Reduced thermal processing for ULSI: [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
New York u.a.
Plenum Press
1989
|
| Series: | NATO
NATO ASI series / B ; 207 |
| Subjects: | |
| Physical Description: | XI, 438 S. Ill., graph. Darst. |
| ISBN: | 0306433826 |
Staff View
MARC
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| 245 | 1 | 0 | |a Reduced thermal processing for ULSI |b [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |c ed. by Roland A. Levy |
| 264 | 1 | |a New York u.a. |b Plenum Press |c 1989 | |
| 300 | |a XI, 438 S. |b Ill., graph. Darst. | ||
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Record in the Search Index
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| dewey-raw | 621.395 |
| dewey-search | 621.395 |
| dewey-sort | 3621.395 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1988 Boca Raton Fla. gnd-content |
| genre_facet | Konferenzschrift 1988 Boca Raton Fla. |
| id | DE-604.BV008978452 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:51Z |
| institution | BVB |
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| isbn | 0306433826 |
| language | English |
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| physical | XI, 438 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Plenum Press |
| record_format | marc |
| series | NATO |
| series2 | NATO : NATO ASI series / B |
| spelling | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy New York u.a. Plenum Press 1989 XI, 438 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier NATO : NATO ASI series / B 207 Thermische Belastung (DE-588)4059816-0 gnd rswk-swf Wärmebehandlung (DE-588)4064180-6 gnd rswk-swf ULSI (DE-588)4226286-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Boca Raton Fla. gnd-content Wärmebehandlung (DE-588)4064180-6 s ULSI (DE-588)4226286-0 s DE-604 Thermische Belastung (DE-588)4059816-0 s 1\p DE-604 Levy, Roland A. Sonstige oth Advanced Study Institute on Reduced Thermal Processing for ULSI 1988 Boca Raton, Fla. Sonstige (DE-588)5013870-4 oth NATO NATO ASI series / B ; 207 (DE-604)BV005876464 207 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] NATO Thermische Belastung (DE-588)4059816-0 gnd Wärmebehandlung (DE-588)4064180-6 gnd ULSI (DE-588)4226286-0 gnd |
| subject_GND | (DE-588)4059816-0 (DE-588)4064180-6 (DE-588)4226286-0 (DE-588)1071861417 |
| title | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| title_auth | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| title_exact_search | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| title_full | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy |
| title_fullStr | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy |
| title_full_unstemmed | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy |
| title_short | Reduced thermal processing for ULSI |
| title_sort | reduced thermal processing for ulsi proceedings of a nato advanced study institute on reduced thermal processing for ulsi held june 20 july 1 1988 in boca raton florida |
| title_sub | [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| topic | Thermische Belastung (DE-588)4059816-0 gnd Wärmebehandlung (DE-588)4064180-6 gnd ULSI (DE-588)4226286-0 gnd |
| topic_facet | Thermische Belastung Wärmebehandlung ULSI Konferenzschrift 1988 Boca Raton Fla. |
| volume_link | (DE-604)BV005876464 |
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