Ion implantation and beam processing:
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Sidney u.a.
Acad. Pr.
1984
|
Schlagworte: | |
Beschreibung: | XI, 419 S. Ill., graph. Darst. |
ISBN: | 0127569804 |
Internformat
MARC
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082 | 0 | |a 621.3815/2 |2 19 | |
084 | |a UP 3000 |0 (DE-625)146369: |2 rvk | ||
245 | 1 | 0 | |a Ion implantation and beam processing |c Hrsg. von James S. Williams* |
264 | 1 | |a Sidney u.a. |b Acad. Pr. |c 1984 | |
300 | |a XI, 419 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
650 | 4 | |a Bombardement ionique | |
650 | 4 | |a Faisceaux électroniques | |
650 | 4 | |a Ions - Implantation | |
650 | 4 | |a Semiconducteurs - Dopage | |
650 | 4 | |a Electron beams | |
650 | 4 | |a Ion bombardment | |
650 | 4 | |a Ion implantation | |
650 | 4 | |a Semiconductor doping | |
650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
689 | 0 | 1 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Williams, James S. |e Sonstige |4 oth | |
999 | |a oai:aleph.bib-bvb.de:BVB01-006128475 |
Datensatz im Suchindex
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any_adam_object | |
building | Verbundindex |
bvnumber | BV009218554 |
callnumber-first | Q - Science |
callnumber-label | QC702 |
callnumber-raw | QC702.7.I55 |
callnumber-search | QC702.7.I55 |
callnumber-sort | QC 3702.7 I55 |
callnumber-subject | QC - Physics |
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ctrlnum | (OCoLC)10958087 (DE-599)BVBBV009218554 |
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dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.3815/2 |
dewey-search | 621.3815/2 |
dewey-sort | 3621.3815 12 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
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id | DE-604.BV009218554 |
illustrated | Illustrated |
indexdate | 2024-07-09T17:33:18Z |
institution | BVB |
isbn | 0127569804 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006128475 |
oclc_num | 10958087 |
open_access_boolean | |
owner | DE-29T |
owner_facet | DE-29T |
physical | XI, 419 S. Ill., graph. Darst. |
publishDate | 1984 |
publishDateSearch | 1984 |
publishDateSort | 1984 |
publisher | Acad. Pr. |
record_format | marc |
spelling | Ion implantation and beam processing Hrsg. von James S. Williams* Sidney u.a. Acad. Pr. 1984 XI, 419 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Bombardement ionique Faisceaux électroniques Ions - Implantation Semiconducteurs - Dopage Electron beams Ion bombardment Ion implantation Semiconductor doping Halbleiter (DE-588)4022993-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Williams, James S. Sonstige oth |
spellingShingle | Ion implantation and beam processing Bombardement ionique Faisceaux électroniques Ions - Implantation Semiconducteurs - Dopage Electron beams Ion bombardment Ion implantation Semiconductor doping Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
subject_GND | (DE-588)4022993-2 (DE-588)4027606-5 |
title | Ion implantation and beam processing |
title_auth | Ion implantation and beam processing |
title_exact_search | Ion implantation and beam processing |
title_full | Ion implantation and beam processing Hrsg. von James S. Williams* |
title_fullStr | Ion implantation and beam processing Hrsg. von James S. Williams* |
title_full_unstemmed | Ion implantation and beam processing Hrsg. von James S. Williams* |
title_short | Ion implantation and beam processing |
title_sort | ion implantation and beam processing |
topic | Bombardement ionique Faisceaux électroniques Ions - Implantation Semiconducteurs - Dopage Electron beams Ion bombardment Ion implantation Semiconductor doping Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
topic_facet | Bombardement ionique Faisceaux électroniques Ions - Implantation Semiconducteurs - Dopage Electron beams Ion bombardment Ion implantation Semiconductor doping Halbleiter Ionenimplantation |
work_keys_str_mv | AT williamsjamess ionimplantationandbeamprocessing |