APA (7th ed.) Citation

(1989). Reduced thermal processing for ULSI: [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]. Plenum Press.

Chicago Style (17th ed.) Citation

Reduced Thermal Processing for ULSI: [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI Held June 20 - July 1, 1988, in Boca Raton, Florida]. New York u.a: Plenum Press, 1989.

MLA (9th ed.) Citation

Reduced Thermal Processing for ULSI: [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI Held June 20 - July 1, 1988, in Boca Raton, Florida]. Plenum Press, 1989.