Industrial applications of plasma physics: proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bologna
Ed. Compositori
1993
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| Schriftenreihe: | International School of Plasma Physics Piero Caldirola <Milano>: ISPP
13 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVI, 579 S. Ill., graph. Darst. |
| ISBN: | 8877940506 |
Internformat
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Datensatz im Suchindex
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| adam_text | INTERNATIONAL SCHOOL OF PLASMA PHYSICS PIERO CALDIROLA» CENTRO DI
CULTURA SCIENTIFICA ALESSANDRO VOLTA» INDUSTRIAL APPLICATIONS OF PLASMA
PHYSICS PROCEEDINGS OF THE COURSE AND WORKSHOP HELD AT VILLA MONASTERO -
VARENNA, ITALY 2-11 SEPTEMBER, 1992 EDITED BY G. BONIZZONI ISTITUTO DI
FISICA DEL PLASMA DEL CNR MILANO, ITALY W. HOOKE DEPARTMENT OF PHYSICS,
NORTH CAROLINA UNIVERSITY AND KOBE STEEL», USA E. SINDONI DIPARTIMENTO
DI FISICA UNIVERSITA DI MILANO, ITALY EDITRICE COMPOSITORI SOCIETA
ITALIANA DI FISICA PAGE CONTENTS LIST OF PARTICIPANTS XI E. SINDONI -
WELCOME ADDRESS XV LECTURES W. M. HOOKE AND R. E. FAUBER - SOME
FUNDAMENTAL PLASMA PHYSICS CONCEPTS RELATIVE TO INDUSTRIAL PLASMAS - A
TUTORIAL 3 F. DE MARCO - PROPAGATION AND ABSORPTION OF ELECTROMAG- NETIC
WAVES IN COLLISIONAL, PARTIALLY IONISED GASES... 15 W. M. HOOKE, S. P.
BOZEMAN AND J. W. OLESIK - SOME AS- PECTS OF WAVE PROPAGATION IN
COLLISIONAL PLASMAS 33 J. L. SHOHET - PLASMA-AIDED MANUFACTURING 47 K.
T. SCOTT - THERMAL PLASMA TORCHES FOR MATERIALS PRO- CESSING 65 R.
ITATANI - PLASMA APPLICATION: PLASMA CHEMISTRY AND MATERIAL SCIENCE
BACKGROUND FOR PLASMA PHYSICISTS 81 J. E. STEVENS - RF PHYSICS ISSUES
FOR ELECTRON CYCLOTRON RESONANCE PLASMA ETCH TOOL OPERATION 95 G.
LISITANO - MICROWAVE PLASMA GENERATION WITH SLOTTED- LINE RADIATOR
STRUCTURES 109 Y. KAWAI, A. KOMORI AND M. MURATA - PRODUCTION OF A LARGE
DIAMETER ECR PLASMA 117 T. CONSOLI - A SELECTIVE REVIEW OF SOME
INDUSTRIAL AP- PLICATIONS OF EM FIELDS 131 N. SATO AND S. IIZUKA -
CONTROL OF PLASMAS FOR MATERIAL PROCESSINGS 147 G. M. BATANOV, N. K.
BEREZHETSKAYA, E. F. BOL SHAKOV, A. A. GORBUNOV, A. A. DOROFEYUK, V.I.
KONOV, V.A. KOP EV, I. A. KOSSYI AND A. YU. KOSTINSKII - SUPER-PURE
PLAS- MA CHEMISTRY IN DISCHARGES,EXCITED BY INTENSE MICROWA- VE BEAMS
161 R. WILHELM - MICROWAVE PLASMAS FOR SURFACE TREATMENT AND THIN-FILM
PRODUCTION 185 VII G. BONIZZONI - PLASMA ARC TECHNOLOGY FOR TOXIC WASTE
TREATMENT AND METAL PRODUCTION:INDUSTRIAL APPLICATIONS AND PERSPECTIVES
199 J. V. R. HEBERLEIN - THERMAL PLASMAS FOR THE DESTRUCTION OF
HAZARDOUS WASTES 219 P. C. EFTHIMION, D. J. HELFRITCH AND D. H. MCNEILL
- DE- STRUCTION OF NOY IN FLUE GAS BY PLASMA ASSISTED CHEM- ISTRY 237 M.
G. DROUET - HIGH TEMPERATURE PROCESSES FOR INDUSTRIAL WASTE TREATMENT
AND VALORISATION 259 R. ITATANI - STUDIES ON TOXIC WASTE DESTRUCTION
WITH PLASMAS IN JAPAN 271 J. W. OLESIK - INDUCTIVELY COUPLED PLASMA
OPTICAL EMIS- SION SPECTROMETRY FOR ELEMENTAL ANALYSIS 281 G. M. HIEFTJE
- PLASMA SOURCES FOR ATOMIC SPECTROCHEM- ICAL ANALYSIS 293 R. D AGOSTINO
AND F. FRACASSI - THE CHEMISTRY OF PLASMA ETCHING PROCESSES 309 S. M.
BOBBIO - MAGNETRON ETCH TECHNOLOGY 327 H. FUJIYAMA - PLASMA PROCESSING
FOR LARGE SCALE SOLAR CELL PLATES 349 R. W. BOSWELL - THE HISTORY AND
APPLICATION OF THE HE- LICON SOURCE TO PLASMA PROCESSING 363 A. W. KOCH
- PLASMA DEPOSITION AND IN SITU - DIAGNOSTICS 377 J. J. BEULENS, A. J.
M. BUURON, G. J. MEEUSEN, M. C. M. VAN DE SANDEN AND D. C. SCHRAM -
(FAST) PLASMA DE- POSITION OF AMORPHOUS AND CRYSTALLINE LAYERS; A DIS-
CUSSION OF THE PHYSICAL MECHANISMS 391 A. MATSUDA - GROWTH MECHANISM AND
CONTROL OF DEFECTS IN THE DEPOSITION OF HYDROGENATED AMORPHOUS SILICON
THIN FILMS FROM A SILANE GLOW-DISCHARGE PLASMA 405 N. ST. J. BRAITHWAITE
- LOW PRESSURE PLASMA DEPOSITION OF WEAR AND BARRIER COATINGS 419 K. T.
SCOTT - PLASMA SPRAYED COATINGS 433 S. S. TSEREVITINOV - MATERIAL
SURFACE TREATMENT BY PUL- SED HIGH ENERGY PLASMA 447 VIII G. A.
ASKARYAN, G. M. BATANOV, A. E. BARKHUDAROV, S. I. GRITSININ, E. G.
KORCHAGINA, I. A. KOSSYI, I. N. ROZH- KOV, V. P. SILAKOV AND N. M.
TARASOVA - GAS DISCHARGE AS A METHOD FOR OVERCOMING THE CONSEQUENCES OF
ATMOS- PHERE POLLUTION BY CHLOROFLUOROCARBONS (CFC S) 463 CONTRIBUTED
PAPERS D. H. MCNEILL - PYROLYSIS IN TOKAMAK PLASMAS 483 A. E. GREENE, L.
A. BECHTOLD, J. J. COOGAN AND L. A. RO- SOCHA - MODELING OF SILENT
DISCHARGE PLASMA FOR THE DESTRUCTION OF HAZARDOUS ORGANIC COMPOUNDS 489
M. J. DE GRAAF, R. SEVERENS, Z. QING, R. DAHIYA, D. K. OTORBAEV, R. F.
G. MEULENBROEKS, M. C. M. VAN DE SAN- DEN AND D.C. SCHRAM 495 C.
CHARLES, A. GOULLET, P. GARCIA, B. GROLLEAU, G. TUR- BAN, R. W. BOSWELL,
G. GIROULT-MATLAKOWSKI, R. K. POR- TEOUS, A. BOUCHOULE, C. LAURE AND P.
RANSON 497 D. BATANI, I. C. E. TURCU, G. J. TALLENTS, F. BIJKERK, E.
LOUIS - HIGH REPETITION LASER PLASMA X-RAY SOURCE FOR MICROLITHOGRAPHY
503 N. MUTSUKURA, Y. FUKAZAWA, Y. MACHI AND T. KUBOTA - DI- AGNOSTICS
AND CONTROL OF RF GLOW-DISCHARGE PLASMA: AP- PLICATION TO CF^ PLASMA FOR
DRY ETCHING OF SILICON.... 509 V. K. GERASIMOV, K. F. SERGEICHEV AND I.
A. SYCHOV DIAMOND SYNTHESIS BY MEANS OF MICROWAVE DISCHARGE 515 G. M.
BATANOV, V. A. IVANOV, M. E. KONYZHEV, V. A. KONYU- SHKIN AND S. B.
MIROV - COLORATION OF LIF SINGLE- CRYSTALS BY SURFACE MICROWAVE
DISCHARGES 521 M. NUNOGAKI AND T. OKADA - APPLICATION OF ION- AND EL-
ECTRON-BEAM TO PREPARATIVE IMPROVEMENT OF MATERIALS FOR THE SUBSEQUENT
SURFACE NITRIDATION PROCESS 527 A. E. GREENE, R. J. FAEHL, R. K.
KEINIGS, T. A. OLIPHANT AND W. R. SHANAHAN - PROGRESS ON THE DEVELOPMENT
OF A 2-D PIC/MONTE CARLO MODEL OF GLOW DISCHARGES 533 T. YAMAGUCHI, R.
HIDAKA, N. HIROTSU, M. TANAKA AND Y. KA- WAI - 8 INCHES UNIFORM ECR
PLASMAS USING THE CIRCULAR TEOL MODE MICROWAVE 539 D. E. BULLARD AND D.
C. LYNCH - POTENTIAL FOR PROCESSING OF REFRACTORY ORES IN A MICROWAVE
INDUCED COLD PLAS- MA 545 IX J. FEUGEAS, G. SANCHEZ, G. GRIGIONI, CO.
DE GONZALEZ AND A. POCHETTINO - THERMAL EFFECT OF PULSED ION IMPLAN-
TATION WITH A COAXIAL PLASMA GUN 551 M. HRABOVSKY - PLASMA GENERATOR
WITH WATER STABILIZED DC ARC 557 A. HEILMANN, F. HOMILIUS AND J. WERNER
- PLASMA POLYMER METAL COMPOSITE FILMS: CHANGES OF THE ELECTRICAL AND
OPTICAL PROPERTIES 563 G. J. DISHON, S. M. BOBBIO, N. G. KOOPMAN AND G.
A. RINNE PLASMA ASSISTED FLUXLESS SOLDERING 569 R. WILHELM - INDUSTRIAL
APPLICATIONS OF PLASMA PHYSICS. SUMMARY OF A VARENNA COURSE 577 X
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| spelling | Industrial applications of plasma physics proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992 International School of Plasma Physics "Piero Caldirola", Centro di Cultura Scientifica "Alessandro Volta". Ed. by G. Bonizzoni ... Bologna Ed. Compositori 1993 XVI, 579 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier International School of Plasma Physics Piero Caldirola <Milano>: ISPP 13 Plasma (Ionized gases) Congresses Plasmaphysik (DE-588)4046259-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1992 Varenna gnd-content Plasmaphysik (DE-588)4046259-6 s DE-604 Bonizzoni, G. Sonstige oth International School of Plasma Physics Piero Caldirola <Milano>: ISPP 13 (DE-604)BV005462938 13 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006333357&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Industrial applications of plasma physics proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992 International School of Plasma Physics Piero Caldirola <Milano>: ISPP Plasma (Ionized gases) Congresses Plasmaphysik (DE-588)4046259-6 gnd |
| subject_GND | (DE-588)4046259-6 (DE-588)1071861417 |
| title | Industrial applications of plasma physics proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992 |
| title_auth | Industrial applications of plasma physics proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992 |
| title_exact_search | Industrial applications of plasma physics proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992 |
| title_full | Industrial applications of plasma physics proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992 International School of Plasma Physics "Piero Caldirola", Centro di Cultura Scientifica "Alessandro Volta". Ed. by G. Bonizzoni ... |
| title_fullStr | Industrial applications of plasma physics proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992 International School of Plasma Physics "Piero Caldirola", Centro di Cultura Scientifica "Alessandro Volta". Ed. by G. Bonizzoni ... |
| title_full_unstemmed | Industrial applications of plasma physics proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992 International School of Plasma Physics "Piero Caldirola", Centro di Cultura Scientifica "Alessandro Volta". Ed. by G. Bonizzoni ... |
| title_short | Industrial applications of plasma physics |
| title_sort | industrial applications of plasma physics proceedings of the course and workshop held at villa monastero varenna italy 2 11 september 1992 |
| title_sub | proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2 - 11 September, 1992 |
| topic | Plasma (Ionized gases) Congresses Plasmaphysik (DE-588)4046259-6 gnd |
| topic_facet | Plasma (Ionized gases) Congresses Plasmaphysik Konferenzschrift 1992 Varenna |
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