Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Institute of Physics
1992
|
| Schriftenreihe: | Journal of vacuum science and technology / B
10,1 |
| Schlagworte: | |
| Beschreibung: | Stücktitelaufnahme zu e. Zeitschriftenh. |
| Beschreibung: | S. 286 - 549 graph. Darst. |
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| 245 | 1 | 0 | |a Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |b 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |c proceedings eds. Carlton M. Osburn ... |
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Datensatz im Suchindex
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| id | DE-604.BV008979922 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:52Z |
| institution | BVB |
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| language | English |
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| physical | S. 286 - 549 graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
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| publisher | American Institute of Physics |
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| series2 | Journal of vacuum science and technology / B |
| spelling | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors 1 1991 Research Triangle Park, NC Verfasser (DE-588)3011654-5 aut Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings eds. Carlton M. Osburn ... New York American Institute of Physics 1992 S. 286 - 549 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 10,1 Stücktitelaufnahme zu e. Zeitschriftenh. Halbleiter (DE-588)4022993-2 gnd rswk-swf Dotierung (DE-588)4130672-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 Research Triangle Park NC gnd-content Halbleiter (DE-588)4022993-2 s Dotierung (DE-588)4130672-7 s DE-604 Osburn, Carlton M. Sonstige oth |
| spellingShingle | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4130672-7 (DE-588)1071861417 |
| title | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| title_auth | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| title_exact_search | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| title_full | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings eds. Carlton M. Osburn ... |
| title_fullStr | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings eds. Carlton M. Osburn ... |
| title_full_unstemmed | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings eds. Carlton M. Osburn ... |
| title_short | Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |
| title_sort | proceedings of the first international workshop on the measurement and characterization of ultra shallow doping profiles in semiconductors 18 21 march 1991 mcnc center for microelectronics research triangle park north carolina |
| title_sub | 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| topic | Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| topic_facet | Halbleiter Dotierung Konferenzschrift 1991 Research Triangle Park NC |
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