Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III: 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif.
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York
American Inst. of Physics
1985
|
| Schriftenreihe: | Journal of vacuum science & technology / B
3,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. e. Zeitschr.-Bandes |
| Beschreibung: | S. 1657-1725 zahlr. graph. Darst. |
Internformat
MARC
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| 110 | 2 | |a Workshop on Refractory Metals and Silicides for VLSI (3, 1985, San Juan Bautista, Calif.) |e Verfasser |0 (DE-588)16133957-8 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III |b 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. |c hrsg. von Michael D. Strathman |
| 264 | 1 | |a New York |b American Inst. of Physics |c 1985 | |
| 300 | |a S. 1657-1725 |b zahlr. graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology / B |v 3,6 | |
| 500 | |a Einzelaufn. e. Zeitschr.-Bandes | ||
| 650 | 0 | 7 | |a Siliciumverbindungen |0 (DE-588)4124194-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Metall |0 (DE-588)4038860-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Feuerfestigkeit |0 (DE-588)4154266-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1985 |z San Juan Bautista Calif. |2 gnd-content | |
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| 689 | 1 | 0 | |a Metall |0 (DE-588)4038860-8 |D s |
| 689 | 1 | 1 | |a Feuerfestigkeit |0 (DE-588)4154266-6 |D s |
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| 700 | 1 | |a Strathman, Michael D. |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| author_corporate | Workshop on Refractory Metals and Silicides for VLSI (3, 1985, San Juan Bautista, Calif.) |
| author_corporate_role | aut |
| author_facet | Workshop on Refractory Metals and Silicides for VLSI (3, 1985, San Juan Bautista, Calif.) |
| author_sort | Workshop on Refractory Metals and Silicides for VLSI (3, 1985, San Juan Bautista, Calif.) |
| building | Verbundindex |
| bvnumber | BV009220144 |
| classification_tum | WER 510f |
| ctrlnum | (OCoLC)632483348 (DE-599)BVBBV009220144 |
| discipline | Werkstoffwissenschaften |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1985 San Juan Bautista Calif. gnd-content |
| genre_facet | Konferenzschrift 1985 San Juan Bautista Calif. |
| id | DE-604.BV009220144 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:33:20Z |
| institution | BVB |
| institution_GND | (DE-588)16133957-8 (DE-588)867-9 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006129900 |
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| physical | S. 1657-1725 zahlr. graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology / B |
| spelling | Workshop on Refractory Metals and Silicides for VLSI (3, 1985, San Juan Bautista, Calif.) Verfasser (DE-588)16133957-8 aut Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. hrsg. von Michael D. Strathman New York American Inst. of Physics 1985 S. 1657-1725 zahlr. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 3,6 Einzelaufn. e. Zeitschr.-Bandes Siliciumverbindungen (DE-588)4124194-0 gnd rswk-swf Metall (DE-588)4038860-8 gnd rswk-swf Feuerfestigkeit (DE-588)4154266-6 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1985 San Juan Bautista Calif. gnd-content VLSI (DE-588)4117388-0 s Siliciumverbindungen (DE-588)4124194-0 s DE-604 Metall (DE-588)4038860-8 s Feuerfestigkeit (DE-588)4154266-6 s Strathman, Michael D. Sonstige oth American Vacuum Society Sonstige (DE-588)867-9 oth |
| spellingShingle | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. Siliciumverbindungen (DE-588)4124194-0 gnd Metall (DE-588)4038860-8 gnd Feuerfestigkeit (DE-588)4154266-6 gnd VLSI (DE-588)4117388-0 gnd |
| subject_GND | (DE-588)4124194-0 (DE-588)4038860-8 (DE-588)4154266-6 (DE-588)4117388-0 (DE-588)1071861417 |
| title | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. |
| title_auth | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. |
| title_exact_search | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. |
| title_full | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. hrsg. von Michael D. Strathman |
| title_fullStr | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. hrsg. von Michael D. Strathman |
| title_full_unstemmed | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. hrsg. von Michael D. Strathman |
| title_short | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI III |
| title_sort | proceedings of the workshop on refractory metals and silicides for vlsi iii 13 16 may 1985 st francis retreat center san juan bautista calif |
| title_sub | 13 - 16 May 1985, St. Francis Retreat Center San Juan Bautista, Calif. |
| topic | Siliciumverbindungen (DE-588)4124194-0 gnd Metall (DE-588)4038860-8 gnd Feuerfestigkeit (DE-588)4154266-6 gnd VLSI (DE-588)4117388-0 gnd |
| topic_facet | Siliciumverbindungen Metall Feuerfestigkeit VLSI Konferenzschrift 1985 San Juan Bautista Calif. |
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