Impurity diffusion and gettering in silicon: proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Pittsburgh, Penn.
Materials Research Soc.
1985
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
36 |
| Schlagworte: | |
| Beschreibung: | XIII, 284 S. Ill., graph. Darst. |
| ISBN: | 0931837014 |
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| 245 | 1 | 0 | |a Impurity diffusion and gettering in silicon |b proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston |c Hrsg. von Richard B. Fair* |
| 264 | 1 | |a Pittsburgh, Penn. |b Materials Research Soc. |c 1985 | |
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| genre | (DE-588)1071861417 Konferenzschrift 1984 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1984 Boston Mass. |
| id | DE-604.BV009219304 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:33:19Z |
| institution | BVB |
| institution_GND | (DE-588)5026036-4 |
| isbn | 0931837014 |
| language | Undetermined |
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| physical | XIII, 284 S. Ill., graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Impurity diffusion and gettering in silicon proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston Hrsg. von Richard B. Fair* Pittsburgh, Penn. Materials Research Soc. 1985 XIII, 284 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 36 Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Getterung (DE-588)4157223-3 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Diffusion (DE-588)4012277-3 gnd rswk-swf Störstelle (DE-588)4193400-3 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1984 Boston Mass. gnd-content Gitterbaufehler (DE-588)4125030-8 s Halbleiter (DE-588)4022993-2 s DE-604 Getterung (DE-588)4157223-3 s Silicium (DE-588)4077445-4 s Störstelle (DE-588)4193400-3 s Diffusion (DE-588)4012277-3 s 1\p DE-604 Fair, Richard B. Sonstige oth Symposium on Impurity Diffusion and Gettering in Semiconductors 1984 Boston, Mass. Sonstige (DE-588)5026036-4 oth Materials Research Society: Materials Research Society symposia proceedings 36 (DE-604)BV001899105 36 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Impurity diffusion and gettering in silicon proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston Materials Research Society: Materials Research Society symposia proceedings Gitterbaufehler (DE-588)4125030-8 gnd Getterung (DE-588)4157223-3 gnd Silicium (DE-588)4077445-4 gnd Diffusion (DE-588)4012277-3 gnd Störstelle (DE-588)4193400-3 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4125030-8 (DE-588)4157223-3 (DE-588)4077445-4 (DE-588)4012277-3 (DE-588)4193400-3 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Impurity diffusion and gettering in silicon proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston |
| title_auth | Impurity diffusion and gettering in silicon proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston |
| title_exact_search | Impurity diffusion and gettering in silicon proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston |
| title_full | Impurity diffusion and gettering in silicon proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston Hrsg. von Richard B. Fair* |
| title_fullStr | Impurity diffusion and gettering in silicon proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston Hrsg. von Richard B. Fair* |
| title_full_unstemmed | Impurity diffusion and gettering in silicon proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston Hrsg. von Richard B. Fair* |
| title_short | Impurity diffusion and gettering in silicon |
| title_sort | impurity diffusion and gettering in silicon proceedings of the symposium on impurity diffusion and gettering in semiconductors held as symposium c at the materials research soc meeting nov 27 30 1984 in boston |
| title_sub | proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors held as Symposium C at the Materials Research Soc. Meeting, Nov. 27 - 30, 1984 in Boston |
| topic | Gitterbaufehler (DE-588)4125030-8 gnd Getterung (DE-588)4157223-3 gnd Silicium (DE-588)4077445-4 gnd Diffusion (DE-588)4012277-3 gnd Störstelle (DE-588)4193400-3 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Gitterbaufehler Getterung Silicium Diffusion Störstelle Halbleiter Konferenzschrift 1984 Boston Mass. |
| volume_link | (DE-604)BV001899105 |
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