A user's guide to ellipsometry:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boston u.a.
Acad. Press
1993
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XV, 260 S. graph. Darst. |
| ISBN: | 0126939500 |
Internformat
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Datensatz im Suchindex
| _version_ | 1804123864725192704 |
|---|---|
| adam_text | A USER F S GUIDE TO ELLIPSOMETRY HARLAND G. TOMPKINS MOTOROLA, INC.
MESA, ARIZONA ACADEMIC PRESS, INC. HARCOURT BRACE JOVANOVICH, PUBLISHERS
BOSTON SAN DIEGO NEW YORK LONDON SYDNEY TOKYO TORONTO CONTENTS PREFACE
XIII CHAPTER 1 THEORETICAL ASPECTS 1 1.1 DESCRIPTION OF AN
ELECTROMAGNETIC WAVE 1 1.2 INTERACTION OF LIGHT WITH MATERIAL 2 1.3
POLARIZED LIGHT 7 1.4 REFLECTIONS 10 1.5 ELLIPSOMETRY DEFINITIONS 17 1.6
REFERENCES 18 CHAPTER 2 INSTRUMENTATION 19 2.1 FUNDAMENTALS AND HISTORY
19 2.2 OPTICAL ELEMENTS 21 2.3 THE MANUAL NULL INSTRUMENT 26 2.4
ROTATING ELEMENT INSTRUMENTS 30 2.5 REFERENCES 34 CHAPTER 3 USING
OPTICAL PARAMETERS TO DETERMINE MATERIAL PROPERTIES 35 3.1 DEL/PSI AND N
AND K FOR SUBSTRATES 35 3.2 THE CALCULATION OF DEL/PSI TRAJECTORIES FOR
FILMS ON SUBSTRATES 39 V VI CONTENTS 3.3 TRAJECTORIES FOR TRANSPARENT
FILMS 40 3.4 TRAJECTORIES FOR ABSORBING FILMS 45 3.5 TWO-FILM STRUCTURES
47 3.6 REFERENCES 50 CHAPTER 4 DETERMINING OPTICAL PARAMETERS FOR
INACCESSIBLE SUBSTRATES AND UNKNOWN FILMS 51 4.1 INACCESSIBLE SUBSTRATES
AND UNKNOWN FILMS 51 4.2 DETERMINING FILM-FREE VALUES OF DEL AND PSI 53
4.3 DETERMINING THE COMPLEX INDEX OF REFRACTION OF THE FILM 58 4.4
SUMMARY 62 4.5 REFERENCES 63 CHAPTER 5 EXTREMELY THIN FILMS 65 5.1
GENERAL PRINCIPLES 65 5.2 SOME EXAMPLES OF EXTREMELY THIN FILMS 69 5.3
SUMMARY 80 5.4 REFERENCES 80 CHAPTER 6 THE SPECIAL CASE OF POLYSILICON
82 6.1 GENERAL 82 6.2 RANGE OF THE OPTICAL CONSTANTS 82 6.3 DEL/PSI
TRAJECTORIES IN GENERAL 86 6.4 EFFECT OF THE COEFFICIENT OF EXTINCTION
88 6.5 EFFECT OF THE INDEX OF REFRACTION 88 6.6 REQUIREMENTS 91 6.7
MEASURING THE THICKNESS OF OXIDE ON POLYSILICON 91 6.8 SIMPLIFICATIONS
92 6.9 REFERENCES 94 CONTENTS VII 7.1 7.2 7.3 7.4 7.5 7.6 7.7 GENERAL
MACROSCOPIC ROUGHNESS MICROSCOPIC ROUGHNESS PERSPECTIVE SUBSTRATE
ROUGHNESS FILM GROWTH WITH ROUGHNESS REFERENCES CASE STUDIES CHAPTER 7
THE EFFECT OF ROUGHNESS 95 95 95 96 97 97 102 106 107 CASEL DISSOLUTION
AND SWELLING OF THIN POLYMER FILMS 109 CL.L GENERAL 109 C1.2 EARLY WORK
USING A PSI-METER 109 C1.3 LATER WORK USING AN EILIPSOMETER 114 C1.4
MODELING THE SWOLLEN FILM 114 C1.5 COMPARISON OF DATA WITH MODEL 115
C1.6 REFERENCES 118 CASE 2 ION BEAM INTERACTION WITH SILICON 119 C2.1
GENERAL 119 C2.2 DEVELOPMENT OF THE ANALYSIS METHOD 119 C2.3 ION BEAM
DAMAGE RESULTS 121 C2.4 DAMAGE REMOVAL 123 C2.5 REFERENCES 126 CASE 3
DRY OXIDATION OF METALS 127 C3.1 GENERAL 127 C3.2 OXIDATION OF BISMUTH
AT ROOM TEMPERATURE 127 C3.3 PLASMA OXIDATION OF TANTALUM 130 VIII
CONTENTS C3.4 THERMAL OXIDATION OF NICKEL 132 C3.5 REFERENCES CASE 4
OPTICAL PROPERTIES OF SPUTTERED CHROMIUM SUBOXIDE THIN FILMS 135 C4.1
GENERAL 135 C4.2 FILM PREPARATION AND AUGER ANALYSIS 135 C4.3 OPTICAL
MEASUREMENTS 136 C4.4 REFERENCE 138 CASE 5 ION-ASSISTED FILM GROWTH OF
ZIRCONIUM DIOXIDE 139 C5.1 EXPERIMENTAL APPARATUS 139 C5.2 OPTICAL
MEASUREMENTS 140 C5.3 REFERENCES 141 CASE 6
ELECTROCHEMICAL/ELLIPSOMETRIC STUDIES OF OXIDES ON METALS 142 C6.1
GENERAL 142 C6.2 EXPERIMENTAL METHODS 142 C6.3 OXIDE GROWTH: 1.
ZIRCONIUM 145 C6.4 OXIDE GROWTH: 2. TITANIUM 147 C6.5 OXIDE GROWTH: 3.
VANADIUM 150 C6.6 DEPOSITION OF OXIDES: 1. LEAD 154 C6.7 DEPOSITION OF
OXIDES: 2. MANGANESE 156 C6.8 REFERENCES 158 CASE 7 AMORPHOUS
HYDROGENATED CARBON FILMS 160 C7.1 GENERAL 160 C7.2 MECHANISM OF FILM
FORMATION 160 C7.3 PROPERTIES VS. DEPOSITION PARAMETERS 164 C7.4
REFERENCES 167 CONTENTS IX C8.1 C8.2 C8.3 C8.4 C8.5 C8.6 GENERAL FILM
FORMATION AND PROPERTIES INTERFACE STUDIES REMOVAL WITH A HYDROGEN
PLASMA OTHER FORMATION AND REMOVAL STUDIES REFERENCES CASE9 VARIOUS
FILMS ON INP C9.1 C9.2 C9.3 C9.4 C9.5 GENERAL THE INP SURFACE OPTICAL
PROPERTIES THE THERMAL OXIDE ON INP PMMA ON INP REFERENCES CASE8
FLUOROPOLYMER FILMS ON SILICON FROM REACTIVE ION ETCHING 168 168 168 172
176 177 179 180 180 180 182 183 185 CASE 10 BENZOTRIAZOLE AND
BENZIMIDAZOLE ON COPPER 186 C10.1 GENERAL 186 C10.2 EX SITU STUDIES 187
C10.3 IN SITU STUDIES 188 C10.4 REFERENCES 194 CASE 11 GAS ADSORPTION ON
METAL SURFACES 196 CLL.L GENERAL 196 OL.2 NO, 0 2 , AND CO ON COPPER 196
CLL.3 OXIDATION OF NICKEL 200 CLL.4 THE INTERACTION OF SMALL AMOUNTS OF
OXYGEN WITH ALUMINUM FILMS 202 C11.5 RESIDUAL GASES ON SILVER 207 CLL.6
REFERENCES 211 X CONTENTS CASE 12 SILICON-GERMANIUM THIN FILMS 213 C12.1
GENERAL 213 C12.2 EXPERIMENTAL 213 C12.3 RESULTS 213 C12.4 REFERENCES
216 CASE 13 PROFILING OF HGCDTE 217 C13.1 GENERAL 217 C13.2 EXPERIMENTAL
217 C13.3 RESULTS 218 C13.4 DISCUSSION 219 C13.5 REFERENCES 220 CASE 14
OXIDES AND NITRIDES OF SILICON 221 C14.1 GENERAL 221 C14.2 LOW
TEMPERATURE GROWTH OF SILICON DIOXIDE 221 C14.3 PLASMA ENHANCED SILICON
NITRIDE 224 C14.4 SILICON OXYNITRIDE FILMS AS A SELECTIVE DIFFUSION
BARRIER 226 C14.5 REFERENCES 229 APPENDICES 231 APPENDIX A DEL/PSI
TRAJECTORY CALCULATIONS 233 A.L GENERAL 233 A.2 PROGRAM ONEFILM 234 A.3
PROGRAM THREEFILMS 235 A.4 REFERENCES 235 CONTENTS XI APPENDIX B EFF
ECTIVE MEDIUM CONSIDERATIONS 246 B.L GENERAL 246 B.2 THEORY 247 B.3
EXAMPLES 248 B.4 REFERENCES 251 APPENDIX C LITERATURE VALUES OF OPTICAL
CONSTANTS OF VARIOUS MATERIALS 253 C.1 GENERAL 253 C.2 VALUES 253 C.3
REFERENCES 255 INDEX 257
|
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| spelling | Tompkins, Harland G. 1938- Verfasser (DE-588)129994987 aut A user's guide to ellipsometry Harland G. Tompkins Boston u.a. Acad. Press 1993 XV, 260 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Couches minces - Technologie ram Ellipsométrie Ellipsométrie - Cas, Études de Ellipsométrie ram Surfaces (technologie) ram Ellipsometry Ellipsometry Case studies Werkstoff (DE-588)4065579-9 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Oberflächeneigenschaft (DE-588)4219221-3 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Reflektometrie (DE-588)4296759-4 gnd rswk-swf (DE-588)4522595-3 Fallstudiensammlung gnd-content Werkstoff (DE-588)4065579-9 s Dünne Schicht (DE-588)4136925-7 s Oberflächeneigenschaft (DE-588)4219221-3 s Reflektometrie (DE-588)4296759-4 s 1\p DE-604 Ellipsometrie (DE-588)4152025-7 s 2\p DE-604 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006291311&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Tompkins, Harland G. 1938- A user's guide to ellipsometry Couches minces - Technologie ram Ellipsométrie Ellipsométrie - Cas, Études de Ellipsométrie ram Surfaces (technologie) ram Ellipsometry Ellipsometry Case studies Werkstoff (DE-588)4065579-9 gnd Dünne Schicht (DE-588)4136925-7 gnd Oberflächeneigenschaft (DE-588)4219221-3 gnd Ellipsometrie (DE-588)4152025-7 gnd Reflektometrie (DE-588)4296759-4 gnd |
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| title | A user's guide to ellipsometry |
| title_auth | A user's guide to ellipsometry |
| title_exact_search | A user's guide to ellipsometry |
| title_full | A user's guide to ellipsometry Harland G. Tompkins |
| title_fullStr | A user's guide to ellipsometry Harland G. Tompkins |
| title_full_unstemmed | A user's guide to ellipsometry Harland G. Tompkins |
| title_short | A user's guide to ellipsometry |
| title_sort | a user s guide to ellipsometry |
| topic | Couches minces - Technologie ram Ellipsométrie Ellipsométrie - Cas, Études de Ellipsométrie ram Surfaces (technologie) ram Ellipsometry Ellipsometry Case studies Werkstoff (DE-588)4065579-9 gnd Dünne Schicht (DE-588)4136925-7 gnd Oberflächeneigenschaft (DE-588)4219221-3 gnd Ellipsometrie (DE-588)4152025-7 gnd Reflektometrie (DE-588)4296759-4 gnd |
| topic_facet | Couches minces - Technologie Ellipsométrie Ellipsométrie - Cas, Études de Surfaces (technologie) Ellipsometry Ellipsometry Case studies Werkstoff Dünne Schicht Oberflächeneigenschaft Ellipsometrie Reflektometrie Fallstudiensammlung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006291311&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT tompkinsharlandg ausersguidetoellipsometry |