Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI):
Saved in:
Bibliographic Details
Format: Book
Language:English
Published: Park Ridge, NJ Noyes Publ. 1988
Series:Materials science and process technology series
Subjects:
Physical Description:XIII, 675 S.
ISBN:0815511507

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!