Electron beam interactions with solids for microscopy, microanalysis and microlithography: proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
O'Hare, IL
Scanning Electron Microscopy, Inc.
1984
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VIII, 372 S., S. IX-XII Ill., graph. Darst. |
| ISBN: | 0931288304 |
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Datensatz im Suchindex
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| adam_text | ELECTRON BEAM INTERACTIONS WITH SOLIDS FOR MICROSCOPY, MICROANALYSIS &
MICROLITHOGRAPHY PROCEEDINGS OF THE 1ST PFEFFERKORN CONFERENCE, HELD
APRIL 18 TO 23, 1982, AT THE ASILOMAR CONFERENCE CENTER, MONTEREY, CA
EDITED BY AVID F. KYSER HEINZ NIEDRIG DALE E. NEWBURY RYUICHI SHIMIZU
MANAGING EDITOR DANIEL HALIBEY PUBLISHED BY SCANNING ELECTRON
MICROSCOPY, INC. P.O. BOX 66507 AMF O HARE, IL 60666 U.S.A.
UNIVERSITATSBIBLIOTHEK HANNOVER TECHNISCHE JNFORMATIONSBIBLIOTHEK TABLE
OF CONTENTS FOREWORD III GROUP PHOTOGRAPH OF CONFERENCE ATTENDEES VI
RELATED PAPERS IN OTHER SEM VOLUMES VIII CROSS SECTIONS FOR INELASTIC
SCATTERING OF ELECTRONS BY ATOMS - SELECTED TOPICS RELATED TO ELECTRON
MICROSCOPY M. INOKUTI AND S.T. MANSON 1 INELASTIC SCATTERING OF
ELECTRONS IN SOLIDS C.J. POWELL 19 SECONDARY ELECTRON EMISSION H. SEILER
33 ELASTIC SCATTERING OF ELECTRONS BY ATOMS P. REZ 43 ANALYTICAL MODELS
IN ELECTRON BACKSCATTERING H. NIEDRIG 51 INTERACTION OF ELECTRON BEAM
WITH THE TARGET IN SCANNING ELECTRON MICROSCOPE K. KANAYA AND S. ONO 69
GAUSSIAN MODELS FOR THE ENERGY DISTRIBUTION OF EXCITATION IN SOLIDS:
APPLICATIONS TO X-RAY MICROANALYSIS AND SOLID STATE ELECTRONICS D.B.
WITTRY 99 BACKSCATTERING OF ELECTRONS FROM COMPLEX STRUCTURES M. KISZA,
Z. MATERNIA AND Z. RADZIMSKI 109 SOME APPLICATIONS OF THE ELECTRON
BACKSCATTERING DIFFUSION MODEL W. CZARCZYDSKI AND Z. RADZIMSKI 115 MONTE
CARLO CALCULATIONS FOR ELECTRON MICROSCOPY, MICROANALYSIS, AND
MICROLITHOGRAPHY D.F. KYSER 119 MODELING OF DEPTH DISTRIBUTION OF X-RAY
PRODUCTION J.D. BROWN 137 ENERGY AND ATOMIC NUMBER DEPENDENCE OF
ELECTRON DEPTH-DOSE AND LATERAL-DOSE FUNCTIONS S.P. SHEA 145 MONTE CARLO
ELECTRON TRAJECTORY CALCULATIONS OF ELECTRON INTERACTIONS IN SAMPLES
WITH SPECIAL GEOMETRIES D.E. NEWBURY AND R.L. MYKLEBUST 153 DIRECT MONTE
CARLO SIMULATION OF KV ELECTRON SCATTERING PROCESSES - N(E) SPECTRA FOR
ALUMINUM R. SHIMIZU AND S. ICHIMURA 165 MONTE CARLO CALCULATIONS ON
ELECTRON BACKSCATTERING IN AMORPHOUS OR POLYCRYSTALLINE TARGETS G. SOUM,
H. AHMED, F. ARNAL, B. JOUFFREY AND P. VERDIER _ . . 173 MONTE CARLO
CALCULATIONS ON THE SPATIAL AND ANGULAR DISTRIBUTIONS OF HIGH ENERGY
ELECTRON BEAMS IN AMORPHOUS AND POLYCRYSTALLINE FILMS J.L. BALLADORE,
J.P. MARTINEZ, J. TRINQUIER AND B. JOUFFREY 183 A TRANSPORT EQUATION
THEORY OF ELECTRON SCATTERING D.J. FATHERS AND P. REZ 193 INELASTIC AND
ELASTIC MULTIPLE SCATTERING OF FAST ELECTRONS DESCRIBED BY THE TRANSPORT
EQUATION K.E. HOFFMANN AND H. SCHMORANZER 209 ELECTRON ENERGY LOSS
MICROSPECTROSCOPY AND THE CHARACTERIZATION OF SOLIDS R. LEAPMAN 217
ELECTRON SCATTERING AND ENERGY LOSSES AS A FUNCTION OF THE INCIDENT
ENERGY: APPLICATION TO CHEMICAL ANALYSIS B. JOUFFREY 235 DETECTORS FOR
ELECTRON ENERGY SPECTROSCOPY D.C. JOY 251 THE ROLE OF THE BACKGROUND IN
AUGER ELECTRON SPECTROSCOPY H.E. BISHOP 259 ANALYTICAL SCANNING ELECTRON
MICROSCOPY FOR SURFACE SCIENCE 0. LEE-DEACON, C. LE GRESSUS AND D.
MASSIGNON 271 AN INVESTIGATION OF THE MAXIMUM SPECIMEN THICKNESS FOR
DIFFERENTIAL PHASE CONTRAST LORENTZ MICROSCOPY R.P. FERRIER, G.R.
MORRISON AND J.N. CHAPMAN 281 BACKSCATTERED ELECTRON (BSE) IMAGING IN
THE SCANNING ELECTRON MICROSCOPE (SEM) - MEASUREMENT OF SURFACE LAYER
MASS-THICKNESS O.C. WELLS, R.J. SAVOY AND P.J. BAILEY 287 ELECTRON
SIGNAL AND DETECTOR STRATEGY L. REIMER 299 MONTE CARLO SIMULATION OF
ELECTRON SCATTERING IN RESIST FILM/SUBSTRATE TARGETS K. MURATA 311 MONTE
CARLO SIMULATION OF SPATIAL RESOLUTION LIMITS IN ELECTRON BEAM
LITHOGRAPHY D.F. KYSER 331 ELECTRON BEAM INDUCED CHEMISTRY OF
LITHOGRAPHIC MATERIALS J. PACANSKY, A. GUTIERREZ AND R. KROEKER 343
REDUCTION OF ELECTRON BEAM INDUCED RADIATION DAMAGE OF ORGANIC MATERIAL
BY COOLING TO 4 K (CRYO ELECTRON MICROSCOPY) 1. DIETRICH, E. KNAPEK AND
G. LEFRANC 349 GENERATION, COLLECTION AND PROPERTIES OF AN SE-I ENRICHED
SIGNAL SUITABLE FOR HIGH RESOLUTION SEM ON BULK SPECIMENS K.-R. PETERS
363 ABOUT SEM INC. AND SEM PUBLICATIONS IX SUBJECT INDEX X AUTHOR INDEX
XII
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| illustrated | Illustrated |
| indexdate | 2024-07-09T17:33:19Z |
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| isbn | 0931288304 |
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| physical | VIII, 372 S., S. IX-XII Ill., graph. Darst. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
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| publisher | Scanning Electron Microscopy, Inc. |
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| spelling | Electron beam interactions with solids for microscopy, microanalysis and microlithography proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA Urheber: Pfefferkorn Conference <01, 1982, Monterey, Calif.>. Hrsg. von David F. Kyser* O'Hare, IL Scanning Electron Microscopy, Inc. 1984 VIII, 372 S., S. IX-XII Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Elektronenoptik (DE-588)4151879-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 Monterey Calif. gnd-content Elektronenstrahllithografie (DE-588)4151897-4 s Elektronenoptik (DE-588)4151879-2 s DE-604 Kyser, David F. Sonstige oth Pfefferkorn Conference 1 1982 Monterey, Calif. Sonstige (DE-588)816211-6 oth GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006128905&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Electron beam interactions with solids for microscopy, microanalysis and microlithography proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA Elektronenstrahllithografie (DE-588)4151897-4 gnd Elektronenoptik (DE-588)4151879-2 gnd |
| subject_GND | (DE-588)4151897-4 (DE-588)4151879-2 (DE-588)1071861417 |
| title | Electron beam interactions with solids for microscopy, microanalysis and microlithography proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA |
| title_auth | Electron beam interactions with solids for microscopy, microanalysis and microlithography proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA |
| title_exact_search | Electron beam interactions with solids for microscopy, microanalysis and microlithography proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA |
| title_full | Electron beam interactions with solids for microscopy, microanalysis and microlithography proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA Urheber: Pfefferkorn Conference <01, 1982, Monterey, Calif.>. Hrsg. von David F. Kyser* |
| title_fullStr | Electron beam interactions with solids for microscopy, microanalysis and microlithography proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA Urheber: Pfefferkorn Conference <01, 1982, Monterey, Calif.>. Hrsg. von David F. Kyser* |
| title_full_unstemmed | Electron beam interactions with solids for microscopy, microanalysis and microlithography proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA Urheber: Pfefferkorn Conference <01, 1982, Monterey, Calif.>. Hrsg. von David F. Kyser* |
| title_short | Electron beam interactions with solids for microscopy, microanalysis and microlithography |
| title_sort | electron beam interactions with solids for microscopy microanalysis and microlithography proc of the 1st pfefferkorn conference held april 18 to 23 1982 at the asilomar conference center monterey ca |
| title_sub | proc. of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA |
| topic | Elektronenstrahllithografie (DE-588)4151897-4 gnd Elektronenoptik (DE-588)4151879-2 gnd |
| topic_facet | Elektronenstrahllithografie Elektronenoptik Konferenzschrift 1982 Monterey Calif. |
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