Handbook of the moiré fringe technique:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Amsterdam u.a.
Elsevier
1993
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XIX, 431 S. Ill., graph. Darst. |
| ISBN: | 0444888233 |
Internformat
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| 245 | 1 | 0 | |a Handbook of the moiré fringe technique |c K. Patorski |
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Datensatz im Suchindex
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|---|---|
| adam_text | IMAGE 1
HANDBOOK OF
THE MOIRE FRINGE
TECHNIQUE
K. PATORSKI INSTITUTE FOR DESIGN OF PRECISE AND OPTICAL INSTRUMENTS
WARSAW UNIVERSITY OF TECHNOLOGY
WARSAW, POLAND
WITH A CONTRIBUTION BY
M. KUJAWINSKA
INSTITUTE FOR DESIGN OF PRECISE AND OPTICAL INSTRUMENTS WARSAW
UNIVERSITY OF TECHNOLOGY WARSAW, POLAND
1993
ELSEVIER
AMSTERDAM - LONDON - NEW YORK - TOKYO
K
IMAGE 2
XIV
TABLE OF CONTENTS
PREFACE VII
REFERENCES XI
TABLE OF CONTENTS XIV
1. THEORETICAL INTERPRETATION OF FORMATION OF MOIRE FRINGES 1
1.1. A FOURIER SERIES A P P R O A CH TO THE DESCRIPTION OF MOIR6
PATTERNS 1
1.1.1. DERIVATION OF THE GENERAL EQUATION 2
1.1.2. INFORMATION DISPLAY BY MOIR FRINGES 4
1.1.3. PROFILE OF MOIR6 FRINGES 8
1.2. THE P A R A M E T R IC E Q U A T I ON METHOD 14
1.2.1. TWO FAMILIES OF EQUIDISTANT STRAIGHT LINES 15
1.2.2. E Q U I D I S T A NT CONCENTRIC CIRCLES SUPERIMPOSED ON E Q U I D
I S T A NT STRAIGHT LINES 16
1.2.3. TWO SETS OF EQUIDISTANT CONCENTRIC CIRCLES 17
1.2.4. Z O NE GRATING SUPERIMPOSED ON EQUISPACED STRAIGHT LINES 18
1.2.5. Z O NE GRATING SUPERIMPOSED ON A N O T H ER ZONE GRATING 19
1.2.6. E Q U I A N G U L AR STRAIGHT LINES SUPERIMPOSED ON EQUISPACED
STRAIGHT LINES 21
1.3. DESCRIPTION OF MOIROE IN TERMS OF VECTORIAL SUMS IN FOURIER SPACE 22
1.4. MOIR6 AS AN ALIASING P H E N O M E N ON BY UNDERSAMPLING 24
REFERENCES 28
2. INCOHERENT METHODS OF SUPERIMPOSITION OF STRUCTURES 32
2.1. ADDITIVE TYPE MOIRE 32
2.2. SUBTRACTIVE TYPE MOIR 37
2.3. MULTIPLICATIVE TYPE MOIRE 38
2.4. EXAMPLES OF TWO-STRUCTURE SUPERIMPOSITIONS 41
2.5. SPECIAL TECHNIQUES - USE OF STRUCTURES WITH O R T H O G O N AL
TRANSMITTANCES 44
2.5.1. CODING BY SPECTRAL FILTERS 45
IMAGE 3
TABLE OF CONTENTS
XV
2.5.2. CODING BY O R T H O G O N AL POLARIZATION FILTERS 47
REFERENCES 50
. COHERENT METHODS OF SUPERIMPOSITION 52
3.1. FRINGE PATTERN F O R M A T I ON BY FILTERING OF THE D O U B LE
DIFFRACTION ORDERS 52
3.1.1. INFORMATION C O N T E NT OF DIFFRACTION ORDERS OF DEFORMED
GRATING 52
3.1.2. D O U B LE DIFFRACTION ARRANGEMENT AND C O H E R E NT OPTICAL
PROCESSOR 54
3.1.3. FRINGE MULTIPLICATION AND SENSITIVITY E N H A N C E M E NT . ..
.55
3.1.4. C O N T R A ST IMPROVEMENT OF THE ADDITIVE TYPE MOIR6 59
3.1.5. FRINGE SHIFTING AND MISMATCH METHODS UNDER C O H E R E NT S U P E
R I M P O S I T I ON 61
3.1.6. S E P A R A T I ON OF MOIROE FRINGE FAMILIES 62
3.1.7. OPTICAL DIFFERENTIATION OF GRATING ENCODED INFORMATION 62
3.2. O V E R L A P P I NG REAL TIME INTERFERENCE FRINGES WITH A RECORDED
PATTERN 66
REFERENCES 67
. INFLUENCE OF THE TYPE OF ILLUMINATION AND SEPARATION OF GRAETINGS ON
THE INTENSITY DISTRIBUTION IN MOIRE FRINGES 69
4 . 1. THE CASE OF C O H E R E NT ILLUMINATION 70
4.1.1. THE D O U B LE DIFFRACTION SYSTEM GENERAL CONSIDERATIONS 70
4.1.2. PRODUCING BINARY AMPLITUDE GRATINGS IN T HE D O U B LE
DIFFRACTION SYSTEM 77
4.2. THE CASE OF I N C O H E R E NT ILLUMINATION 79
4.2.1. I N T R O D U C T I ON 79
4.2.2. M U L T I P LE I N C O H E R E NT SUPERIMPOSITION OF SELF-IMAGING
81
4.2.3. U T I L I Z A T I ON OF GAP EFFECT WITH A FOCUSED OBSERVATION
SYSTEM O N TO A SECOND GRATING PLANE 87
4.3. THE CASE OF PARTIALLY COHERENT ILLUMINATION 88
4.3.1. SELF-IMAGING UNDER PARTIALLY COHERENT ILLUMINATION . .. .88
4.3.2. D O U B L E - G R A T I NG SYSTEM WITH A DEFOCUSED OBSERVATION
PLANE 91
REFERENCES 95
IMAGE 4
XVI
TABLE OF CONTENTS
5. MOIRE DISPLACEMENT TRANSDUCERS 99
5.1. BASIC CONCEPTS 99
5.2. GRAETING READING HEADS 102
5.2.1. TRANSMISSION READING HEADS 102
5.2.2. REFLECTION READING HEADS 104
5.2.3. PROJECTION READING HEADS 106
5.2.4. INTERFERENCE READING HEADS 106
5.3. ACCURACY OF MOIR6 FRINGE TRANSDUCERS 107
5.3.1. INTERPOLATION ERRORS 107
5.3.2. ERROR SOURCES AND CORRECTION METHODS 111
5.3.2.1. PHASE QUADRATURE ERRORS 112
5.3.2.2. AMPLITUDE ERRORS 117
5.3.2.3. RESIDUAL BIAS ERRORS 119
5.3.2.4. WAVEFORM RESIDUAL ERROR 120
5.3.2.5. ERROR CONSIDERATIONS FOR ANGULAR MEASUREMENT 120
5.3.3. INTERPOLATION METHODS - IMPLEMENTATION 122
5.3.3.1. AMPLITUDE TRACKING 122
5.3.3.2. PHASE TRACKING 124
5.3.4. DIFFRACTION EFFECTS 127
5.3.4.1. THEORETICAL FORMULATION 128
5.3.4.2. USE OF BINARY AMPLITUDE GRATINGS WITH VARIOUS OPENING NUMBERS
129
5.3.4.3. MOIRE FRINGE PATTERNS GENERATED BY REAL NONMONOCHROMATIC LIGHT
SOURCE 132
5.3.4.4. INFLUENCE OF AXIAL DEFOCUS OF PHOTODETECTORS 132
REFERENCES 135
6. MOIRE FRINGE ALIGNMENT METHODS 140
6.1. OPTICAL ALIGNMENT BY WHOLE-FIELD DETECTION OF MOIR6 FRINGES 140
6.1.1. IN-PLANE ALIGNMENT AIDS 140
6.1.2. ALIGNMENT IN SPACE 143
6.2. MOIR6 PATTERNS FOR THREE POINT ALIGNMENT TECHNIQUE 144
6.2.1. INTRODUCTION 144
6.2.2. DERIVATION OF COMPONENT STRUCTURES FROM MOIR6 PATTERNS. MOIR6
PATTERNS BY PURE TRANSLATION 146
6.3. SUBMICRON ALIGNMENT METHODS FOR LITHOGRAPHY 156
6.3.1. COHERENT MOIR6 ALIGNMENT FOR PROXIMITY PRINTING 157
6.3.2. COHERENT MOIR6 ALIGNMENT FOR OPTICAL PROJECTION PRINTING 163
REFERENCES 167
IMAGE 5
TABLE OF CONTENTS
XVU
7. MOIRE PHOTOGRAPHY 170
7.1. PRINCIPLES 171
7.2. IMPLEMENTATION 173
7.2.1. CAMERA 173
7.2.2. SPECIMEN GRATINGS 174
7.3. FRINGE PATTERN RECORDING AND PROCESSING 179
7.4. EXAMPLES OF APPLICATIONS 180
REFERENCES 185
8. MOIRE METHODS IN INTERFEROMETRY 186
8.1. MOIR6 METHODS IN TWO-BEAM INTERFEROMETRY WITH A REFERENCE WAVEFRONT
186
8.1.1. SUBTRACTION OF INSTRUMENTAL ERRORS 186
8.1.2. REDUCING OR ELIMINATING THE CARRIER FRINGES IN AN INTERFEROGRAM
190
8.1.3. WHOLE-FIELD DIFFERENTIATION OFFRINGE PATTERNS 192
8.1.4. ADDITION OF PHASE FUNCTIONS 193
8.1.5. TWO-WAVELENGTH INTERFEROMETRY 194
8.2. MOIR6 METHODS IN THE TWO-BEAM INTERFEROMETRY WITH CONJUGATE
WAVEFRONTS 196
8.2.1. DETERMINATION OF DISPLACEMENTS 196
8.2.2. DETERMINATION AND PROCESSING OF DISPLACEMENT DERIVATIVES 200
8.3. MOIR6 METHODS IN GRAETING SHEARING INTERFEROMETRY 207
8.3.1. TALBOT INTERFEROMETRY 207
8.3.2. TWO-BEAM LATERAL SHEAR INTERFEROMETERS 213
REFERENCES 216
9. SHADOW MOIRE TOPOGRAPHY 220
9.1. PRINCIPLES 220
9.2. THEORETICAL DESCRIPTION 222
9.3. LOCALIZATION AND CONTRAST OF MOIR6 FRINGES 224
9.4. ABSOLUTE FRINGE ORDER DETERMINATION 227
9.5. RELATIVE FRINGE ORDER DETERMINATION 230
9.5.1. TECHNIQUES FOR ORDINARY MOIR6 FRINGES 231
9.5.2. TECHNIQUES FOR MOIR6 FRINGES WITH ASYMMETRICAL PROFILE 234
9.6. INSTRUMENTAL CONSIDERATIONS 236
9.6.1. SHADOW GRIDS 236
9.6.2. LIGHT SOURCES 240
9.6.3. OBJECT SURFACE PREPARATION 241
K
IMAGE 6
XVM
TABLE OF CONTENTS
9.7. APPLICATIONS 241
REFERENCES 249
10. PROJECTION MOIRE TOPOGRAPHY 254
10.1. PRINCIPLES AND BASIC CONFIGURATIONS 254
10.2. CONFIGURATIONS WITH A SINGLE PROJECTION SYSTEM 256
10.2.1. PROJECTION AND OBSERVATION SYSTEMS WITH AXES PARALLEL 256
10.2.2. PROJECTION AND OBSERVATION SYSTEMS WITH AXES INTERSECTING 258
10.3. SYSTEMS WITHOUT GRAETING IN THE OBSERVATION SYSTEM 261
10.4. DOUBLE PROJECTION MOIR6 TOPOGRAPHY 268
10.5. OFF-LINE DEMODULATION METHODS 271
10.6. CONTRAST OF MOIR6 FRINGES 273
10.7. ABSOLUTE AND RELATIVE FRINGE ORDERING 274
10.7.1. ABSOLUTE FRINGE ORDERING 274
10.7.2. RELATIVE FRINGE ORDERING - THE CASE OF PROCESSING OF SYMMETRICAL
PROFILE MOIR6 FRINGES 275
10.7.3. RELATIVE FRINGE ORDERING - METHODS INTRODUCING ASYMMETRIC
PROFILE MOIR6 FRINGES 277
10.8. INSTRUMENTAL CONSIDERATIONS 277
10.8.1. PROJECTION AND DETECTION GRATINGS 277
10.8.2. LIGHT SOURCES AND ILLUMINATION OPTICS 280
10.8.3. DEMODULATION OPTICS AND PATTERN RECORDING 280
10.9. APPLICATIONS 282
REFERENCES 289
11. REFLECTION MOIRE METHOD 295
11.1. LIGTENBERG AND RIEDER-RITTER CONFIGURATIONS 295
11.1.1. DETERMINATION OF THE SLOPE OF ELEMENTS IN THE SURFACE 295
11.1.2. DIFFERENTIATION OF MOIR6 PATTERNS (CURVATURE DETERMINATION) 302
11.2 REFLECTION MOIRE ARRANGEMENTS FOR STUDYING DYNAMIC EVENTS 308
11.2.1. SLOPE ANGLE DETERMINATION 308
11.2.2 CURVATURE DETERMINATION 312
11.3. SPECIFIC EXPERIMENTAL ARRANGEMENT FOR STUDYING THE FLEXURE OF
PLATES 315
11.4. APPLICATIONS 317
REFERENCES 322
IMAGE 7
TABLE OFCONTENTS
XVC
12. MOIRE AS A GRAPHICAL SOLUTION TO PHYSICAL PROBLEMS 325
12.1. WAVE PHYSICS 325
12.1.1. BINARY AMPLITUDE GRATING AS AN ANALOG TO ELECTROMAGNETIC WAVE
325
12.1.2 MODELING OF INTERFERENCE PHENOMENA 326
12.2. FIELD PHYSICS 333
12.2.1. DEMONSTRATION OF ELECTRIC-FORCE LINES 334
12.2.2. SOLVING POTENTIAL FIELD PROBLEMS 335
12.2.3. DEMONSTRATING CENTRIFUGAL SPHERICAL WAVES 336
12.3. INTERPRETATION OF IMAGES FORMED IN THE FIELD-ION MICROSCOPE 337
REFERENCES 338
13. AUTOMATIC FRINGE PATTERN ANALYSIS 339
13.1. INTRODUCTION 339
13.2. INTENSITY METHODS 342
13.2.1. FRINGE PATTERN PREPROCESSING 345
13.2.2. FRINGE RECOGNITION 346
13.2.3. FRINGE ORDER ASSIGNMENT 352
13.3. PHASE MEASURING METHODS: GENERAL CONSIDERATIONS 355
13.4. ELECTRONIC PHASE-MEASURING METHODS 358
13.5. ANALYTICAL PHASE-MEASURING METHODS 360
13.5.1. SPATIAL-CARRIER FRINGE PATTERN ANALYSIS 362
13.5.1.1. FOURIER TRANSFORM METHOD 362
13.5.1.2. SPACE-DOMAIN PROCESSING 368
13.5.1.3. COMPUTATIONAL COMPLEXITIES 371
13.5.2. PHASE-SHIFTING METHOD 372
13.5.2.1. PHASE-SHIFTING ALGORITHMS 372
13.5.2.2. REMOVAL OF PHASE AMBIGUITIES (PHASE UNWRAPPING) 373
13.5.2.3. TEMPORAL PHASE-SHIFTING METHOD 375
13.5.2.4. SPATIAL PHASE-SHIFTING TECHNIQUES 388
13.5.2.5. SPATIAL-CARRIER PHASE SHIFTING TECHNIQUE 395
13.6. COMPARISON OF AUTOMATIC FRINGE PATTERN ANALYSIS METHODS 398
13.7. FUTURE TRENDS 400
REFERENCES 401
SUBJECT INDEX 411
|
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| illustrated | Illustrated |
| indexdate | 2024-07-09T17:18:23Z |
| institution | BVB |
| isbn | 0444888233 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005501703 |
| oclc_num | 26801397 |
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| owner_facet | DE-384 DE-91 DE-BY-TUM DE-739 |
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| spelling | Patorski, Krzystof Verfasser aut Handbook of the moiré fringe technique K. Patorski Amsterdam u.a. Elsevier 1993 XIX, 431 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Moiré, Méthode de - Guides, manuels, etc ram Moiré method Handbooks, manuals, etc Moiréverfahren (DE-588)4170360-1 gnd rswk-swf Moiréverfahren (DE-588)4170360-1 s DE-604 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005501703&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Patorski, Krzystof Handbook of the moiré fringe technique Moiré, Méthode de - Guides, manuels, etc ram Moiré method Handbooks, manuals, etc Moiréverfahren (DE-588)4170360-1 gnd |
| subject_GND | (DE-588)4170360-1 |
| title | Handbook of the moiré fringe technique |
| title_auth | Handbook of the moiré fringe technique |
| title_exact_search | Handbook of the moiré fringe technique |
| title_full | Handbook of the moiré fringe technique K. Patorski |
| title_fullStr | Handbook of the moiré fringe technique K. Patorski |
| title_full_unstemmed | Handbook of the moiré fringe technique K. Patorski |
| title_short | Handbook of the moiré fringe technique |
| title_sort | handbook of the moire fringe technique |
| topic | Moiré, Méthode de - Guides, manuels, etc ram Moiré method Handbooks, manuals, etc Moiréverfahren (DE-588)4170360-1 gnd |
| topic_facet | Moiré, Méthode de - Guides, manuels, etc Moiré method Handbooks, manuals, etc Moiréverfahren |
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