Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen:
Saved in:
| Main Author: | |
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| Format: | Microfilm Book |
| Language: | Undetermined |
| Published: |
1992
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| Subjects: | |
| Item Description: | Rostock, Univ., Diss., 1992. - Mikroreprod. eines Ms. 139 S. : Ill., graph. Darst. |
| Physical Description: | 2 Mikrofiches; 24x |
Staff View
MARC
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| 245 | 1 | 0 | |a Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen |c von Arne Bender |
| 264 | 1 | |c 1992 | |
| 300 | |a 2 Mikrofiches; 24x | ||
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| 337 | |b h |2 rdamedia | ||
| 338 | |b he |2 rdacarrier | ||
| 500 | |a Rostock, Univ., Diss., 1992. - Mikroreprod. eines Ms. 139 S. : Ill., graph. Darst. | ||
| 650 | 0 | 7 | |a Siliciumdioxid |0 (DE-588)4077447-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Aluminiumoxide |0 (DE-588)4001590-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroform |0 (DE-588)4039216-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
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| 689 | 0 | 1 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
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| 689 | 0 | 3 | |a Mikroform |0 (DE-588)4039216-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Siliciumdioxid |0 (DE-588)4077447-8 |D s |
| 689 | 1 | 1 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
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Record in the Search Index
| _version_ | 1804122771501875200 |
|---|---|
| any_adam_object | |
| author | Bender, Arne |
| author_facet | Bender, Arne |
| author_role | aut |
| author_sort | Bender, Arne |
| author_variant | a b ab |
| building | Verbundindex |
| bvnumber | BV008402652 |
| classification_tum | PHY 803d PHY 762d |
| ctrlnum | (OCoLC)257347094 (DE-599)BVBBV008402652 |
| discipline | Physik |
| format | Microfilm Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV008402652 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T17:19:10Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005536294 |
| oclc_num | 257347094 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-29T |
| owner_facet | DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-29T |
| physical | 2 Mikrofiches; 24x |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| record_format | marc |
| spelling | Bender, Arne Verfasser aut Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen von Arne Bender 1992 2 Mikrofiches; 24x txt rdacontent h rdamedia he rdacarrier Rostock, Univ., Diss., 1992. - Mikroreprod. eines Ms. 139 S. : Ill., graph. Darst. Siliciumdioxid (DE-588)4077447-8 gnd rswk-swf Aluminiumoxide (DE-588)4001590-7 gnd rswk-swf Mikroform (DE-588)4039216-8 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Aluminiumoxide (DE-588)4001590-7 s Dünne Schicht (DE-588)4136925-7 s Sputtern (DE-588)4182614-0 s Mikroform (DE-588)4039216-8 s DE-604 Siliciumdioxid (DE-588)4077447-8 s |
| spellingShingle | Bender, Arne Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen Siliciumdioxid (DE-588)4077447-8 gnd Aluminiumoxide (DE-588)4001590-7 gnd Mikroform (DE-588)4039216-8 gnd Dünne Schicht (DE-588)4136925-7 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4077447-8 (DE-588)4001590-7 (DE-588)4039216-8 (DE-588)4136925-7 (DE-588)4182614-0 (DE-588)4113937-9 |
| title | Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen |
| title_auth | Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen |
| title_exact_search | Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen |
| title_full | Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen von Arne Bender |
| title_fullStr | Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen von Arne Bender |
| title_full_unstemmed | Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen von Arne Bender |
| title_short | Strukturuntersuchungen mit Korrelation zu den Abscheidebedingungen an gesputterten Al 2 O 3 - und SiO 2 -Dünnfilmen |
| title_sort | strukturuntersuchungen mit korrelation zu den abscheidebedingungen an gesputterten al 2 o 3 und sio 2 dunnfilmen |
| topic | Siliciumdioxid (DE-588)4077447-8 gnd Aluminiumoxide (DE-588)4001590-7 gnd Mikroform (DE-588)4039216-8 gnd Dünne Schicht (DE-588)4136925-7 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Siliciumdioxid Aluminiumoxide Mikroform Dünne Schicht Sputtern Hochschulschrift |
| work_keys_str_mv | AT benderarne strukturuntersuchungenmitkorrelationzudenabscheidebedingungenangesputtertenal2o3undsio2dunnfilmen |