APA (7th ed.) Citation

International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. (1992). Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina. American Institute of Physics.

Chicago Style (17th ed.) Citation

International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina. New York: American Institute of Physics, 1992.

MLA (9th ed.) Citation

International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. Proceedings of the First International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 18 - 21 March 1991, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina. American Institute of Physics, 1992.