Ion implantation and ion beam processing of materials: symposium held Nov. 1983 in Boston, Mass., USA
Gespeichert in:
Format: | Tagungsbericht Buch |
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Sprache: | Undetermined |
Veröffentlicht: |
New York u.a.
North-Holland
1984
|
Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
27 |
Schlagworte: | |
Beschreibung: | XIX, 786 S. Ill., graph. Darst. |
ISBN: | 0444008691 |
Internformat
MARC
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300 | |a XIX, 786 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
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490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 27 | |
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Datensatz im Suchindex
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any_adam_object | |
building | Verbundindex |
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classification_rvk | UP 9350 |
classification_tum | ELT 293f FER 786f |
ctrlnum | (OCoLC)632465976 (DE-599)BVBBV009219069 |
discipline | Physik Elektrotechnik Fertigungstechnik |
format | Conference Proceeding Book |
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genre | (DE-588)1071861417 Konferenzschrift 1983 Boston Mass. gnd-content |
genre_facet | Konferenzschrift 1983 Boston Mass. |
id | DE-604.BV009219069 |
illustrated | Illustrated |
indexdate | 2024-07-09T17:33:19Z |
institution | BVB |
institution_GND | (DE-588)16133944-X |
isbn | 0444008691 |
language | Undetermined |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006128912 |
oclc_num | 632465976 |
open_access_boolean | |
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owner_facet | DE-29T DE-91 DE-BY-TUM DE-355 DE-BY-UBR |
physical | XIX, 786 S. Ill., graph. Darst. |
publishDate | 1984 |
publishDateSearch | 1984 |
publishDateSort | 1984 |
publisher | North-Holland |
record_format | marc |
series | Materials Research Society: Materials Research Society symposia proceedings |
series2 | Materials Research Society: Materials Research Society symposia proceedings |
spelling | Ion implantation and ion beam processing of materials symposium held Nov. 1983 in Boston, Mass., USA Urheber: Ion Implantation and Ion Beam Processing of Materials Symposium <03, 1983, Boston, Mass.>. Hrsg. von G. K. Hubler* New York u.a. North-Holland 1984 XIX, 786 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 27 Ionenstrahlbearbeitung (DE-588)4277034-8 gnd rswk-swf Ionenbestrahlung (DE-588)4335201-7 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Festkörper (DE-588)4016918-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1983 Boston Mass. gnd-content Ionenstrahlbearbeitung (DE-588)4277034-8 s DE-604 Ionenimplantation (DE-588)4027606-5 s Ionenbestrahlung (DE-588)4335201-7 s Festkörper (DE-588)4016918-2 s Hubler, G. K. Sonstige oth Ion Implantation and Ion Beam Processing of Materials Symposium 3 1983 Boston, Mass. Sonstige (DE-588)16133944-X oth Materials Research Society: Materials Research Society symposia proceedings 27 (DE-604)BV001899105 27 |
spellingShingle | Ion implantation and ion beam processing of materials symposium held Nov. 1983 in Boston, Mass., USA Materials Research Society: Materials Research Society symposia proceedings Ionenstrahlbearbeitung (DE-588)4277034-8 gnd Ionenbestrahlung (DE-588)4335201-7 gnd Ionenimplantation (DE-588)4027606-5 gnd Festkörper (DE-588)4016918-2 gnd |
subject_GND | (DE-588)4277034-8 (DE-588)4335201-7 (DE-588)4027606-5 (DE-588)4016918-2 (DE-588)1071861417 |
title | Ion implantation and ion beam processing of materials symposium held Nov. 1983 in Boston, Mass., USA |
title_auth | Ion implantation and ion beam processing of materials symposium held Nov. 1983 in Boston, Mass., USA |
title_exact_search | Ion implantation and ion beam processing of materials symposium held Nov. 1983 in Boston, Mass., USA |
title_full | Ion implantation and ion beam processing of materials symposium held Nov. 1983 in Boston, Mass., USA Urheber: Ion Implantation and Ion Beam Processing of Materials Symposium <03, 1983, Boston, Mass.>. Hrsg. von G. K. Hubler* |
title_fullStr | Ion implantation and ion beam processing of materials symposium held Nov. 1983 in Boston, Mass., USA Urheber: Ion Implantation and Ion Beam Processing of Materials Symposium <03, 1983, Boston, Mass.>. Hrsg. von G. K. Hubler* |
title_full_unstemmed | Ion implantation and ion beam processing of materials symposium held Nov. 1983 in Boston, Mass., USA Urheber: Ion Implantation and Ion Beam Processing of Materials Symposium <03, 1983, Boston, Mass.>. Hrsg. von G. K. Hubler* |
title_short | Ion implantation and ion beam processing of materials |
title_sort | ion implantation and ion beam processing of materials symposium held nov 1983 in boston mass usa |
title_sub | symposium held Nov. 1983 in Boston, Mass., USA |
topic | Ionenstrahlbearbeitung (DE-588)4277034-8 gnd Ionenbestrahlung (DE-588)4335201-7 gnd Ionenimplantation (DE-588)4027606-5 gnd Festkörper (DE-588)4016918-2 gnd |
topic_facet | Ionenstrahlbearbeitung Ionenbestrahlung Ionenimplantation Festkörper Konferenzschrift 1983 Boston Mass. |
volume_link | (DE-604)BV001899105 |
work_keys_str_mv | AT hublergk ionimplantationandionbeamprocessingofmaterialssymposiumheldnov1983inbostonmassusa AT ionimplantationandionbeamprocessingofmaterialssymposiumbostonmass ionimplantationandionbeamprocessingofmaterialssymposiumheldnov1983inbostonmassusa |