Special issue on the physics of RF discharges for plasma processing:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York
1986
|
| Subjects: | |
| Item Description: | In: Institute of Electrical and Electronics Engineers: IEEE transactions on plasma science ; 14. 1986 2 |
| Physical Description: | S. 77 - 196 |
Staff View
MARC
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| 245 | 1 | 0 | |a Special issue on the physics of RF discharges for plasma processing |
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Record in the Search Index
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| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV009220382 |
| ctrlnum | (OCoLC)35443197 (DE-599)BVBBV009220382 |
| format | Book |
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| id | DE-604.BV009220382 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T17:33:21Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006130112 |
| oclc_num | 35443197 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | S. 77 - 196 |
| publishDate | 1986 |
| publishDateSearch | 1986 |
| publishDateSort | 1986 |
| record_format | marc |
| spelling | Special issue on the physics of RF discharges for plasma processing New York 1986 S. 77 - 196 txt rdacontent n rdamedia nc rdacarrier In: Institute of Electrical and Electronics Engineers: IEEE transactions on plasma science ; 14. 1986 2 Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Hochfrequenzentladung (DE-588)4298594-8 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 s Hochfrequenzentladung (DE-588)4298594-8 s DE-604 |
| spellingShingle | Special issue on the physics of RF discharges for plasma processing Plasmatechnik (DE-588)4140353-8 gnd Hochfrequenzentladung (DE-588)4298594-8 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4298594-8 |
| title | Special issue on the physics of RF discharges for plasma processing |
| title_auth | Special issue on the physics of RF discharges for plasma processing |
| title_exact_search | Special issue on the physics of RF discharges for plasma processing |
| title_full | Special issue on the physics of RF discharges for plasma processing |
| title_fullStr | Special issue on the physics of RF discharges for plasma processing |
| title_full_unstemmed | Special issue on the physics of RF discharges for plasma processing |
| title_short | Special issue on the physics of RF discharges for plasma processing |
| title_sort | special issue on the physics of rf discharges for plasma processing |
| topic | Plasmatechnik (DE-588)4140353-8 gnd Hochfrequenzentladung (DE-588)4298594-8 gnd |
| topic_facet | Plasmatechnik Hochfrequenzentladung |