Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York
American Institute of Physics
1992
|
| Series: | Journal of vacuum science and technology / B
10,1 |
| Subjects: | |
| Item Description: | Stücktitelaufnahme zu e. Zeitschriftenh. |
| Physical Description: | S. 286 - 549 graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV008979922 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 940206s1992 d||| |||| 10||| eng d | ||
| 035 | |a (OCoLC)311642847 | ||
| 035 | |a (DE-599)BVBBV008979922 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T |a DE-91G |a DE-384 | ||
| 111 | 2 | |a International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors |n 1 |d 1991 |c Research Triangle Park, NC |j Verfasser |0 (DE-588)3011654-5 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |b 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |c proceedings eds. Carlton M. Osburn ... |
| 264 | 1 | |a New York |b American Institute of Physics |c 1992 | |
| 300 | |a S. 286 - 549 |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science and technology / B |v 10,1 | |
| 500 | |a Stücktitelaufnahme zu e. Zeitschriftenh. | ||
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dotierung |0 (DE-588)4130672-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1991 |z Research Triangle Park NC |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Dotierung |0 (DE-588)4130672-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Osburn, Carlton M. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-005930567 | ||
Record in the Search Index
| _version_ | 1804123318692872192 |
|---|---|
| any_adam_object | |
| author_corporate | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
| author_corporate_role | aut |
| author_facet | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
| author_sort | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
| building | Verbundindex |
| bvnumber | BV008979922 |
| ctrlnum | (OCoLC)311642847 (DE-599)BVBBV008979922 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01589nam a2200349 cb4500</leader><controlfield tag="001">BV008979922</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">940206s1992 d||| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)311642847</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV008979922</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-384</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors</subfield><subfield code="n">1</subfield><subfield code="d">1991</subfield><subfield code="c">Research Triangle Park, NC</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)3011654-5</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors</subfield><subfield code="b">18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina</subfield><subfield code="c">proceedings eds. Carlton M. Osburn ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Institute of Physics</subfield><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 286 - 549</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science and technology / B</subfield><subfield code="v">10,1</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Stücktitelaufnahme zu e. Zeitschriftenh.</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dotierung</subfield><subfield code="0">(DE-588)4130672-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1991</subfield><subfield code="z">Research Triangle Park NC</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Dotierung</subfield><subfield code="0">(DE-588)4130672-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Osburn, Carlton M.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-005930567</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1991 Research Triangle Park NC gnd-content |
| genre_facet | Konferenzschrift 1991 Research Triangle Park NC |
| id | DE-604.BV008979922 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:52Z |
| institution | BVB |
| institution_GND | (DE-588)3011654-5 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005930567 |
| oclc_num | 311642847 |
| open_access_boolean | |
| owner | DE-29T DE-91G DE-BY-TUM DE-384 |
| owner_facet | DE-29T DE-91G DE-BY-TUM DE-384 |
| physical | S. 286 - 549 graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | American Institute of Physics |
| record_format | marc |
| series2 | Journal of vacuum science and technology / B |
| spelling | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors 1 1991 Research Triangle Park, NC Verfasser (DE-588)3011654-5 aut Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings eds. Carlton M. Osburn ... New York American Institute of Physics 1992 S. 286 - 549 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 10,1 Stücktitelaufnahme zu e. Zeitschriftenh. Halbleiter (DE-588)4022993-2 gnd rswk-swf Dotierung (DE-588)4130672-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 Research Triangle Park NC gnd-content Halbleiter (DE-588)4022993-2 s Dotierung (DE-588)4130672-7 s DE-604 Osburn, Carlton M. Sonstige oth |
| spellingShingle | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4130672-7 (DE-588)1071861417 |
| title | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| title_auth | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| title_exact_search | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| title_full | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings eds. Carlton M. Osburn ... |
| title_fullStr | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings eds. Carlton M. Osburn ... |
| title_full_unstemmed | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings eds. Carlton M. Osburn ... |
| title_short | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |
| title_sort | proceedings of the first international workshop on the measurement and characterization of ultra shallow doping profiles in semiconductors 18 21 march 1991 mcnc center for microelectronics research triangle park north carolina |
| title_sub | 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| topic | Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| topic_facet | Halbleiter Dotierung Konferenzschrift 1991 Research Triangle Park NC |
| work_keys_str_mv | AT internationalworkshoponthemeasurementandcharacterizationofultrashallowdopingprofilesinsemiconductorsresearchtriangleparknc proceedingsofthefirstinternationalworkshoponthemeasurementandcharacterizationofultrashallowdopingprofilesinsemiconductors1821march1991mcnccenterformicroelectronicsresearchtriangleparknorthcarolina AT osburncarltonm proceedingsofthefirstinternationalworkshoponthemeasurementandcharacterizationofultrashallowdopingprofilesinsemiconductors1821march1991mcnccenterformicroelectronicsresearchtriangleparknorthcarolina |