Physics, chemistry and technology of solid state gas sensor devices:
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Buch |
Sprache: | English |
Veröffentlicht: |
New York u.a.
Wiley
1993
|
Schriftenreihe: | Chemical analysis
125 |
Schlagworte: | |
Online-Zugang: | Inhaltsverzeichnis |
Beschreibung: | Literaturangaben |
Beschreibung: | XXIII, 323 S. graph. Darst. |
ISBN: | 0471558850 |
Internformat
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300 | |a XXIII, 323 S. |b graph. Darst. | ||
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Datensatz im Suchindex
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adam_text | Titel: Physics, chemistry and technology of solid state gas sensor devices
Autor: Mandelis, Andreas
Jahr: 1993
CONTENTS
PREFACE
LIST OF ACRONYMS
COMULATIVE LISTING OF VOLUMES IN SERIES
xm
xvii
xix
CHAPTER 1 INTRODUCTION 1
1.1. Why Gas Sensors? 1
1.2. Organization of the Book 2
References 3
CHAPTER 2 INTERACTIONS OF GASES WITH SURFACES:
THE H2 CASE 5
2.1. Introduction to Catalysis 5
2.2. Physisorption and Chemisorption 6
2.3. The Change of Work Function 8
2.4. The Palladium-Hydrogen System 8
2.4.1. The Langmuirian Model in an
Inert Atmosphere 11
2.4.2. The Langmuirian Model in the
Presence of Air 13
2.5. Features of Hydrogen-Surface Interactions 15
2.6. Why Hydrogen Detection? 16
References 16
CHAPTER 3 GAS-SENSITIVE SOLID STATE
SEMICONDUCTOR SENSORS 19
3.1. Introduction 19
3.2. Metal-Semiconductor (Schottky Barrier)
Devices 20
3.3. Metal-Insulator-Semiconductor (MIS)
Devices 28
VII
Vlll
CONTENTS
3.3.1. The MIS Capacitor 28
3.3.2. TheMOSFET 36
3.4. Surface-Film Devices 43
3.4.1. Bulk Conductivity Sensors 47
3.4.2. Surface Conductivity Sensors 52
3.5. Classification and Performance of
Semiconductor Gas Sensor Devices 56
3.5.1. Classification Scheme for
Semiconductor Gas Sensors 56
3.5.2. MIS Capacitor Chemical Gas Sensors 58
3.5.3. MIS Field Effect Transistor (FET)
Sensors 83
3.5.4. MiS Diode Sensors 106
3.5.5. Metal-Semiconductor (Schottky Diode)
Sensors 120
References 125
CHAPTER 4 PHOTONIC AND PHOTOACOUSTTC GAS
SENSORS 133
4.1. Introduction 133
4.2. Photonic Gas Sensors 133
4.2.1. Reflection Spectroscopic Sensors 134
4.2.2. Spectroscopic Ellipsometry Sensor 137
4.2.3. Surface Plasmon Resonance
Spectroscopic Sensors 140
4.2.4. Infrared Spectroscopic Sensors 144
4.2.5. Photoemission Spectroscopic Sensor 147
4.3. Photoacoustic Gas Sensors 149
References 160
CHAPTER 5 FIBER-OPTIC SENSORS 163
5.1. Introduction and Historical Perspective 163
5.2. Theoretical Background 164
5.3. Fiber-Optic Instrumentation 166
5.4. Measurement Techniques 167
5.4.1. Absorptance Measurements 167
5.4.2. Reflectance Measurement 167
CONTENTS
IX
5.4.3. Luminescence (or Fluorescence)
Measurements 168
5.5. Fiber-Optic Gas Detection 168
5.5.1. Hydrogen Detection 168
5.5.2. Chemisorption Measurements 172
5.6. Comparison Between Purely Electronic
and Fiber-Optic Sensors 173
5.7. Other Applications of Fiber-Optic Sensors 175
References 175
CHAPTER 6 PIEZOELECTRIC QUARTZ CRYSTAL
MICROBALANCE SENSORS 179
6.1. Introduction and Historical Perspective 179
6.2. Theory of the PQCMB 181
6.2.1. Equivalent Electronic Circuit of the
Quartz Crystal 181
6.2.2. Thermodynamic Considerations of
the Quartz Crystal 182
6.2.3. Wave Equation of the Piezoelectric
Quartz Crystal 185
6.2.4. Sauerbrey s Theoretical Approach 189
6.3. Piezoelectric Experimental Instrumentation 192
6.4. PQCMB for Gas Detection: Experimental
Results 194
6.4.1. Hydrogen Bulk Piezoelectric
Detection 196
6.4.2. Halothane and Other Hydrocarbon
Bulk Piezoelectric Detection 203
6.4.3. Sulfur Dioxide Bulk Piezoelectric
Detection 206
6.4.4. Detection of Other Gases 207
6.5. Array of Piezoelectric Quartz Crystal
Microbalances 211
6.6. Other Applications of the PQCMB 213
References 214
CHAPTER 7 SURFACE ACOUSTIC WAVE SENSORS 219
7.1. Introduction and Historical Perspective 219
X CONTENTS
7.2. Theory of SAW Devices 220
7.2.1. Rayleigh SAW Sensors 220
7.2.2. Plate-Mode Structures 226
7.2.3. Transverse Wave Elements 228
7.3. SAW Experimental Instrumentation 229
7.4. SAW for Gas Detection: Experimental Results 232
7.4.1. Hydrogen Detection 232
7.4.2. Detection of Ammonia 239
7.4.3. Detection of Carbon Dioxide 240
7.4.4. Detection of Humidity 242
7.4.5. Detection of Other Gases 242
7.5. Analytical Comparison of the Main
Piezoelectric Devices 245
7.6. Array of SAW Devices: Pattern Recognition 245
7.7. Other Applications of SAW Devices 246
References 248
CHAPTER 8 PYROELECTRIC AND THERMAL SENSORS 253
8.1. Introduction and Historical Perspective 253
8.1.1. Pyroelectricity: A 2300-Year History 253
8.1.2. Pyroelectricity: Introduction to Gas
Sensors 254
8.2. Theory of Pyroelectric Signal Generation 256
8.3. The dc Pyroelectric Chip: Pd-LiTa03 259
8.3.1. Experimental Apparatus 259
8.3.2. Ultimate Concentration Sensitivity 261
8.3.3. Results and Discussion 261
8.4. The dc Pyroelectric Chip: Pt-PZFNTU-Au 264
8.4.1. Experimental Apparatus 264
8.4.2. Results and Sensor Performance 264
8.5. The ac Photopyroelectric Thin-Film
Detector: Pd-PVDF-AI 266
8.5.1. Experimental Apparatus and Details 266
8.5.2. Analysts of the Photopyroelectric
Response 271
8.5.3. Experimental Results: Hydrogen
Detection in Nitrogen 272
CONTENTS XI
8.5.4. Experimental Results: PPE Detection
of Hydrogen/Oxygen Mixtures 284
8.6. Signal Drifts and Stabilization of the PPE
Device 287
8.6.1. Nature of the PPE Signal Drift 287
8.6.2. Temperature and Background Drift 289
8.7. Photothermal Electrostatics of the
Metal-Pyroelectric Junction 290
8.7.1. [H]-Dependenceof4PPE)(o),0 295
8.7.2. co-Dependence of Ac60[H] 295
8.8. Pd-Mica-Au Capacitive Thermal-Wave
Sensor 299
8.9. Other Applications of Pyroelectric Sensors 302
8.10. General Conclusions 304
References 306
CHAPTER 9 FUTURE TRENDS 309
References 311
APPENDIX HYDROGEN GAS DETECTORS 313
References 315
INDEX 317
|
any_adam_object | 1 |
author | Mandelis, Andreas 1952- Christofides, Constantinos |
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dewey-ones | 681 - Precision instruments and other devices |
dewey-raw | 681/.2 |
dewey-search | 681/.2 |
dewey-sort | 3681 12 |
dewey-tens | 680 - Manufacture of products for specific uses |
discipline | Chemie / Pharmazie Handwerk und Gewerbe / Verschiedene Technologien |
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illustrated | Illustrated |
indexdate | 2024-07-09T17:37:38Z |
institution | BVB |
isbn | 0471558850 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006340001 |
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owner_facet | DE-29T DE-355 DE-BY-UBR DE-526 DE-83 |
physical | XXIII, 323 S. graph. Darst. |
publishDate | 1993 |
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series | Chemical analysis |
series2 | Chemical analysis A Wiley-Interscience publication |
spelling | Mandelis, Andreas 1952- Verfasser (DE-588)141299622 aut Physics, chemistry and technology of solid state gas sensor devices Andreas Mandelis and Constantinos Christofides New York u.a. Wiley 1993 XXIII, 323 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Chemical analysis 125 A Wiley-Interscience publication Literaturangaben Détecteurs de gaz Gas detectors Festkörper (DE-588)4016918-2 gnd rswk-swf Chemischer Sensor (DE-588)4259288-4 gnd rswk-swf Gas (DE-588)4019320-2 gnd rswk-swf Gasspürgerät (DE-588)4195523-7 gnd rswk-swf Chemischer Sensor (DE-588)4259288-4 s Gas (DE-588)4019320-2 s Festkörper (DE-588)4016918-2 s DE-604 Gasspürgerät (DE-588)4195523-7 s Christofides, Constantinos Verfasser aut Chemical analysis 125 (DE-604)BV000008780 125 HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006340001&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
spellingShingle | Mandelis, Andreas 1952- Christofides, Constantinos Physics, chemistry and technology of solid state gas sensor devices Chemical analysis Détecteurs de gaz Gas detectors Festkörper (DE-588)4016918-2 gnd Chemischer Sensor (DE-588)4259288-4 gnd Gas (DE-588)4019320-2 gnd Gasspürgerät (DE-588)4195523-7 gnd |
subject_GND | (DE-588)4016918-2 (DE-588)4259288-4 (DE-588)4019320-2 (DE-588)4195523-7 |
title | Physics, chemistry and technology of solid state gas sensor devices |
title_auth | Physics, chemistry and technology of solid state gas sensor devices |
title_exact_search | Physics, chemistry and technology of solid state gas sensor devices |
title_full | Physics, chemistry and technology of solid state gas sensor devices Andreas Mandelis and Constantinos Christofides |
title_fullStr | Physics, chemistry and technology of solid state gas sensor devices Andreas Mandelis and Constantinos Christofides |
title_full_unstemmed | Physics, chemistry and technology of solid state gas sensor devices Andreas Mandelis and Constantinos Christofides |
title_short | Physics, chemistry and technology of solid state gas sensor devices |
title_sort | physics chemistry and technology of solid state gas sensor devices |
topic | Détecteurs de gaz Gas detectors Festkörper (DE-588)4016918-2 gnd Chemischer Sensor (DE-588)4259288-4 gnd Gas (DE-588)4019320-2 gnd Gasspürgerät (DE-588)4195523-7 gnd |
topic_facet | Détecteurs de gaz Gas detectors Festkörper Chemischer Sensor Gas Gasspürgerät |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006340001&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
volume_link | (DE-604)BV000008780 |
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