Proceedings of the Second International Symposium on Diamond Materials:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pennington, NJ
1991
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| Schriftenreihe: | Electrochemical Society: Proceedings
91,8 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XV, 670 S. Ill., graph. Darst. |
Internformat
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| 245 | 1 | 0 | |a Proceedings of the Second International Symposium on Diamond Materials |c ed. by A. J. Purdes ... |
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| adam_text | IMAGE 1
PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON
DIAMOND MATERIALS
EDITED BY
A. J. PURDES
TEXAS INSTRUMENTS INC.
DALLAS, TEXAS
J. C. ANGUS CASE WESTERN RESERVE UNIVERSITY CLEVELAND, OHIO
R. F. DAVIS
NORTH CAROLINA STATE UNIVERSITY RALEIGH, NORTH CAROLINA
B. M. MEYERSON IBM T. J. WATSON RESEARCH CENTER YORKTOWN HEIGHTS, NEW
YORK
K. E. SPEAR
PENNSYLVANIA STATE UNIVERSITY UNIVERSITY PARK, PENNSYLVANIA
M. YODER OFFICE OF NAVAL RESEARCH
ARLINGTON, VIRGINIA
UB/TIB HANNOVER 89 120 908 093
UN!VERS?TATSDIRLIOTHB
TF.CHNJSCHE
.JJJPOJMATIONBBIBLIOTHEK
DIELECTRIC SCIENCEAND TECHNOLOGY, ELECTRONICS, AND HIGH TEMPERATURE
MATERIALS DIVISIONS
PROCEEDINGS VOLUME 91-8
THE ELECTROCHEMICAL SOCIETY, INC., 10 SOUTH MAIN ST., PENNINGTON, NJ
08534-2896
IMAGE 2
CONTENTS
PAGE
PREFACE
III
PART I: SYNTHESIS
* DIAMOND GROWTH WITH THERMAL ACTIVATION OF 3
CARBON-HYDROGEN-HALOGENSYSTEMSANDGROWTH ENHANCEMENT WITHTHEADDITION
OFOXYGEN D. PATTERSON, C.J, CHU, B.J. BAI, Z.L. XIAO, N.J. KOMPLIN, R.H.
HAUGE, & J. L. MARGRAVE
F2-CH4 AND H2-CF4 GAS INTERACTIONS ACROSSA HEATED 12 GRAPHITE ELEMENT R.
A. RUDDER, R.E. THOMAS, G.C. HUDSON, M.J. MANTINI & R.J. MARKUNAS
* DIAMOND SYNTHESIZED BYTHEMICROWAVEPLASMACVD 20 METHOD M. KAMO & Y.
SATO
ALTERNATING CHEMISTRY SYNTHESIS OFDIAMOND 31 K.V. RAVI
SYNTHESIS OF DIAMOND FILMS WTTHPULSEDPLASMAS 39 M. AKLUFI & D. BROCK
MBSHMEATION OF INFRARED ABSORPTIONOFFLAME 49 DEPOSITED DIAMOND FILMS BY
SEQUENTIALDEPOSITION AND ETCHING PROCESSES Y. TZENG & R. PHILLIPS
PARAMETRIC STUDYOFDIAMOND FILM DEPOSITIONIN A 57 RADIO-FREQUENCY
THERMALPLASMA C. LI, Y.C. LAU, & S.L. GIRSHICK
LASERPLASMA DEPOSITION OFDIAMONDLIKE CARBON 65 FILMS IN
VACUUMANDHYDROGEN AMBJJENTS A. RENGAN, J.L. PARK, J. NARAYAN, & J. HUNN
HFCVDOFDIAMONDON COPPER SUBSTRATE 73
X.K. CHEN, G. MATERA, S. PRAMANICK, & J. NARAYAN
HIGH RATE HOMOEPJTAXIALSYNTHESIS OFDIAMOND 81 INAFLAME K.A. SNAIL, J.A.
FREITAS, C.L. VOID, & L.M. HANSSEN
INVITED PAPER
VII
IMAGE 3
GROWTH OFHIGH QUALITY DIAMOND FILMS IN A 91
TURBULENT FLAME K.A. SNAIL, C.J CRAIGIE, R.G. VARDIMAN, CM. MARKS, &
J.A. FREITAS, JR.
HIGH RATEHOMOEPITAXIALGROWTH OFDIAMOND IN 99 THERMALPLASMA Z.P. LU, K.
SNAIL, C. MARKS, J. HEBERLEIN, & E. PFENDER
EFFECTS OFPROCESS PARAMETERS ONCHEMICALVAPOR 107 DEPOSITION OF DIAMOND
IN THERMALPLASMAS Z.P. LU, L. STACHOWICZ, J. HEBERLEIN, & E. PFENDER
HIGH RATE DEPOSITION OF DIAMONDUSING LIQUID 115 ORGANIC PRECURSORS IN
ATMOSPHERICPLASMAS Q.Y. HAN, T.W. OR, Z.P. LU, J. HEBERLEIN, & E.
PFENDER
PART II: GROWTH MECHANISMS
* NUCLEATIONANDGROWTH PROCESSES IN CHEMICAL 125 VAPOR DEPOSITION
OFDIAMOND J.C. ANGUS, Z. LI, M. SUNKARA, R. GAT, A.B. ANDERSON, S.P.
MEHANDRU, & M.W. GEIS
* MOLECULAR PROCESSES IN DIAMONDFORMATION 142
M. FRENKLACH
* MOLECULARBEAM EPITAXY OFDIAMOND WTTHCARBON 154 ATOMS *D: A THEORETICAL
EXPERIMENTBASEDON QUANTUM CHEMISTRY M. TSUDA, S. OIKAWA, C. SEKINE, & S.
FURUKAWA
GROWTHFROMACETYLENEONTHEDIAMOND (110) 170 SURFACE D.N. BELTON & S. J.
HARRIS
NEGATIVE ION MASS SPECTROMETRY IN AFILAMENT 181 ASSISTED CVD
DIAMONDGROWTHAPARATUS P.A. SULLIVAN, P.P. DOTY, J.W. BORING, W.A.
JESSER, & R.A. BARAGIOLA
THERMAL DESORPTION FROMHYDROGENATEDDIAMOND 186 (100) SURFACES R.E.
THOMAS, R.A. RUDDER, & R.J. MARKUNAS
INVITED PAPER
VIII
IMAGE 4
GAS PHASECHEMISTRY INDIAMOND-DEPOSITING 194 DC-ARC-JET G.P. SMITH & J.B.
JEFFRIES
OBSERVATION OF OH RADICALS IN A FILAMENT-ASSISTED 202
DIAMONDGROWTHENVIRONMENT U.E. MEIER, L.E. HUNZIKER, D.R. CROSLEY, & J.B.
JEFFRIES
ACETYLENE PRODUCTIONIN ADIAMOND-PRODUCINGLOW 209 PRESSURE RF-PLASMA
ASSISTED CHEMICALVAPOR DEPOSMONENVIRONMENT R.A. RUDDER, G.C. HUDSON, J.
B. POSTHILL, R.E. THOMAS,
R. J. MARKUNAS, R.J. NEMANICH,Y.M, LEGRICE & T.P. HUMPHREYS
QUANTTNVE ANALYSIS OF THE GASEOUS COMPOSITION 217 DURING
FILAMENT-ASSISTED DIAMOND GROWTH W.L. HSU
* TEXTUREDGROWTHANDTWINNING INPOLYCRYSTALLINE 224 CVDDIAMOND FILMS C.
WILD, P. KOIDL, N. HERRES, W. MULLER-SEBERT, & T. ECKERMANN
AGGREGATE PROCESS MODELOFDIAMOND FILM GROWTH 240 A.K. MILLER&K.V.RAVI
THEEFFECT OF GAS-PHASERESIDENCETIME ON 249
MICROWAVE PLASMA DIAMONDCVD F. G. CELII, D. WHITE, JR., & A.J. PURDES
INVESTIGATIONSOF NUCLEATIONANDCRYSTALGROWTH 258 OFCVDDIAMOND USINGTHE
SENTAXYTECHNIQUE H, YAGYU, J. S. MA, H. KAWARADA, T. YONEHARA, & A.
HIRAKI
DIAMONDON SILICON: AHOTFILAMENTCVD STUDY OF 266 NUCLEATION P. ASCARELLI,
S. FONTANA, E. MOLINARI, R. POLINI, M.L. TERRANOVA, & E. CAPPELLI
SUBSTRATE EFFECTS ANDTHEGROWTHOF 274
HOMOEPJTAXIAL DIAMOND (100) LAYERS USING LOW PRESSURE IF
PLASMA-ENHANCEDCHEMICALVAPOR DEPOSITION J.B. POSTHILL, R. A. RUDDEI,
G.C. HUDSON, D.P. MALTA,
G.G FOUNTAIN, R.E. THOMAS, R.J. MARKUNAS, T.P. HUMPHREYS, R.J. NEMANICH
& D.R. BLACK
INVITED PAPER
IX
IMAGE 5
INVESTIGATION OFLOWPRESSUREDIAMOND GROWTHBY 282 ELASTIC SCATTERING OF
LIGHT ANDREFLECTANCE SPECTROSCOPY A.M. BONNOT, T. LOPEZ-RIOS, B. MATHIS
& J. LEROY
CHARACTERIZATION OFDCPLASMAS FOR THECONTROL 290 OFDIAMOND DEPOSITION
L.S. PIANO, D.A. STEVENSON, & J.R. CARRUTHERS
PART HI: DIAMOND FILM PROPERTIES
* STRUCTURE-PROPERTYRELATIONSHIPS AND 301
APPLICATIONS OFDIAMOND FILMS K.V. RAVI
* NUCLEATIONANDGROWTH OF WEAR-RESISTANT 314 DIAMOND COATINGS B. LUX & R.
HAUBNER
THEMECHANICAL PROPERTIES OF CVDDIAMOND 326
M.D. DRORY, C.F. GARDINIER, J.M. PINNEO, & J.S. SPECK
ULTIMATE TENSILE STRENGTHOFPOLYCRYSTALLINE 333 DIAMOND FILMS J.L.
DAVIDSON & X. CAO
INDENTATION BEHAVIOROFDIAMOND FILMS ON 340
CEMENTED CARBIDE M.D. DRORY & M.G. PETERS
ADHESIONBETWEENCVDDIAMOND FILMS ANDTUNGSTEN 348 M. ALAM, D.E. PEEBLES, &
D.R. TALLANT
EXCIMER LASERETCHINGAND POLISHING OF DIAMOND 357 FILMS A. BLATTER, U.
BOGLI, L.L. BOUILOV, N.I. CHAPLIEV, V.I. KONOV, S.M. PIMENOV,
A.A.SMOLIN, & I.V. SPITSYN
SEMTRIBOMETRYOFFLUORINATED CVDDIAMOND 365 COATINGS M.N. GARDOS, B.L.
SORIANO, D.E. PATTERSON, R.H. HAUGE, & J.L. MARGRAVE
INVITED PAPER
IMAGE 6
TEMPERATURE AND BIAS EFFECTS ON THEPHYSCIAL AND 374 TRIBOLOGICAL
PROPERTIES OP DIAMOND-LIKE CARBON A. GRILL, V. PATEL, & B.S. MEYERSON
ATOMICCOORDINATION ANDMACROSCOPIC PROPERTIES 385 OF HYDROGENATED
DIAMOND-LIKE CARBON M.A. TAMOR & K.R. CARDUNER
DIAMOND-LIKENANOCOMPOSJTES 393
ANEW CLASS OF ELECTRONIC MATERIALS V.F. DORFMANN, T.A. SKOTHEIM, B.N.
PYPKIN
PHYSICAL DEPOSITION OFDIAMOND - TECHNOLOGY, 400 PROPERTIES, AND
APPLICATIONS S. AISENBERG, A. ALTSHULER, & J.L. SPRAGUE
VISIBLELIGHT EMISSION FROMDIAMOND 408
A.T. COLLINS
FREE EXC1TON ANDBOUND EXCTTON RECOMBINATION 420 RADIATION INUNDOPED
ANDBORON-DOPEDCVD DIAMONDS H. KAWARADA, Y. YOKOTA, H. MATSUYAMA T. SOGI,
& A. HIRAKI
SPATIALLY AND SPECTRALLY RESOLVED 427
CATHODOLUMINESCENCEMEASUREMENTS OFCVD GROWNDIAMOND PARTICLES AND FILMS
L.H. ROBINS, E.N. FARABAUGH, & A. FELDMAN
LATTICEVIBRATIONAL MODESAND DEFECT-ACTIVATED JJR 435 ABSORPTIONS TN
CVDDIAMOND C. KLEIN, T. HARTNETT, R. MILLER, C. ROBINSON
THERMAL CONDUCITVJTYOF NATURAL TYPE JJA DIAMOND 443 BETWEEN 500K AND
1250K J.W. VANDERSANDE, C.B. VINING, A. ZOLTAN
THE ROLEOF ELASTICINTERACTION OFPHONONS IN 451 DIAMOND V.I. NEPSHA, V.R.
GRINBERG, YU. A. KLYUEV, N.A. KOLCHEMANOV, & A.M. NALETOV
HIGHTEMPERATURE GRAPHTTIZATION OFDIAMOND 455 J.K. LEWIS, H. CHEN, S.
NAFIS, M. NIELSEN, S. BONAFEDE, R.O.DMION.&T.FURTAK
OXIDATION OF CVD DIAMOND FILMS 463
Q. SUN &M. ALAM
INVITED PAPER
XI
IMAGE 7
EI^CNACALCOMJUCNVTTY OFDIAMOND FILMS FROM 471 ROOMTEMPERATUREON 1200 C
S.F. ADAMS, J.W. VANDERSANDE, D. ZOLTAN, B.R. STONER, & J.A. VON
WINDHEIM
THE EFFECT OF HYDROGENONTHE ELECTRICAL 479
RESISTIVITY OFPOLYCRYSTALLTNEDIAMOND FILMS M.L. LAKE, D.C. INGRAM, J.W.
VANDERSANDE, & D. ZOLTAN
CHANGEOF RESISTANCE OFDIAMOND SURFACEBY 487 REACTION
WTTHHYDROGENANDOXYGEN H. NAKAHATA, T. IMAI, & N. FUJIMORI
HALOGENATIONOFDIAMOND (100)USING ATOMICBEAMS 494 A. FREEDMAN & CD.
STINESPRING
CHARACTERIZATION OFCVDDIAMOND FILMS WTTH 502
ATOMICFORCEANDSCANNINGTUNNELING MICROSCOPY A.W. PHELPS & T. OWENS
PART IV: APPLICATIONS
* DIAMOND: WHAT,WHEN, ANDWHERE 513
M.N. YODER
IGFETFABRICATION ONHOMOEPITAXIALDIAMOND USING 523 INSITU BORONAND
LITHIUM DOPING G.G. FOUNTAIN, R.A. RUDDER, D.P. MALTA, S.V. HATTANGADY,
R.G. ALLEY, G.C. HUDSON, J.B. POSTHILL, R.J. MARKUNAS,
T.P. HUMPHREYS, R.J. NEMANICH, V. VENKATESAN, & K. DAS
SIMULATION OF DIAMONDPOWER DIODES 530
K. GRAHN, S. ERANEN, & P. KUIVALAINEN
DIAMONDCOLDCATHODES 539 M.W. GEIS, N.N. EFREMOW, J.D. WOODHOUSE & N.D.
MCALEESE METAL-INSULATOR-SEMICONDUCTOR DIODES USING 543 POLYCRYSTALLTNE
DIAMOND THTNFILMS K. MIYATA, D.L. DREIFUS, K. DAS, J.T. GLASS, & K.
KOBASHI
RELIABILITY OFOHMJCCONTACTSTODIAMOND 551
M. ROSER, CA. HEWETT, K.L. MOAZED, & J.R. ZEIDLER
INVITED PAPER
XII
IMAGE 8
EFFECT OF THIN INTERFACIAL SI02FILMS ONMETAL 558 CONTACTS
TOBORONDOPEDDIAMOND FILMS V. VENKATESAN, K. DAS, D.L. DREIFUS, G.G.
FOUNTAIN, R.A. RUDDER, J.B. POSTHILL, & R.J. MARKUNAS
FORMATIONOF SINGLE-CRYSTAL SEMICONDUCTORS-A-C:H 566 FILM HETEROJUNCNONS
V.M. ELINSON, V.V. SLEPTSOV, S.S. GERASIMOVICH, G.F. IVANOVSKY, V.I.
POLYAKOV, O.N. ERMAKOVA,
M.G. ERMAKOV, P.I. PEROV
IMPLANTATION AND DIFFUSION OF ELECTRICALLYACTIVE 574 DOPANTS
INPOLYCRYSTALLJNE DIAMOND M.I. LANDSTRASS, M.A. PIANO, D. MOYER, S.P.
SMITH & R.G. WILSON
ELECTRICAL CHARACTERIZATION OF BORON-IMPLANTED 581 DIAMOND CA. HEWETT,
P.R. DE LA HOUSSAYE, M. ROSER, R.G. WILSON, & J.R. ZEIDLER
THIN,BORON-DOPED DIAMOND FILMS 589
M.I. LANDSTRASS, MA. PIANO, & D. MOYER
THE GROWTHANDSOME PROPERTIES OFDIAMOND FILMS 597 OF P- AND
N-TYPECONDUCITVTRY OBTAINEDBY CRYSTALLIZATION FROMTHEGASPHASE B.V.
SPITSYN & A. E. ALEXENKO
PRODUCTION OF LARGE-AREA MOSAICDIAMOND FILMS 605 APPROACHING SINGLE
CRYSTALQUALITY M.W.GEIS& H.I. SMITH
CONSTRUCTION AND CTARACTERIZATTON OFADIAMOND 608 THIN FILM ANEMOMETER
DA. JAWORSKE, CD. ELLIS, R. RAMESHAM, & T. ROPPEL
FABRICATION OFMCROCHANNELS INSYNTHETIC 615 POLYCRYSTALLINE DIAMOND
THTNFILMS FORHEAT SINKING APPLICATIONS R. RAMESHAM, T. ROPPEL, C. ELLIS,
& M.F. ROSE
NEW MATERIAL FORELECTRONICPACKAGING: DIAMOND 625 THENFILMS BY CHEMICAL
VAPOR DEPOSITION M. BUCK, T.J. CHUANG, H. SEKI, & M. ANSCHEL
INVITED PAPER
XIII
IMAGE 9
PROGRESS INTHE DIAMOND FILM RESEARCH 633
ATUT DALLAS F. DAVANLOO, D.R. JANDER, T.J. LEE, H. PARK, J.H. YOU, &
C.B. COLLINS
WRDE-BANDGAP DIAMOND-LIKE CARBON FILMS FORMED 640 BY RF-DEPOSITION
USINGMAGNETRON DISCHARGE V.V. SLEPTSOV, V.M. ELINSON, N.V. SIMAKINA, &
A.M. BARANOV
DIAMOND-LIKE CARBON FILMS: DEPOSITION PROCESSES, 645 PROPERTIES AND
APPLICATIONS G.F. IVANOVSKY, V.V SLEPTSOV, V.M. ELINSON, A.M. BARANOV,
A.A. KUZIN, S.S. GERASIMOVICH
AUTHORINDEX 653
KEYWORD INDEX 659
INVITED PAPER
XIV
|
| any_adam_object | 1 |
| author_corporate | International Symposium on Diamond Materials Washington, DC |
| author_corporate_role | aut |
| author_facet | International Symposium on Diamond Materials Washington, DC |
| author_sort | International Symposium on Diamond Materials Washington, DC |
| building | Verbundindex |
| bvnumber | BV008381952 |
| callnumber-first | T - Technology |
| callnumber-label | TP873 |
| callnumber-raw | TP873.5.D5 |
| callnumber-search | TP873.5.D5 |
| callnumber-sort | TP 3873.5 D5 |
| callnumber-subject | TP - Chemical Technology |
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| ctrlnum | (OCoLC)25164300 (DE-599)BVBBV008381952 |
| dewey-full | 666/.88 |
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| dewey-ones | 666 - Ceramic & allied technologies |
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| dewey-search | 666/.88 |
| dewey-sort | 3666 288 |
| dewey-tens | 660 - Chemical engineering |
| discipline | Chemie / Pharmazie Physik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1991 Washington DC gnd-content |
| genre_facet | Konferenzschrift 1991 Washington DC |
| id | DE-604.BV008381952 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:19:00Z |
| institution | BVB |
| institution_GND | (DE-588)5074599-2 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005527382 |
| oclc_num | 25164300 |
| open_access_boolean | |
| owner | DE-384 |
| owner_facet | DE-384 |
| physical | XV, 670 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| record_format | marc |
| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | International Symposium on Diamond Materials 2 1991 Washington, DC Verfasser (DE-588)5074599-2 aut Proceedings of the Second International Symposium on Diamond Materials ed. by A. J. Purdes ... Pennington, NJ 1991 XV, 670 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 91,8 Diamant - Couches minces ram Diamants artificiels ram Diamond thin films Congresses Diamonds, Artificial Congresses Diamant (DE-588)4012069-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 Washington DC gnd-content Diamant (DE-588)4012069-7 s DE-604 Purdes, A. J. Sonstige oth Electrochemical Society: Proceedings 91,8 (DE-604)BV001900941 91,8 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005527382&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Proceedings of the Second International Symposium on Diamond Materials Electrochemical Society: Proceedings Diamant - Couches minces ram Diamants artificiels ram Diamond thin films Congresses Diamonds, Artificial Congresses Diamant (DE-588)4012069-7 gnd |
| subject_GND | (DE-588)4012069-7 (DE-588)1071861417 |
| title | Proceedings of the Second International Symposium on Diamond Materials |
| title_auth | Proceedings of the Second International Symposium on Diamond Materials |
| title_exact_search | Proceedings of the Second International Symposium on Diamond Materials |
| title_full | Proceedings of the Second International Symposium on Diamond Materials ed. by A. J. Purdes ... |
| title_fullStr | Proceedings of the Second International Symposium on Diamond Materials ed. by A. J. Purdes ... |
| title_full_unstemmed | Proceedings of the Second International Symposium on Diamond Materials ed. by A. J. Purdes ... |
| title_short | Proceedings of the Second International Symposium on Diamond Materials |
| title_sort | proceedings of the second international symposium on diamond materials |
| topic | Diamant - Couches minces ram Diamants artificiels ram Diamond thin films Congresses Diamonds, Artificial Congresses Diamant (DE-588)4012069-7 gnd |
| topic_facet | Diamant - Couches minces Diamants artificiels Diamond thin films Congresses Diamonds, Artificial Congresses Diamant Konferenzschrift 1991 Washington DC |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005527382&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001900941 |
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