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina</subfield><subfield code="c">proceedings ed. Ravi Subrahmanyan</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Institute of Physics</subfield><subfield code="c">1994</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 163 - 404</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science and technology / B</subfield><subfield code="v">12,1</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Stücktitelaufnahme zu e. Zeitschriftenh.</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dotierung</subfield><subfield code="0">(DE-588)4130672-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1993</subfield><subfield code="z">Research Triangle Park NC</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Dotierung</subfield><subfield code="0">(DE-588)4130672-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Subrahmanyan, Ravi</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-006431854</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1993 Research Triangle Park NC gnd-content |
| genre_facet | Konferenzschrift 1993 Research Triangle Park NC |
| id | DE-604.BV009724373 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:39:50Z |
| institution | BVB |
| institution_GND | (DE-588)5104378-6 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006431854 |
| oclc_num | 311750143 |
| open_access_boolean | |
| owner | DE-29T DE-91G DE-BY-TUM |
| owner_facet | DE-29T DE-91G DE-BY-TUM |
| physical | S. 163 - 404 graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | American Institute of Physics |
| record_format | marc |
| series2 | Journal of vacuum science and technology / B |
| spelling | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors 2 1993 Research Triangle Park, NC Verfasser (DE-588)5104378-6 aut Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina proceedings ed. Ravi Subrahmanyan New York American Institute of Physics 1994 S. 163 - 404 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 12,1 Stücktitelaufnahme zu e. Zeitschriftenh. Halbleiter (DE-588)4022993-2 gnd rswk-swf Dotierung (DE-588)4130672-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Research Triangle Park NC gnd-content Halbleiter (DE-588)4022993-2 s Dotierung (DE-588)4130672-7 s DE-604 Subrahmanyan, Ravi Sonstige oth |
| spellingShingle | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4130672-7 (DE-588)1071861417 |
| title | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |
| title_auth | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |
| title_exact_search | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |
| title_full | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina proceedings ed. Ravi Subrahmanyan |
| title_fullStr | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina proceedings ed. Ravi Subrahmanyan |
| title_full_unstemmed | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina proceedings ed. Ravi Subrahmanyan |
| title_short | Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |
| title_sort | papers from the second international workshop on the measurement and characterization of ultra shallow doping profiles in semiconductors 23 25 march 1993 mcnc center for microelectronics research triangle park north carolina |
| title_sub | 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina |
| topic | Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| topic_facet | Halbleiter Dotierung Konferenzschrift 1993 Research Triangle Park NC |
| work_keys_str_mv | AT internationalworkshoponthemeasurementandcharacterizationofultrashallowdopingprofilesinsemiconductorsresearchtriangleparknc papersfromthesecondinternationalworkshoponthemeasurementandcharacterizationofultrashallowdopingprofilesinsemiconductors2325march1993mcnccenterformicroelectronicsresearchtriangleparknorthcarolina AT subrahmanyanravi papersfromthesecondinternationalworkshoponthemeasurementandcharacterizationofultrashallowdopingprofilesinsemiconductors2325march1993mcnccenterformicroelectronicsresearchtriangleparknorthcarolina |