The physics of micro, nano fabrication:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York u.a.
Plenum Press
1992
|
| Series: | Microdevices
|
| Subjects: | |
| Physical Description: | XIX, 650 S. Ill., graph. Darst. |
| ISBN: | 0306441462 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV008311489 | ||
| 003 | DE-604 | ||
| 005 | 19940406 | ||
| 007 | t | ||
| 008 | 931028s1992 ad|| |||| 00||| eng d | ||
| 020 | |a 0306441462 |9 0-306-44146-2 | ||
| 035 | |a (OCoLC)26398446 | ||
| 035 | |a (DE-599)BVBBV008311489 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 |a DE-91 | ||
| 050 | 0 | |a TK7874 | |
| 082 | 0 | |a 621.381 |2 20 | |
| 084 | |a UX 2350 |0 (DE-625)146952: |2 rvk | ||
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 084 | |a ELT 270f |2 stub | ||
| 100 | 1 | |a Brodie, Ivor |e Verfasser |0 (DE-588)141138750 |4 aut | |
| 245 | 1 | 0 | |a The physics of micro, nano fabrication |c Ivor Brodie and Julius J. Muray |
| 246 | 1 | 3 | |a The physics of micro-, nano-fabrication |
| 264 | 1 | |a New York u.a. |b Plenum Press |c 1992 | |
| 300 | |a XIX, 650 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Microdevices | |
| 650 | 7 | |a Dunne films |2 gtt | |
| 650 | 7 | |a Micro-elektronica |2 gtt | |
| 650 | 7 | |a Microélectronique |2 ram | |
| 650 | 4 | |a Microelectronics | |
| 650 | 4 | |a Thin-film circuits | |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 1 | 1 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Muray, Julius J. |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-005490753 | ||
Record in the Search Index
| _version_ | 1804122703638036480 |
|---|---|
| any_adam_object | |
| author | Brodie, Ivor Muray, Julius J. |
| author_GND | (DE-588)141138750 |
| author_facet | Brodie, Ivor Muray, Julius J. |
| author_role | aut aut |
| author_sort | Brodie, Ivor |
| author_variant | i b ib j j m jj jjm |
| building | Verbundindex |
| bvnumber | BV008311489 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UX 2350 ZN 4100 |
| classification_tum | ELT 270f |
| ctrlnum | (OCoLC)26398446 (DE-599)BVBBV008311489 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01607nam a2200493 c 4500</leader><controlfield tag="001">BV008311489</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19940406 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">931028s1992 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0306441462</subfield><subfield code="9">0-306-44146-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)26398446</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV008311489</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-91</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7874</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UX 2350</subfield><subfield code="0">(DE-625)146952:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 270f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Brodie, Ivor</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)141138750</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">The physics of micro, nano fabrication</subfield><subfield code="c">Ivor Brodie and Julius J. Muray</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">The physics of micro-, nano-fabrication</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York u.a.</subfield><subfield code="b">Plenum Press</subfield><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIX, 650 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Microdevices</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Dunne films</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Micro-elektronica</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microélectronique</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin-film circuits</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Muray, Julius J.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-005490753</subfield></datafield></record></collection> |
| id | DE-604.BV008311489 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:18:06Z |
| institution | BVB |
| isbn | 0306441462 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005490753 |
| oclc_num | 26398446 |
| open_access_boolean | |
| owner | DE-384 DE-91 DE-BY-TUM |
| owner_facet | DE-384 DE-91 DE-BY-TUM |
| physical | XIX, 650 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | Plenum Press |
| record_format | marc |
| series2 | Microdevices |
| spelling | Brodie, Ivor Verfasser (DE-588)141138750 aut The physics of micro, nano fabrication Ivor Brodie and Julius J. Muray The physics of micro-, nano-fabrication New York u.a. Plenum Press 1992 XIX, 650 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microdevices Dunne films gtt Micro-elektronica gtt Microélectronique ram Microelectronics Thin-film circuits Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s Muray, Julius J. Verfasser aut |
| spellingShingle | Brodie, Ivor Muray, Julius J. The physics of micro, nano fabrication Dunne films gtt Micro-elektronica gtt Microélectronique ram Microelectronics Thin-film circuits Halbleitertechnologie (DE-588)4158814-9 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4327470-5 |
| title | The physics of micro, nano fabrication |
| title_alt | The physics of micro-, nano-fabrication |
| title_auth | The physics of micro, nano fabrication |
| title_exact_search | The physics of micro, nano fabrication |
| title_full | The physics of micro, nano fabrication Ivor Brodie and Julius J. Muray |
| title_fullStr | The physics of micro, nano fabrication Ivor Brodie and Julius J. Muray |
| title_full_unstemmed | The physics of micro, nano fabrication Ivor Brodie and Julius J. Muray |
| title_short | The physics of micro, nano fabrication |
| title_sort | the physics of micro nano fabrication |
| topic | Dunne films gtt Micro-elektronica gtt Microélectronique ram Microelectronics Thin-film circuits Halbleitertechnologie (DE-588)4158814-9 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Dunne films Micro-elektronica Microélectronique Microelectronics Thin-film circuits Halbleitertechnologie Nanotechnologie |
| work_keys_str_mv | AT brodieivor thephysicsofmicronanofabrication AT murayjuliusj thephysicsofmicronanofabrication |