Proceedings of the Ninth European Conference on Chemical Vapour Deposition: EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Les Ulis
Éd. de Physique
1993
|
| Schriftenreihe: | [Journal de physique / 4]
1993,3 : Supplément au Journal de physique II, no. 8 |
| Schlagworte: | |
| Beschreibung: | IX, 615 S. Ill., graph. Darst. |
| ISBN: | 2868831931 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV008316613 | ||
| 003 | DE-604 | ||
| 005 | 19940307 | ||
| 007 | t | ||
| 008 | 931104s1993 ad|| |||| 10||| eng d | ||
| 020 | |a 2868831931 |9 2-86883-193-1 | ||
| 035 | |a (OCoLC)66279587 | ||
| 035 | |a (DE-599)BVBBV008316613 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-384 |a DE-12 |a DE-91G |a DE-83 | ||
| 111 | 2 | |a European Conference on Chemical Vapour Deposition |n 9 |d 1993 |c Tampere |j Verfasser |0 (DE-588)5093992-0 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the Ninth European Conference on Chemical Vapour Deposition |b EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 |c ed. by: Tapio Mäntylä |
| 264 | 1 | |a Les Ulis |b Éd. de Physique |c 1993 | |
| 300 | |a IX, 615 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a [Journal de physique / 4] |v 1993,3 : Supplément au Journal de physique II, no. 8 | |
| 650 | 0 | 7 | |a CVD-Verfahren |0 (DE-588)4009846-1 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1993 |z Tampere |2 gnd-content | |
| 689 | 0 | 0 | |a CVD-Verfahren |0 (DE-588)4009846-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Mäntylä, Tapio |e Sonstige |4 oth | |
| 810 | 2 | |a 4] |t [Journal de physique |v 1993,3 : Supplément au Journal de physique II, no. 8 |w (DE-604)BV000018697 |9 1993,3 | |
| 940 | 1 | |n oe | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-005494369 | ||
| 942 | 1 | 1 | |e 22/bsb |g 4897 |
Datensatz im Suchindex
| _version_ | 1804122709872869376 |
|---|---|
| any_adam_object | |
| author_corporate | European Conference on Chemical Vapour Deposition Tampere |
| author_corporate_role | aut |
| author_facet | European Conference on Chemical Vapour Deposition Tampere |
| author_sort | European Conference on Chemical Vapour Deposition Tampere |
| building | Verbundindex |
| bvnumber | BV008316613 |
| ctrlnum | (OCoLC)66279587 (DE-599)BVBBV008316613 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01456nam a2200361 cb4500</leader><controlfield tag="001">BV008316613</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19940307 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">931104s1993 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">2868831931</subfield><subfield code="9">2-86883-193-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)66279587</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV008316613</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-12</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">European Conference on Chemical Vapour Deposition</subfield><subfield code="n">9</subfield><subfield code="d">1993</subfield><subfield code="c">Tampere</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5093992-0</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Proceedings of the Ninth European Conference on Chemical Vapour Deposition</subfield><subfield code="b">EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993</subfield><subfield code="c">ed. by: Tapio Mäntylä</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Les Ulis</subfield><subfield code="b">Éd. de Physique</subfield><subfield code="c">1993</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IX, 615 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">[Journal de physique / 4]</subfield><subfield code="v">1993,3 : Supplément au Journal de physique II, no. 8</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CVD-Verfahren</subfield><subfield code="0">(DE-588)4009846-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1993</subfield><subfield code="z">Tampere</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">CVD-Verfahren</subfield><subfield code="0">(DE-588)4009846-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mäntylä, Tapio</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">4]</subfield><subfield code="t">[Journal de physique</subfield><subfield code="v">1993,3 : Supplément au Journal de physique II, no. 8</subfield><subfield code="w">(DE-604)BV000018697</subfield><subfield code="9">1993,3</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="n">oe</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-005494369</subfield></datafield><datafield tag="942" ind1="1" ind2="1"><subfield code="e">22/bsb</subfield><subfield code="g">4897</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1993 Tampere gnd-content |
| genre_facet | Konferenzschrift 1993 Tampere |
| id | DE-604.BV008316613 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:18:12Z |
| institution | BVB |
| institution_GND | (DE-588)5093992-0 |
| isbn | 2868831931 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005494369 |
| oclc_num | 66279587 |
| open_access_boolean | |
| owner | DE-703 DE-384 DE-12 DE-91G DE-BY-TUM DE-83 |
| owner_facet | DE-703 DE-384 DE-12 DE-91G DE-BY-TUM DE-83 |
| physical | IX, 615 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Éd. de Physique |
| record_format | marc |
| series2 | [Journal de physique / 4] |
| spelling | European Conference on Chemical Vapour Deposition 9 1993 Tampere Verfasser (DE-588)5093992-0 aut Proceedings of the Ninth European Conference on Chemical Vapour Deposition EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 ed. by: Tapio Mäntylä Les Ulis Éd. de Physique 1993 IX, 615 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier [Journal de physique / 4] 1993,3 : Supplément au Journal de physique II, no. 8 CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Tampere gnd-content CVD-Verfahren (DE-588)4009846-1 s DE-604 Mäntylä, Tapio Sonstige oth 4] [Journal de physique 1993,3 : Supplément au Journal de physique II, no. 8 (DE-604)BV000018697 1993,3 |
| spellingShingle | Proceedings of the Ninth European Conference on Chemical Vapour Deposition EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 CVD-Verfahren (DE-588)4009846-1 gnd |
| subject_GND | (DE-588)4009846-1 (DE-588)1071861417 |
| title | Proceedings of the Ninth European Conference on Chemical Vapour Deposition EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 |
| title_auth | Proceedings of the Ninth European Conference on Chemical Vapour Deposition EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 |
| title_exact_search | Proceedings of the Ninth European Conference on Chemical Vapour Deposition EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 |
| title_full | Proceedings of the Ninth European Conference on Chemical Vapour Deposition EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 ed. by: Tapio Mäntylä |
| title_fullStr | Proceedings of the Ninth European Conference on Chemical Vapour Deposition EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 ed. by: Tapio Mäntylä |
| title_full_unstemmed | Proceedings of the Ninth European Conference on Chemical Vapour Deposition EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 ed. by: Tapio Mäntylä |
| title_short | Proceedings of the Ninth European Conference on Chemical Vapour Deposition |
| title_sort | proceedings of the ninth european conference on chemical vapour deposition euro cvd nine tampere finland 22 27 august 1993 |
| title_sub | EURO CVD NINE ; Tampere, Finland, 22 - 27 August 1993 |
| topic | CVD-Verfahren (DE-588)4009846-1 gnd |
| topic_facet | CVD-Verfahren Konferenzschrift 1993 Tampere |
| volume_link | (DE-604)BV000018697 |
| work_keys_str_mv | AT europeanconferenceonchemicalvapourdepositiontampere proceedingsofthenintheuropeanconferenceonchemicalvapourdepositioneurocvdninetamperefinland2227august1993 AT mantylatapio proceedingsofthenintheuropeanconferenceonchemicalvapourdepositioneurocvdninetamperefinland2227august1993 |