Trends in ion implantation:
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Vaduz
Sci-Tech Publ.
1992
|
Schriftenreihe: | Diffusion and defect data
B, Solid state phenomena ; 27 |
Schlagworte: | |
Beschreibung: | 202 S. Ill., graph. Darst. |
Internformat
MARC
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001 | BV009005410 | ||
003 | DE-604 | ||
005 | 20110722 | ||
007 | t | ||
008 | 940206s1992 ad|| |||| 00||| eng d | ||
035 | |a (OCoLC)29372909 | ||
035 | |a (DE-599)BVBBV009005410 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
049 | |a DE-29T |a DE-91 |a DE-706 | ||
082 | 0 | |a 531.7 |b D569, D315x, v. 27, 1992 | |
084 | |a UP 9350 |0 (DE-625)146462: |2 rvk | ||
084 | |a ELT 293f |2 stub | ||
245 | 1 | 0 | |a Trends in ion implantation |c ed. Marc Van Rossum |
264 | 1 | |a Vaduz |b Sci-Tech Publ. |c 1992 | |
300 | |a 202 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Diffusion and defect data : B, Solid state phenomena |v 27 | |
650 | 4 | |a Ion implantation | |
650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
689 | 0 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Rossum, Marc van |e Sonstige |4 oth | |
830 | 0 | |a Diffusion and defect data |v B, Solid state phenomena ; 27 |w (DE-604)BV021637351 |9 27 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-005952591 |
Datensatz im Suchindex
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---|---|
any_adam_object | |
building | Verbundindex |
bvnumber | BV009005410 |
classification_rvk | UP 9350 |
classification_tum | ELT 293f |
ctrlnum | (OCoLC)29372909 (DE-599)BVBBV009005410 |
dewey-full | 531.7 |
dewey-hundreds | 500 - Natural sciences and mathematics |
dewey-ones | 531 - Classical mechanics |
dewey-raw | 531.7 |
dewey-search | 531.7 |
dewey-sort | 3531.7 |
dewey-tens | 530 - Physics |
discipline | Physik Elektrotechnik |
format | Book |
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genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
genre_facet | Aufsatzsammlung |
id | DE-604.BV009005410 |
illustrated | Illustrated |
indexdate | 2024-07-09T17:28:24Z |
institution | BVB |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005952591 |
oclc_num | 29372909 |
open_access_boolean | |
owner | DE-29T DE-91 DE-BY-TUM DE-706 |
owner_facet | DE-29T DE-91 DE-BY-TUM DE-706 |
physical | 202 S. Ill., graph. Darst. |
publishDate | 1992 |
publishDateSearch | 1992 |
publishDateSort | 1992 |
publisher | Sci-Tech Publ. |
record_format | marc |
series | Diffusion and defect data |
series2 | Diffusion and defect data : B, Solid state phenomena |
spelling | Trends in ion implantation ed. Marc Van Rossum Vaduz Sci-Tech Publ. 1992 202 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data : B, Solid state phenomena 27 Ion implantation Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Rossum, Marc van Sonstige oth Diffusion and defect data B, Solid state phenomena ; 27 (DE-604)BV021637351 27 |
spellingShingle | Trends in ion implantation Diffusion and defect data Ion implantation Ionenimplantation (DE-588)4027606-5 gnd |
subject_GND | (DE-588)4027606-5 (DE-588)4143413-4 |
title | Trends in ion implantation |
title_auth | Trends in ion implantation |
title_exact_search | Trends in ion implantation |
title_full | Trends in ion implantation ed. Marc Van Rossum |
title_fullStr | Trends in ion implantation ed. Marc Van Rossum |
title_full_unstemmed | Trends in ion implantation ed. Marc Van Rossum |
title_short | Trends in ion implantation |
title_sort | trends in ion implantation |
topic | Ion implantation Ionenimplantation (DE-588)4027606-5 gnd |
topic_facet | Ion implantation Ionenimplantation Aufsatzsammlung |
volume_link | (DE-604)BV021637351 |
work_keys_str_mv | AT rossummarcvan trendsinionimplantation |