Proceedings of the Fifth International Vacuum Microelectronics Conference: 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Institute of Physics
1993
|
| Schriftenreihe: | Journal of vacuum science and technology / B
11,2 |
| Schlagworte: | |
| Beschreibung: | Stücktitelaufnahme zu e. Zeitschriftenh. |
| Beschreibung: | S. 345 - 530 graph. Darst. |
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| indexdate | 2024-07-09T17:28:33Z |
| institution | BVB |
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| language | English |
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| physical | S. 345 - 530 graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
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| publisher | American Institute of Physics |
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| series2 | Journal of vacuum science and technology / B |
| spelling | International Vacuum Microelectronics Conference 5 1992 Wien Verfasser (DE-588)3022882-7 aut Proceedings of the Fifth International Vacuum Microelectronics Conference 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria spec. ed. for the proceedings: Johannes Mitterauer New York American Institute of Physics 1993 S. 345 - 530 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 11,2 Stücktitelaufnahme zu e. Zeitschriftenh. Vakuumelektronik (DE-588)4214651-3 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1992 Wien gnd-content Vakuumelektronik (DE-588)4214651-3 s DE-604 Mikroelektronik (DE-588)4039207-7 s Mitterauer, Johannes 1936- Sonstige (DE-588)136281605 oth |
| spellingShingle | Proceedings of the Fifth International Vacuum Microelectronics Conference 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria Vakuumelektronik (DE-588)4214651-3 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4214651-3 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Proceedings of the Fifth International Vacuum Microelectronics Conference 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria |
| title_auth | Proceedings of the Fifth International Vacuum Microelectronics Conference 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria |
| title_exact_search | Proceedings of the Fifth International Vacuum Microelectronics Conference 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria |
| title_full | Proceedings of the Fifth International Vacuum Microelectronics Conference 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria spec. ed. for the proceedings: Johannes Mitterauer |
| title_fullStr | Proceedings of the Fifth International Vacuum Microelectronics Conference 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria spec. ed. for the proceedings: Johannes Mitterauer |
| title_full_unstemmed | Proceedings of the Fifth International Vacuum Microelectronics Conference 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria spec. ed. for the proceedings: Johannes Mitterauer |
| title_short | Proceedings of the Fifth International Vacuum Microelectronics Conference |
| title_sort | proceedings of the fifth international vacuum microelectronics conference 13 17 july 1992 hotel chateau wilhelminenberg vienna austria |
| title_sub | 13 - 17 July 1992, Hotel Chateau Wilhelminenberg, Vienna, Austria |
| topic | Vakuumelektronik (DE-588)4214651-3 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Vakuumelektronik Mikroelektronik Konferenzschrift 1992 Wien |
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