International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. (1994). Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina. American Institute of Physics.
Chicago-Zitierstil (17. Ausg.)International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina. New York: American Institute of Physics, 1994.
MLA-Zitierstil (9. Ausg.)International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. Papers from the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 23 - 25 March 1993, MCNC, Center for Microelectronics Research Triangle Park, North Carolina. American Institute of Physics, 1994.