Electron microscopy and analysis:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
London [u.a.]
Taylor & Francis
1988
|
| Ausgabe: | 2. ed. |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VIII, 232 S. Ill., graph. Darst. |
| ISBN: | 0850664152 0850664144 |
Internformat
MARC
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| 100 | 1 | |a Goodhew, Peter J. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Electron microscopy and analysis |c P. J. Goodhew and F. J. Humphreys |
| 250 | |a 2. ed. | ||
| 264 | 1 | |a London [u.a.] |b Taylor & Francis |c 1988 | |
| 300 | |a VIII, 232 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 7 | |a Microscopia eletronica |2 larpcal | |
| 650 | 4 | |a Microscopie électronique | |
| 650 | 2 | |a Microscopie électronique | |
| 650 | 4 | |a Electron microscopy | |
| 650 | 0 | 7 | |a Elektronenmikroskopie |0 (DE-588)4014327-2 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Elektronenmikroskopie |0 (DE-588)4014327-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Humphreys, John F. |e Verfasser |4 aut | |
| 856 | 4 | 2 | |m HBZ Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005917231&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-005917231 | ||
Datensatz im Suchindex
| _version_ | 1804123299868835840 |
|---|---|
| adam_text | Contents
Preface.............. ix
Abbreviations............. xi
Chapter 1. MICROSCOPY WITH LIGHT AND ELECTRONS 1
1.1. Introduction......... 1
1.2. Methods of image formation...... 2
1.3. Pixels........... 3
1.4. The light-optical microscope...... 4
1.5. Magnification......... 7
1.6. Resolution......... 9
1.7. Depth of field and depth of focus .... 12
1.8. Aberrations in optical systems..... 14
1.9. Electrons versus light....... 17
Chapter 2. ELECTRONS AND THEIR INTERACTION WITH
THE SPECIMEN........ 20
2.1. Introduction......... 20
2.2. Electrons.......... 20
2.3. Generating a beam of electrons..... 23
2.4. Deflection of electrons - magnetic lenses ... 27
2.5. The scattering of electrons by atoms .... 29
2.6. Elastic scattering........ 30
2.7. Inelastic scattering........ 30
2.7.1. Phonon scattering...... 31
2.7.2. Plasmon scattering...... 31
2.7.3. Single valence electron excitation ... 31
2.7.4. Inner shell excitation...... 32
2.7.5. Inelastic scattering and absorption ... 32
2.8. Secondary effects........ 33
2.8.1. Secondary electrons...... 34
2.8.2. Backscattered electrons..... 35
2.8.3. Relaxation of excited atoms .... 35
2.9. The family of electron microscopes .... 38
vi Contents
Chapter 3. ELECTRON DIFFRACTION..... 39
3.1. The geometry of electron diffraction .... 40
3.1.1. Bragg diffraction...... 40
3.1.2. Diffraction in the TEM..... 43
3.2. Diffraction spot patterns...... 44
3.2.1. Analysing a polycrystalline diffraction pattern 46
3.2.2. Analysing a single crystal pattern ... 47
3.3. Use of the reciprocal lattice in diffraction analysis 48
3.3.1. The Ewald sphere construction ... 50
3.3.2. Diffraction from a finite crystal ... 51
3.4. Other types of diffraction pattern..... 56
3.4.1. Kikuchi line patterns...... 56
3.4.2. Convergent beam electron diffraction . . 61
Chapters THE TRANSMISSION ELECTRON MICROSCOPE 64
4.1. The instrument......... 64
4.1.1. The electron gun...... 64
4.1.2. The condenser system..... 66
4.1.3. The specimen chamber..... 67
4.1.4. The objective and intermediate lenses . . 68
4.1.5. The projector system - images. ... 71
4.1.6. The projector system - diffraction patterns 71
4.1.7. Alignment........ 72
4.2. Contrast mechanisms....... 73
4.2.1. Mass-thickness contrast..... 73
4.2.2. Diffraction contrast - kinematical ... 76
4.2.3. Diffraction contrast - dynamical ... 80
4.2.4. Phase contrast....... 94
4.3. High voltage electron microscopy (HVEM) . . 97
4.4. Scanning transmission electron microscopy (STEM) 98
4.5. Preparation of specimens for TEM .... 99
4.5.1. Electropolishing and chemical polishing . 99
4.5.2. Ion and atom milling..... 101
4.5.3. Ultramicrotomy....... 102
4.5.4. Replication........ 103
4.6. Analysis.......... 105
Chapters. THE SCANNING ELECTRON MICROSCOPE . 106
5.1. How it works......... 106
5.2. Obtaining a signal in the SEM..... 109
5.2.1. Detecting secondary electrons . ... 112
Contents vii
5.2.2. Detecting backscattered electrons ... 113
5.3. The optics of the SEM....... 115
5.4. The performance of the SEM..... 117
5.4.1. Pixels......... 117
5.4.2. Depth of field....... 119
5.5. The ultimate resolution of the SEM . . . . 119
5.5.1. The minimum attainable probe size . . 121
5.5.2. The minimum usable beam current . . 122
5.5.3. High-performance microscopes . . . 124
5.6. Topographic images....... 125
5.7. Compositional images....... 131
5.8. Crystallographic information from the SEM . . 134
5.8.1. Channelling contrast...... 134
5.8.2. Diffraction patterns...... 135
5.9. The use of other signals in the SEM .... 137
5.9.1. The charge collection mode .... 137
5.9.2. Cathodoluminescence..... 139
5.9.3. Use of other signals and contrast modes . 141
5.10. Image acquisition, processing and storage . . . 143
5.10.1. On-line processing...... 144
5.10.2. Scan rates and data storage .... 147
5.10.3. Digital image storage..... 148
5.10.4. Processing stored images .... 149
5.10.5. The digital SEM...... 149
5.11. The preparation of specimens for examination in the
SEM........... 149
ChapterG. CHEMICAL ANALYSIS IN THE ELECTRON
MICROSCOPE......... 154
6.1. The generation of X-rays within a specimen . . 155
6.2. Detection and counting of X-rays .... 160
6.2.1. Energy dispersive analysis . . . . 160
6.2.2. Wavelength-dispersive analysis . . . 166
6.3. X-ray analysis of bulk specimens..... 169
6.3.1. Instrumentation....... 169
6.3.2. The presentation of analytical information . 171
6.3.3. Practical problems of qualitative analysis . 179
6.4. X-ray analysis of thin specimens..... 180
6.5. Quantitative analysis in an electron microscope . 184
6.5.1. The limit of detectability..... 186
6.5.2. Quantitative analysis of bulk specimens. . 187
6.5.3. Quantitative analysis of thin specimens. . 191
6.6. Electron energy loss spectroscopy (EELS) ... 192
Contents
6.6.1. The spectrometer...... 192
6.6.2. The spectrum - qualitative analysis . . 194
6.6.3. Quantitative analysis...... 196
6.6.4. Extra information from EEL spectra . . 197
6.7. A brief comparison of techniques..... 198
Chapter 7. ELECTRON MICROSCOPY AND OTHER
TECHNIQUES......... 199
7.1. Advances in electron microscopy..... 199
7.1.1. Imaging techniques...... 199
- Scanning transmission electron microscopy
(STEM).......... 199
- Microscopy of surfaces...... 201
- Future possibilities....... 203
7.1.2. Analysis techniques...... 205
- Energy loss spectrometry...... 205
- X-ray fluorescence in the SEM..... 205
- Scanning Auger microscopy..... 206
7.1.3. Diffraction techniques..... 206
7.2. Alternative imaging systems...... 207
- Field ion microscopy....... 208
- Scanning acoustic microscopy..... 209
- Scanning tunnelling microscopy . . . . 211
- Scanning optical microscopy..... 213
- X-ray microscopy........ 215
- Imaging techniques compared..... 215
7.3. Alternative analysis systems...... 215
- Surface analysis........ 217
- Ion beam analysis....... 218
- Laser-based analysis....... 220
- Atom probe field ion microscopy (APFIM) . . 220
- Analysis techniques compared..... 220
Further reading............ 222
Index.............. 225
|
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| discipline | Allgemeine Naturwissenschaft Physik |
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| id | DE-604.BV008964274 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:34Z |
| institution | BVB |
| isbn | 0850664152 0850664144 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005917231 |
| oclc_num | 16708603 |
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| owner | DE-19 DE-BY-UBM DE-634 DE-11 DE-188 |
| owner_facet | DE-19 DE-BY-UBM DE-634 DE-11 DE-188 |
| physical | VIII, 232 S. Ill., graph. Darst. |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| publisher | Taylor & Francis |
| record_format | marc |
| spelling | Goodhew, Peter J. Verfasser aut Electron microscopy and analysis P. J. Goodhew and F. J. Humphreys 2. ed. London [u.a.] Taylor & Francis 1988 VIII, 232 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microscopia eletronica larpcal Microscopie électronique Electron microscopy Elektronenmikroskopie (DE-588)4014327-2 gnd rswk-swf Elektronenmikroskopie (DE-588)4014327-2 s DE-604 Humphreys, John F. Verfasser aut HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005917231&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Goodhew, Peter J. Humphreys, John F. Electron microscopy and analysis Microscopia eletronica larpcal Microscopie électronique Electron microscopy Elektronenmikroskopie (DE-588)4014327-2 gnd |
| subject_GND | (DE-588)4014327-2 |
| title | Electron microscopy and analysis |
| title_auth | Electron microscopy and analysis |
| title_exact_search | Electron microscopy and analysis |
| title_full | Electron microscopy and analysis P. J. Goodhew and F. J. Humphreys |
| title_fullStr | Electron microscopy and analysis P. J. Goodhew and F. J. Humphreys |
| title_full_unstemmed | Electron microscopy and analysis P. J. Goodhew and F. J. Humphreys |
| title_short | Electron microscopy and analysis |
| title_sort | electron microscopy and analysis |
| topic | Microscopia eletronica larpcal Microscopie électronique Electron microscopy Elektronenmikroskopie (DE-588)4014327-2 gnd |
| topic_facet | Microscopia eletronica Microscopie électronique Electron microscopy Elektronenmikroskopie |
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