APA (7th ed.) Citation

Roosmalen, A. J. v., Baggerman, J. A., & Brader, S. J. (1991). Dry etching for VLSI. Plenum Press.

Chicago Style (17th ed.) Citation

Roosmalen, Alfred J. van, J. A. Baggerman, and S. J. Brader. Dry Etching for VLSI. New York u.a: Plenum Press, 1991.

MLA (9th ed.) Citation

Roosmalen, Alfred J. van, et al. Dry Etching for VLSI. Plenum Press, 1991.