Reduced thermal processing for ULSI: [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York u.a.
Plenum Press
1989
|
| Schriftenreihe: | NATO
NATO ASI series / B ; 207 |
| Schlagworte: | |
| Beschreibung: | XI, 438 S. Ill., graph. Darst. |
| ISBN: | 0306433826 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV008978452 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 940206s1989 ad|| |||| 10||| eng d | ||
| 020 | |a 0306433826 |9 0-306-43382-6 | ||
| 035 | |a (OCoLC)255987000 | ||
| 035 | |a (DE-599)BVBBV008978452 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.395 | |
| 084 | |a UX 2350 |0 (DE-625)146952: |2 rvk | ||
| 084 | |a ZN 4950 |0 (DE-625)157424: |2 rvk | ||
| 245 | 1 | 0 | |a Reduced thermal processing for ULSI |b [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |c ed. by Roland A. Levy |
| 264 | 1 | |a New York u.a. |b Plenum Press |c 1989 | |
| 300 | |a XI, 438 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a NATO : NATO ASI series / B |v 207 | |
| 650 | 0 | 7 | |a Thermische Belastung |0 (DE-588)4059816-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Wärmebehandlung |0 (DE-588)4064180-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a ULSI |0 (DE-588)4226286-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1988 |z Boca Raton Fla. |2 gnd-content | |
| 689 | 0 | 0 | |a Wärmebehandlung |0 (DE-588)4064180-6 |D s |
| 689 | 0 | 1 | |a ULSI |0 (DE-588)4226286-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a ULSI |0 (DE-588)4226286-0 |D s |
| 689 | 1 | 1 | |a Thermische Belastung |0 (DE-588)4059816-0 |D s |
| 689 | 1 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Levy, Roland A. |e Sonstige |4 oth | |
| 711 | 2 | |a Advanced Study Institute on Reduced Thermal Processing for ULSI |d 1988 |c Boca Raton, Fla. |j Sonstige |0 (DE-588)5013870-4 |4 oth | |
| 830 | 0 | |a NATO |v NATO ASI series / B ; 207 |w (DE-604)BV005876464 |9 207 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-005929319 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804123317164048384 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV008978452 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UX 2350 ZN 4950 |
| ctrlnum | (OCoLC)255987000 (DE-599)BVBBV008978452 |
| dewey-full | 621.395 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.395 |
| dewey-search | 621.395 |
| dewey-sort | 3621.395 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01884nam a2200469 cb4500</leader><controlfield tag="001">BV008978452</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">940206s1989 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0306433826</subfield><subfield code="9">0-306-43382-6</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)255987000</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV008978452</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.395</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UX 2350</subfield><subfield code="0">(DE-625)146952:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4950</subfield><subfield code="0">(DE-625)157424:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Reduced thermal processing for ULSI</subfield><subfield code="b">[proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]</subfield><subfield code="c">ed. by Roland A. Levy</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York u.a.</subfield><subfield code="b">Plenum Press</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 438 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">NATO : NATO ASI series / B</subfield><subfield code="v">207</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Thermische Belastung</subfield><subfield code="0">(DE-588)4059816-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Wärmebehandlung</subfield><subfield code="0">(DE-588)4064180-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1988</subfield><subfield code="z">Boca Raton Fla.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Wärmebehandlung</subfield><subfield code="0">(DE-588)4064180-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Thermische Belastung</subfield><subfield code="0">(DE-588)4059816-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Levy, Roland A.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">Advanced Study Institute on Reduced Thermal Processing for ULSI</subfield><subfield code="d">1988</subfield><subfield code="c">Boca Raton, Fla.</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)5013870-4</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">NATO</subfield><subfield code="v">NATO ASI series / B ; 207</subfield><subfield code="w">(DE-604)BV005876464</subfield><subfield code="9">207</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-005929319</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1988 Boca Raton Fla. gnd-content |
| genre_facet | Konferenzschrift 1988 Boca Raton Fla. |
| id | DE-604.BV008978452 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:51Z |
| institution | BVB |
| institution_GND | (DE-588)5013870-4 |
| isbn | 0306433826 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005929319 |
| oclc_num | 255987000 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | XI, 438 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Plenum Press |
| record_format | marc |
| series | NATO |
| series2 | NATO : NATO ASI series / B |
| spelling | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy New York u.a. Plenum Press 1989 XI, 438 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier NATO : NATO ASI series / B 207 Thermische Belastung (DE-588)4059816-0 gnd rswk-swf Wärmebehandlung (DE-588)4064180-6 gnd rswk-swf ULSI (DE-588)4226286-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Boca Raton Fla. gnd-content Wärmebehandlung (DE-588)4064180-6 s ULSI (DE-588)4226286-0 s DE-604 Thermische Belastung (DE-588)4059816-0 s 1\p DE-604 Levy, Roland A. Sonstige oth Advanced Study Institute on Reduced Thermal Processing for ULSI 1988 Boca Raton, Fla. Sonstige (DE-588)5013870-4 oth NATO NATO ASI series / B ; 207 (DE-604)BV005876464 207 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] NATO Thermische Belastung (DE-588)4059816-0 gnd Wärmebehandlung (DE-588)4064180-6 gnd ULSI (DE-588)4226286-0 gnd |
| subject_GND | (DE-588)4059816-0 (DE-588)4064180-6 (DE-588)4226286-0 (DE-588)1071861417 |
| title | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| title_auth | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| title_exact_search | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| title_full | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy |
| title_fullStr | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy |
| title_full_unstemmed | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy |
| title_short | Reduced thermal processing for ULSI |
| title_sort | reduced thermal processing for ulsi proceedings of a nato advanced study institute on reduced thermal processing for ulsi held june 20 july 1 1988 in boca raton florida |
| title_sub | [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| topic | Thermische Belastung (DE-588)4059816-0 gnd Wärmebehandlung (DE-588)4064180-6 gnd ULSI (DE-588)4226286-0 gnd |
| topic_facet | Thermische Belastung Wärmebehandlung ULSI Konferenzschrift 1988 Boca Raton Fla. |
| volume_link | (DE-604)BV005876464 |
| work_keys_str_mv | AT levyrolanda reducedthermalprocessingforulsiproceedingsofanatoadvancedstudyinstituteonreducedthermalprocessingforulsiheldjune20july11988inbocaratonflorida AT advancedstudyinstituteonreducedthermalprocessingforulsibocaratonfla reducedthermalprocessingforulsiproceedingsofanatoadvancedstudyinstituteonreducedthermalprocessingforulsiheldjune20july11988inbocaratonflorida |