APA (7th ed.) Citation

(1986). Special issue on the physics of RF discharges for plasma processing.

Chicago Style (17th ed.) Citation

Special Issue on the Physics of RF Discharges for Plasma Processing. New York, 1986.

MLA (9th ed.) Citation

Special Issue on the Physics of RF Discharges for Plasma Processing. 1986.

Warning: These citations may not always be 100% accurate.