Development of metallization systems for VLSI technology: the use of RBS and other analytical tools
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
1983
|
| Schlagworte: | |
| Beschreibung: | Uppsala, Univ., Diss. |
| Beschreibung: | 19 S. |
Internformat
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| 100 | 1 | |a Östling, Mikael |e Verfasser |4 aut | |
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Datensatz im Suchindex
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| author | Östling, Mikael |
| author_facet | Östling, Mikael |
| author_role | aut |
| author_sort | Östling, Mikael |
| author_variant | m ö mö |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-09T17:30:27Z |
| institution | BVB |
| language | English |
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| physical | 19 S. |
| publishDate | 1983 |
| publishDateSearch | 1983 |
| publishDateSort | 1983 |
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| spelling | Östling, Mikael Verfasser aut Development of metallization systems for VLSI technology the use of RBS and other analytical tools 1983 19 S. txt rdacontent n rdamedia nc rdacarrier Uppsala, Univ., Diss. Titansilicid (DE-588)4625009-8 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Titansilicid (DE-588)4625009-8 s Mikroelektronik (DE-588)4039207-7 s 1\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Östling, Mikael Development of metallization systems for VLSI technology the use of RBS and other analytical tools Titansilicid (DE-588)4625009-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4625009-8 (DE-588)4039207-7 (DE-588)4113937-9 |
| title | Development of metallization systems for VLSI technology the use of RBS and other analytical tools |
| title_auth | Development of metallization systems for VLSI technology the use of RBS and other analytical tools |
| title_exact_search | Development of metallization systems for VLSI technology the use of RBS and other analytical tools |
| title_full | Development of metallization systems for VLSI technology the use of RBS and other analytical tools |
| title_fullStr | Development of metallization systems for VLSI technology the use of RBS and other analytical tools |
| title_full_unstemmed | Development of metallization systems for VLSI technology the use of RBS and other analytical tools |
| title_short | Development of metallization systems for VLSI technology |
| title_sort | development of metallization systems for vlsi technology the use of rbs and other analytical tools |
| title_sub | the use of RBS and other analytical tools |
| topic | Titansilicid (DE-588)4625009-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Titansilicid Mikroelektronik Hochschulschrift |
| work_keys_str_mv | AT ostlingmikael developmentofmetallizationsystemsforvlsitechnologytheuseofrbsandotheranalyticaltools |