APA (7th ed.) Citation

(1992). Dry etch technology: 9 - 10 September 1991, San Jose, California. SPIE.

Chicago Style (17th ed.) Citation

Dry Etch Technology: 9 - 10 September 1991, San Jose, California. Bellingham, Wash: SPIE, 1992.

MLA (9th ed.) Citation

Dry Etch Technology: 9 - 10 September 1991, San Jose, California. SPIE, 1992.

Warning: These citations may not always be 100% accurate.