APA (7th ed.) Citation

(1988). Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI). Noyes Publ.

Chicago Style (17th ed.) Citation

Semiconductor Materials and Process Technology Handbook for Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI). Park Ridge, NJ: Noyes Publ, 1988.

MLA (9th ed.) Citation

Semiconductor Materials and Process Technology Handbook for Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI). Noyes Publ, 1988.